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Depositions of the dielectric thin-films at low temperatures without greenhouse gas, nitrous oxide (N $$_{2}$$ O) is one of the most critical challenges in modern technologies for microelectronics, optoelectronics, and nanoelectronics. The present study demonstrates that thin dielectric layers deposit by inductively-coupled plasma-enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures ( $$< 300\,^{\circ }$$ C) can be successfully optimized and has the potential to reduce the environmental impact significantly. A particular focus is made on the improvement of the optical properties that are strongly correlated to the physicochemical bonds film properties. Typical deposition rates range from 10 to 20 nm/min, depending mainly on power, pressure, and gas flows. This study opens up large scale applications that require lower hydrogen content and a stable process. The presented results emphasize green manufacturing technologies and can be valuable for a wide range of applications using a complementary metal-oxide-semiconductor (CMOS)-compatible technology.

4D structures are tridimensional structures with time-varying abilities that provide high versatility, sophisticated designs, and a broad spectrum of actuation and sensing possibilities. The downsizing of these structures below 100 μm opens up exceptional opportunities for many disciplines, including photonics, acoustics, medicine, and nanorobotics. However, it requires a paradigm shift in manufacturing methods, especially for dynamic structures. A novel fabrication method based on ion-induced folding of planar multilayer structures embedding their actuation is proposed-the planar structures are fabricated in bulk through batch microfabrication techniques. Programmable and accurate bidirectional foldings (-70° - +90°) of Silica/Chromium/Aluminium (SiO2 /Cr/Al) multilayer structures are modeled, experimentally demonstrated then applied to embedded electrothermal actuation of controllable and dynamic 4D nanorobotic structures. The method is used to produce high-performances case-study grippers for nanorobotic applications in confined environments. Once folded, a gripping task at the nano-scale is demonstrated. The proposed fabrication method is suitable for creating small-scale 4D systems for nanorobotics, medical devices, and tunable metamaterials, where rapid folding and enhanced dynamic control are required.

International audience; In this paper, we study the influence of annealing on the performance of Resistive Temperature Detectors made from Nickel thin films. The aimed application is heat flux sensing. The substrate is made of Borofloat glass with a Chromium adhesive layer. Several annealing temperatures between 150°C and 300°C are applied to this assembly. The thin films as deposited and after annealing are analyzed through SEM images. The evolution of the resistance and the temperature coefficient of the sensor are discussed. An annealing temperature is selected that ensures the repeatability of measurements.

This paper presents a method to determine the mechanical properties of piezoelectric thin films. The vibrational behavior of microcantilevers and clamped–clamped beams actuated by aluminum nitride (AlN) piezoelectric films were analyzed in order to investigate the suitability of these devices as characterization tools. Different geometries of resonators composed of a free-standing structure made up of a TiPt/AlN/TiPt piezoelectric stack were tested. The out-of-plane motion of the resonators was assessed by laser Doppler vibrometry. An AlN Young’s modulus of about 200GPa was extracted from resonance-frequency measurements by means of Comsol software simulations that allow taking into account AlN underetching. This value of Young’s modulus was compared to the one measured by a nanoindentationtechnique. The quality of crystallinity was also assessed using X-ray diffraction (XRD) measurements. We then estimated the residual stress (about 200MPa) using an interferometry measurement.

