1. Biomolecule sensing in THz range with n-Ge/Si antennas
- Author
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A. A. Wiciak, Ioan Costina, Jacob Piehler, Elena Hardt, Mauro Missori, Changjiang You, Oliver Skibitzki, C. L. Manganelli, Leonetta Baldassarre, Soenke Gruessing, Wolfgang M. Klesse, Bernd Witzigmann, Carlos Alvarado Chavarin, Winfried Seifert, Giovanni Capellini, W. Koczorowski, Davide Spirito, and Julia Flesch
- Subjects
Materials science ,Silicon ,business.industry ,Terahertz radiation ,Resonance ,chemistry.chemical_element ,law.invention ,chemistry.chemical_compound ,CMOS ,chemistry ,Silicon nitride ,law ,Optoelectronics ,Photolithography ,Antenna (radio) ,business ,Lithography - Abstract
We present n-doped germanium-on-silicon (Ge-on- Si) antennas fabricated with CMOS mainstream methods, showing resonances between 0.1 and 0.7 THz for sensing applications. After surface functionalization with α-lipoic acid, a red-shift of the antenna resonance is observed, as demonstrated by THz time domain spectroscopy. Similar results are obtained with silicon nitride (Si 3 N 4 )-coated antennas, enabling microfluidic integration. Finally, we compare antennas of bow-tie slots to antennas fabricated via maskless photolithography.
- Published
- 2021