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A planar double-gate SOI MOSFET (DG-SOI) with thin channel and thick source/drain (S/D) was successfully fabricated. Using both experimental data and simulation results, the S/D asymmetric effect induced by gate misalignment was studied. For a misaligned DG-SOI, there is gate nonoverlapped region on one side and extra gate overlapped region on the other side. The nonoverlapped region introduces extra series resistance and weakly controlled channel, while the extra overlapped region introduces additional overlap capacitance and gate leakage current. We compared two cases: bottom gate shift to source side (DG-S) and bottom gate shift to drain side (DG-D). At the same gate misalignment value, DG-S resulted in a larger drain-induced barrier lowering effect and smaller overlap capacitance at drain side than DG-D. Because of reduced drain-side capacitance, the speed of three-stage ring oscillator of DG-S, with 20% gate misalignment length (Lmis) is over gate length (Lg), or Lmis/Lg = 20%, was faster than that of two-gate aligned DG-SOI. [ABSTRACT FROM AUTHOR]

The effects of nonrectangular fin cross section of double-gate FinFETs are studied. For a given top-fin width, which is defined by the photolithography step, the short-channel effect immunity is degraded by the inclination of the sidewalls. The nonrectangular fin geometry also leads to nonuniform current flow and current crowding in the vertical direction. Together with the nonuniform series resistance along the height of the fin, a non-linear dependence of on-current with fin heights (which have been regarded as the Ws in planar MOSFET) is observed. The impacts of nonvertical sidewall have been characterized according to the inclination angle in this work. Under different inclination angles as dictated by the processing technology, the device performances at various fin heights are characterized. A new design constraint that limits the choice of fin height for a given technology is also discussed. [ABSTRACT FROM AUTHOR]

Proposes a physically-based noise model which predicts that the excess low-frequency noise shows a Lorentzian-like spectrum. Information on silicon-on-insulator (SOI); Noise sources in an SOI metal-oxide-silicon field-effect transistor; Results and discussions; Conclusions.

An air-spacer technology with raised source/drain (S/D) for ultrathin-body (UTB) silicon-on-insultor MOSFETs is developed. The results show that the poly raised S/D can effectively reduce the series resistance and the air spacer can effectively reduce the fringing capacitance. The air spacer is particularly useful when combined with high-κ gate dielectric. The improved device characteristics are demonstrated experimentally and by extensive two-dimensional device simulation. [ABSTRACT FROM AUTHOR]