In this study, the authors have demonstrated that it is possible to realize several three-dimensional (3D) micro- and nanostructures, by the fabrication of the smallest microhouse using a dual beam scanning electron microscope (SEM)/focused ion beam (FIB) Auriga 60 from Zeiss together with a six degree of freedom robot built with SmarAct components. In this new type of nanolab, cutting, etching, folding, assembling, and then welding thin membranes of silica on top of a cleaved optical fiber SMF28, or production of micro- and nanostructures, like the microhouse, are possible. The authors have experimentally shown that FIB can be used, in this new generation of micro/nanofactory, in combination with SEM, and gas injection system, in order to fabricate three-dimensional microstructures: a microhouse in this study, with ultrahigh accuracy assembly down to 10 nm. By using the theory of sputtering, the authors are able to propose a model of folding thin membranes of numerous materials such as metals, polymers, or crystals, i.e., silica, silicon, potassium tantalite, or lithium niobate. This method is usually described as origami in the literature [W. J. Aroa, H. I. Smith, and G. Barbastathis, Microelectron. Eng. 84, 1454 (2007); W. J. Aroa et al., J. Vac. Sci. Technol., B 25, 2184 (2007); and K. Chalapat et al., Adv. Mater. 25, 91 (2013)]. The experimental results indicate that the introduction of a microrobot inside the SEM vacuum chamber will provide the means to enlarge the scope of clean room facilities to build complex and smart 3D microsystems with heterogeneous materials, especially on the facet of an optical fiber in the lab on fiber new field. The authors propose a new way to easily manufacture many kinds of optical functions for light trapping based on nanoantennas, nanophotonic crystal, axicon or lattice, 3D biosensor with origami, and nanopatterning surfaces or carbon nanotubes, etc.In this study, the authors have demonstrated that it is possible to realize several three-dimensional (3D) micro- and nanostructures, by the fabrication of the smallest microhouse using a dual beam scanning electron microscope (SEM)/focused ion beam (FIB) Auriga 60 from Zeiss together with a six degree of freedom robot built with SmarAct components. In this new type of nanolab, cutting, etching, folding, assembling, and then welding thin membranes of silica on top of a cleaved optical fiber SMF28, or production of micro- and nanostructures, like the microhouse, are possible. The authors have experimentally shown that FIB can be used, in this new generation of micro/nanofactory, in combination with SEM, and gas injection system, in order to fabricate three-dimensional microstructures: a microhouse in this study, with ultrahigh accuracy assembly down to 10 nm. By using the theory of sputtering, the authors are able to propose a model of folding thin membranes of numerous materials such as metals, polymers, ...

Although titanium dental implants are biocompatible, exhibit excellent corrosion resistance and high mechanical resistance, the material fails in providing resistance to infection because it exhibits poor antimicrobial activity. To address these issues, we deposited silver onto titanium abutments (Grade 5 titanium discs) using direct current (DC) sputtering and assessed the antimicrobial activity and biocompatibility of the modified implant material. Atomic absorption spectrometry and X-ray photoelectron spectroscopy were employed to investigate the concentration and elemental composition of the deposited silver. As expected, silver deposited using DC plasma was uniform and good control over the deposition could be achieved by varying the sputtering time. Moderate biocompatible responses (up to 69% viability) were observed in primary human gingival fibroblast cells incubated in the presence of Ti sputtered with Ag for 5min. Silver deposited titanium (Ti-Ag) showed excellent antibacterial effects on Pseudomonas aeruginosa and Streptococcus mutans at a very low concentration (Ag content 1.2 and 2.1μg/mm2). However, higher concentration of silver (6μg/mm2) was required to achieve a reduction in cell viability of Staphylococcus aureus and Candida albicans. The silver sputtered Ti abutments could maintain a long-term antibacterial activity as evidenced by the release of silver up to 22days in simulated body fluid. Our study illustrates that silver deposited titanium is indeed a promising candidate for soft tissue integration on dental abutments and prevents initial microbial adhesion.

International audience; The article presents the design, fabrication and characterization of platinum thin-film Resistance Temperature Detectors (RTDs)for heat flux sensing applications. The microfabrication process is described and the thin films are analysed by several methodsincluding SEM, XRD and profilometry. Estimation of experimental uncertainties is performed. The influence of annealing, selfheating,2-wire and 4-wire connections are studied. The analysis and experimental results show that the RTDs have a goodrepeatability when an annealing process is performed and a maximal injected current are used. A measurement uncertainty of0.14°C is achieved. The observed Temperature Coefficient Ratio is sufficient to ensure variation of the resistance in thetemperature range. The heat flux measurements made with the sensor are validated in a dedicated test bench and present agood repeatability.

International audience; A metal-containing polymer has been prepared by electropolymerization of an homoleptic Ru(II)-terpyridine complex bearing pyrrole heterocycles. The polymer is obtained as a thinfilm at the surface ofelectrodes, and has been characterized by electrochemical measurements, XPS and microscopy. It hasbeen shown that this polymer acts as an active gas sensitive layer since it enables the detection of anammonia gasflow through layer’s resistivity measurements.

International audience; The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductively-coupled plasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can be successfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigated for their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip. We report here on the fabrication and characterization of stable and good reliabilities of SiOx deposited at 80°C at different pressures. The refractive index (n) of SiOx varied from 1.456 to 1.462. The results show that the sensitivity and minimum light reflectivity at the resonance angle is extremely sensitive to any changes in the index of refraction and any changes in optical thickness.

International audience; The DC reactive magnetron sputtering of a metallic tungsten target was performed in an argon + oxygen atmosphere for depositing tungsten oxide thin films. In order to control the oxygen concentration in the films, the reactive gas pulsing process, namely RGPP, was implemented. Rectangular pulses were used with a constant pulsing period T = 16 s whereas the duty cycle α (time of oxygen injection to pulsing period T ratio) was systematically changed from 0 to 100% of T. This pulsing injection of the reactive gas allowed a gradual evolution of the films composition from pure metallic to over-stoichiometric WO3+ɛ’ compounds. These WOx films were sputter deposited on commercial MSP 769 Heraeus platforms so as to be used as a sensor for the dodecane gas. It is shown that the sensing performances carried out at 573 K can be adjusted as a function of the duty cycle used during the deposition stage. The relationship between sensing properties and physic-chemical behaviours of the films was especially discussed.

Titanium thin films were deposited by DC magnetron sputtering. The glancing angle deposition (GLAD) method was implemented to prepare two series of titanium films: perpendicular and oriented columnar structures. The first series was obtained with a conventional incident angle α of the sputtered particles (α = 0°), whereas the second one used a grazing incident angle α = 85°. Afterwards, the films were annealed in air using six cycles of temperature ranging from 293 K to 773 K. DC electrical conductivity was measured during the annealing treatment. Films deposited by conventional sputtering (α = 0°) kept a typical metallic-like behavior versus temperature (σ300 K = 2.0 × 106 S m-1 and TCR293 K = 1.52 × 10-3 K-1), whereas those sputtered with α = 85° showed a gradual transition from metal to dielectric. Such a transition was mainly attributed to the high porous structure, which favors the oxidation of titanium films to tend to the TiO2 compound.

We report the development of a quick process for fabricating lithium niobate ridge waveguides with smooth walls, aspect ratios larger than 500 and side-wall verticality of 88°. The method is based on optical grade dicing, and allows the fabrication of ridges with a top width of 1 µm and a depth of more than 500 µm. Smart-cut ridge waveguides and strongly confined proton exchanged ridge waveguides are demonstrated. We show that the method enables the fabrication of ridge waveguides with propagation losses as low as 0.5 dB cm−1. A new fabrication process is thus proposed for the fabrication of optical components with enhanced acousto-optic, electro-optic or nonlinear interactions. The high aspect ratios open opportunities towards the development of 3D photonic components in thin films of LiNbO3, and towards hybrid integration of LiNbO3 components.

A 3 : 1 composition of functional monomer (FM)-multifunctional acrylate was spin-coated and later crosslinked under the influence of oxygen plasma on the surface of poly(dimethyl siloxane) (PDMS) to generate a surface-anchored crosslinked network bearing functional moieties. Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and wetting angle measure- ments were used to analyze the crosslinked monomer surfa- ces. Scanning electron microscopy was used to visualize the surface of the film after modification. The results of the sur- face reconstruction of the FM surfaces and plasma-treated PDMS reveal that long-term hydrophilic surfaces were achieved. Thus, the surface architecture could be favorably manipulated with this remarkable technique with a suitable combination of FMs and crosslinkers. V C 2010 Wiley Periodicals, Inc. J Appl Polym Sci 120: 1426-1430, 2011

International audience; We present the development and study of a single bowtie nano-aperture (BNA) at the end of a monomode optical fiber as an interface between near-fields/nano-optical objects and the fiber mode. To optimize energy conversion between BNA and the single fiber mode, the BNA is opened at the apex of a specially designed polymer fiber tip which acts as an efficient mediator (like a horn optical antenna) between the two systems. As a first application, we propose to use our device as polarizing electric-field nanocollector for scanning near-field optical microscopy (SNOM). However, this BNA-on-fiber probe may also find applications in nanolithography, addressing and telecommunications as well as in situ biological and chemical probing and trapping

International audience; The anodic oxidation of concentrated glycine based aqueous electrolyte on smooth platinum electrode leads to a strongly grafted polyglycine-like coating on the surface in an irreversible way. Due to the proton affinity towards amino groups of polyglycine (PG), the electrodeposited thin film was used as receptor for solid potentiometric pH sensor. In order to reach local pH measurement, we developed miniaturized microelectrodes on glass substrate thanks to photolithography process. We used silver chloride on silver as the reference electrode. The couple (silver chloride, PG based platinum electrode) of microelectrodes gives linear potentiometric response vs. pH in the range [2–12], reversibly and with a sensitivity of 52.4 mV/pH (for 1 mm electrode size). PG based pH electrode is compared to other organic polymer based pH receptor such as linear polyethylenimine (L-PEI), polyaniline (PANI) and glass membrane.

International audience; We report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3) substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or on RIE, and is exploited here for the fabrication of rods with smooth etched surfaces. A series of tests have been performed with fluorine gases. Nanometric rods with 200, 400 or 600 nm diameters, with a periodicity of 400, 800 and 1200 nm respectively and etched angles close to 68 for the RIE process and 75 for the ICP-RIE process have been fabricated. The second process is based on ''optical grade dicing'' and is dedicated to the fabrication of deep-etched ridge waveguides. First optical characterization results are reported. They show optical propagation losses value close to 0.1 dB/cm.

International audience; Two dry subtractive techniques for the fabrication of microchannels in borosilicate glass were investigated, plasma etching and laser ablation. Inductively coupled plasma reactive ion etching was carried out in a fluorine plasma (C4F8/O2) using an electroplated Ni mask. Depth up to 100 μm with a profile angle of 83°-88° and a smooth bottom of the etched structure (Ra below 3 nm) were achieved at an etch rate of 0.9 μm/min. An ultrashort pulse Ti:sapphire laser operating at the wavelength of 800 nm and 5 kHz repetition rate was used for micromachining. Channels of 100 μm width and 140 μm height with a profile angle of 80-85° were obtained in 3 min using an average power of 160 mW and a pulse duration of 120 fs. A novel process for glass-glass anodic bonding using a conductive interlayer of Si/Al/Si has been developed to seal microfluidic components with good optical transparency using a relatively low temperature (350°C).

International audience; Polyethyleneimine films have been deposited on platinum electrode surfaces by electrochemical oxidation of ethylenediamine H2N-CH2-CH2-NH2 (EDA) in acetonitrile solutions. This electrochemical synthesis was realized by cyclic voltammetry and gravimetry techniques. Then, the characterization of the thin solid polyethyleneimine film was performed using X-ray photoelectron spectroscopy and infrared spectroscopy. It was also shown, using atomic force microscopy, that the solid polymeric coating has a granular and homogeneous structure. The influence of EDA concentration on the electropolymerization process was studied leading to the conclusion that the reaction is easier for high EDA concentration. Then, the influence of the nature and concentration of the supporting salt was investigated, showing that its nature is not very important, contrary to its concentration.

International audience; A simple method to prepare flat gold terraces on mica for atomic force microscopy biomolecular characterisation is described. The procedure includes preheating of the substrate, metal deposition and an annealing step. All of these steps are at elevated temperatures (300–420°C). This approach allows one to prepare large flat gold terraces (200– 500 nm), which constitute ideal substrates for visualisation and characterisation of a self-assembly monolayer of biomolecules at the nanoscale. The authors illustrated this potential of characterisation with the reconstitution of a protein monolayer.

Nowadays, almost all the cutting tools in metal machining are protected with a surface treatment. Nevertheless, this is not the case in woodmachining where no tools are protected, except by thermal treatments, and so they present a previous wear because of the use of steel or carbide materials in milling, sawing, routing, etc. During these processes, the tools are particularly exposed to abrasive and shock wear. To enhance their wear resistance, one solution is to protect them with hard coatings. The present study deals with the development of ternary systems (CrAlN and CrSiN) obtained by two PVD different magnetron sputtering systems [‘A’ (laboratory where CrAlN layers have been obtained) and ‘B’ (laboratory where CrSiN layers have been obtained) in the following text] on carbide WC–Co tools used in second transformation of wood to be compared to the binary CrN one. CrAlN and CrSiN films were deposited with different Al and Si contents, respectively, in order to check the effect of the additive element (Al or Si) on the different properties of the Cr–N system. The different coatings were characterized by SEM and EDS for thickness measurements, morphology and composition analyses, respectively, by nanoindentation for hardness and Young’s modulus measurements and by pin-on-disc to determine their friction coefficient. Routing of medium density fibreboard (MDF) was realized employing untreated or modified carbide WC–Co tools in order to compare their wear resistance. We observed that the Al and the Si addition improved the hardness and the Young’s modulus of the Cr–N system (‘A’: 29 and 410 GPa, respectively, ‘B’: 18 and 280 GPa, respectively). Indeed, the hardness values are 15–36GPa for CrAlN and 15–24 GPa for CrSiN coatings. Besides, the Young’s modulus values are 331–520GPa for CrAlN and 260–320 GPa for CrSiN coatings. The friction coefficient of the CrAlN layers varied between 0.6 and 0.7 and it increased slightly with the Al content. For the CrSiN coatings, the friction coefficient was lower and about 0.4. In both cases, the CrN layers ‘A’ and ‘B’ presented similar friction coefficient than CrAlN and CrSiN, respectively. During the routing of MDF, the CrN ‘A’ coating has a similar wear behaviour than the optimized CrAlN one (5 at.% of Al) while the optimized CrSiN coating (1.2 at.% of Si) showed a better behaviour against wear than the CrN ‘B’ one. The wear resistance of CrAlN- and CrSiN-coated carbide tools ecreased when the Al and Si contents increased. Regional Council of Burgundy Regional Council of Franche-Comté ISOROY France

International audience; Poly(dimethyl siloxane) (PDMS) has been focused on recently due to its variety of applications specifically in microsystems technology. Many companies market two-component PDMS, which is comprised of a base component and a curing agent. Widely known and used for microsystems applications is Sylgard 184 from Dow Corning. Present work deals with two-component Room Temperature Vulcanized (RTV) PDMS from three different companies. They are Sylgard 184 from Dow Corning, RTV 615 from GE Silicones and RTV 141 from Rhodia Chemicals. Temporary increase in wettability of these three different types of PDMS by oxygen plasma by varying the plasma power and exposure time has been studied and compared with results available in literature. The hydrophobic recovery of the modified surfaces was monitored as a function of time and quantified. The surfaces were characterized using contact angle measurements and ATR-FTIR and XPS spectroscopy, their behavior analyzed in term of free surface energy and work of adhesion.

International audience; A new type of pH biosensor was developed for biological applications. This biosensor was fabricated using silicon microsystem technology and consists in two platinum microelectrodes. The first microelectrode was coated by an electrosynthesized polymer and acted as the pH sensitive electrode when the second one was coated by a silver layer and was used as the reference electrode. Then, this potentiometric pH miniaturized biosensor based on electrosynthesized polypyrrole or electrosynthesized linear polyethylenimine films was tested. The potentiometric responses appeared reversible and linear to pH changes in the range from pH 4 to 9. More, the responses were fast (less than 1 min for all sensors), they were stable in time since PPy/PEI films were stable during more than 30 days, and no interference was observed. The influence of the polymer thickness was also studied.

International audience; The recent theoretical and experimental demonstrations of stop bands for surface acoustic waves have greatly enlarged the potential application field for phononic crystals. The possibility of a direct excitation of these surface waves on a piezoelectric material, and their already extensive use in ultrasonics make them an interesting basis for phononic crystal based, acoustic signal processing devices. In this paper, we report on the demonstration of the existence of an absolute band gap for surface waves in a piezoelectric phononic crystal. The Surface Acoustic Wave propagation in a square lattice, two-dimensional lithium niobate phononic crystal is both theoretically and experimentally studied. A plane wave expansion method is used to predict the band gap position and width. The crystal was then fabricated by reactive ion etching of a bulk lithium niobate substrate. Standard interdigital transducers were used to characterize the phononic structure by direct electrical generation and detection of surface waves. A full band gap around 200 MHz was experimentally demonstrated, and close agreement is found with theoretical predictions.

International audience; A gas sensor consisting in polypyrrole films electrochemically deposited on microelectrodes arrays was fabricated using silicon microtechnologies. Polypyrrole was electrodeposited on platinum microelectrodes using four different electrodeposition potentials, five counter-ions and three salt concentrations to assess the effects of these parameters on the sensing properties of polypyrrole films. The change in conductance of thin polymer layers, due to adsorption of ammonia gas, was used as a sensor signal. The behaviors of the polymer-based gas sensors, including response time, response amplitude, reproducibility and reversibility, to various ammonia gas concentrations ranging from 1 to 100 ppm were investigated. The experimental results showed that these ammonia gas sensors were efficient since they were sensitive to ammonia, and since their response was fast and reproducible at room temperature. The most efficient ammonia gas sensor was obtained with a 248 nm-thick polypyrrole film electrosynthesized from 0.1 M pyrrole and 0.1 M LiClO4 under an electrodeposition potential of +2.0 V/SCE.

International audience; We investigate and simulate the permeation behavior of PET membranes on which thin coatings are deposited. Depending on the parameters of deposition and on the thin coating thickness, we assume this alteration could make it possible to decrease by one order of magnitude the permeation coefficient. Some specific developments have been necessary, all the more not only a decrease of permeation is expected but also the mechanical strength of the thin coating during severe mechanical loadings. We consequently design devices dedicated to the permeation test but also to the bulge and blister tests which permit to check the mechanical properties of the film and its adhesion on the PET surface. This paper focuses on the permeation test.

International audience; The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductivelycoupledplasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can besuccessfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigatedfor their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip.ICPECVD silicon dioxide films up to 25 nm-thick were deposited at different pressure. Details of the SiOxthin layer properties in terms of refractive index, deposition rate, roughness, chemical bonds, Si2p andO1s bending energies, residual stress and contact angle were studied. The refractive index was found to decreasewith increasing pressure for all the films. The depositions rates were lower for films deposited athigher pressures. We report here on the fabrication and characterization of stable and good reliabilities ofSiOx deposited at two temperature 80 °C and 130 °C at pressures ranging from 2 Pa to 20 Pa. The resultsshow that the SPR responses were very sensitive to any changes in the deposition parameters. In thisstudy, we have shown that SiOx has good potential for further developments, as a wideband biosensor applicationwith a higher sensitivity in SPR response.

Vanadium and vanadium oxide thin films are deposited by DC magnetron sputtering. A first series of pure vanadium films are prepared by glancing angle deposition (GLAD). The incident angle α of the particle flux is systematically changed from 0 to 85°. For the second series, the angle α is kept at 85° and oxygen gas is injected during the growth by means of the reactive gas pulsing process (RGPP). A constant pulsing period P = 16 s is used whereas the oxygen injection time t ON is varied from 0 to 6 s. After depositing, films are annealed in air following 11 incremental cycles from room temperature up to 550 °C. For both series, the DC electrical resistivity is systematically measured during the annealing treatment. Vanadium films sputter deposited by GLAD become sensitive to the temperature for incident angles α higher than 60°. The most significant annealing effect is observed for films prepared with α = 85° with a strong increase of resistivity from 2.6 × 10 − 5 to 4.9 × 10 − 3 Ωm. It is mainly assigned to the oxidation of GLAD vanadium films, which is favoured by the high porous morphology produced for the highest incident angles. The resistivity vs. temperature evolution is also measured and related to the occurrence of the VO 2 phase. By combining GLAD and RGPP processes, the reversible variation of resistivity associated to the VO 2 phase is even more pronounced. Oxygen pulsing during deposition and the voided structure produced for the highest incident angles enhance the oxidation of vanadium through the films thickness. The porous architecture by GLAD and the oxygen injection by RGPP have to be carefully controlled and optimized for the growth of vanadium oxide compounds, especially to favour the formation of the VO 2 phase.

International audience; We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photonic elements are made by optical-grade dicing, and are assembled dynamically. This method opens the way to new 3D photonic architectures.