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The work reports the hydrogen-ion implantation and femtosecond laser ablation in the Er3+-doped germanate glass to make planar and ridge optical waveguides. The energy is 400 keV and the dose is 6 × 1016 ion/cm2 for the ion implantation. The pulse energy is 3 μJ and the scanning speed is 50 μm/s for the femtosecond laser ablation. A microscope is used to observe the cross-section morphologies of the planar and ridge waveguides. A measurement of the near-field intensity distribution at 632.8 nm is performed by the end-face coupling system. The effective refractive indices of the propagation modes are recorded by the m-line technique. It’s the first time that a ridge waveguide is fabricated in the Er3+-doped germanate glass by the proton implantation and femtosecond laser ablation, which is with potential application as new integrated optical devices.

The high-quality waveguide structure in the Dy 3 + -doped Y3Al5O 1 2 transparent ceramic is of significance for the application of integrated micro-light elements. However, there have been no reports on the preparation of optical waveguides by ion implantation in the Dy 3 + -doped Y3Al5O 1 2 transparent ceramic. The work reports on the formation of optical planar waveguides by using the proton implantation in the Dy 3 + -doped Y3Al5O 1 2 transparent ceramic. The acceleration energy and the dose of the protons are 400 keV and 8 × 1 0 1 6 ions/cm2, respectively. The structure of the fabricated waveguide is captured with the high-res/mag images by a metallurgical microscope. The dark-mode spectrum and the refractive index distribution are gained by the prism coupling system and the RCM software, respectively. The measurement and simulation of the near-field intensity distribution indicate the propagation of light field in the waveguide. The results are of potential to the compact devices in the photonics. [ABSTRACT FROM AUTHOR]

A two-dimensional waveguide is the building block in integrated photonic circuits. In this work, the 5.0 MeV oxygen ion implantation at a dose of 5. 0 × 1 0 1 4 ions/cm2 was carried out on the fused silica glass for the formation of the planar waveguide. Then, a femtosecond laser was employed to ablate the ion-implanted surface at a speed of 200 μ m/s for the construction of the ridge waveguide. The energy depositions of the oxygen ion implantation into the fused silica glass were simulated by the SRIM 2013. The microscopic morphology of the ridge waveguide was photographed by a Nikon microscope. The near-field intensity distributions of the ridge waveguide at 532 nm and 976 nm were measured by using the end-face coupling system. The ion-implanted and femtosecond-ablated ridge waveguide on the fused silica glass has the potential as a photonic device for integrated optical systems at the visible and near-infrared bands. [ABSTRACT FROM AUTHOR]

This work reports on the fabrication and characterization of a K9 glass planar waveguide structure. The helium ion implantation was employed to form the waveguide on the K9 glass. The choices of the energy of 0.4 MeV and the dose of 6. 0 × 1 0 1 6 ions/cm2 were conducted by the SRIM 2013. The m -line spectroscopy and the modal profile of the He + -irradiated K9 glass waveguide were performed by the prism-coupling system and the end-face coupling technique at 0.6328 μ m, which suggests the capability of light propagation. The He + -implanted K9 glass waveguides can serve as potential candidates for advanced integrated optoelectronic devices. [ABSTRACT FROM AUTHOR]

In this work, a one-dimensional waveguide is formed by virtue of the helium ion implantation in the oxyfluoride glass (OFG). The energy and the fluence of the ion implantation are 0.4 MeV and 6. 0 × 1 0 1 4 He + ⋅ mm − 2 , respectively. The m-line curve with the effective refractive indices of the modes was recorded by using the prism coupling system. The energy loss distribution and the refractive index profile were calculated by the stopping and range of ions into matter (SRIM)-2013 and the RCM, respectively. The light modal profile was measured by the end-facet coupling system. It suggests that the He + -ion implanted OFG waveguides have the potential to act as integrated photonic devices. [ABSTRACT FROM AUTHOR]

The 400 keV proton implantation with a fluence of 8. 0 × 1 0 1 6 ions/cm2 was applied on the Er 3 + / Yb 3 + co-doped phosphate glass to fabricate a planar waveguide structure. The mode profile at the end face of the waveguide was measured by the end-face coupling technique. The energy loss profile of the energetic protons was calculated by the SRIM 2013. The refractive index distribution was simulated by the reflectivity calculation method. Based on these results, the formation theory of the planar waveguides was discussed through simulating the energy loss distribution and analyzing the reconstructed refractive index profile, which could be used for applications in the future integrated optical systems. [ABSTRACT FROM AUTHOR]

An optical waveguide is an important dielectric device that guides the propagation of light waves. Ion implantation is a competitive waveguide preparation technique with advantages including reliance, simpleness and flexibility. In this work, a 400-keV helium ion implantation with a fluence of 6. 0 × 1 0 1 6  ions/cm2 was carried out to manufacture a planar waveguide on the surface of the fused silica glass. The formation mechanism of the waveguide was analyzed by the nuclear energy deposition based on the SRIM 2013 and the refractive index distribution with the help of the reflectivity calculation method (RCM). The geometry structure and the guiding performance of the waveguide were studied by the metallographic microscope and the end-face coupling system, respectively. The investigation on the fabrication and characteristics of fused silica glass optical waveguides is of great significance for the development of passive devices in the field of optical communications. [ABSTRACT FROM AUTHOR]

The ridge waveguide on the TGG crystal has been fabricated through the combination of the ion implantation and the femtosecond laser ablation. Firstly, optical planar waveguide was formed on the top surface of TGG crystal by ion implantation. To investigate the damage induced by the 6.0 MeV Si ion implantation at a dose of 2.0 × 1015 ions/cm2, the vacancy distribution was obtained by the SRIM simulation programme. Subsequently, the ridge waveguide with a width of 20 µm was produced by femtosecond laser ablation. The optical guiding properties of the ridge TGG waveguide were measured at the near-infrared wavelength (976 nm) by the end-face coupling technique. The work demonstrated that the manufactured waveguide structure possesses the ability to confine the light into guided mode, making it potentially valuable in integrated devices. [ABSTRACT FROM AUTHOR]

The k9 glass emerges as the promising host for the waveguide formation, owing to its unique optical properties. Ion implantation is a powerful technique for the fabrication of optical waveguides. In this work, the 400-keV proton implantation at a dose of 8. 0 × 1 0 1 6   ions/cm 2 was performed on the k9 glass to manufacture optical waveguide. Continuous annealing treatment at intervals of 5 0 ∘ C was used to enhance the guiding performances of the waveguide. The dark-mode spectrum and the refractive index profile of the waveguide were obtained by a prism coupling system and a reflectivity calculation method, respectively. The near-filed intensity distribution was measured by an end-face coupling equipment. The results suggest that the light field can be confined within the waveguide layer. [ABSTRACT FROM AUTHOR]

An ion implanter was used to irradiate protons with a dose of 8×1016 ions/cm2 and an energy of 400 keV into a Ce3+:GGG crystal. To our knowledge, this is the first time that ion implantation was applied to a Ce3+:GGG crystal. The penetration depth was determined by the stopping and range of ions in matter simulation. The prism coupling method was utilized to evaluate the propagation modes in the H+-implanted waveguide. The end-face coupling method and the finite-difference beam propagation were employed for the analysis of the waveguide performance. The refractive index distribution was reconstructed by the reflectivity calculation method. The main significance of the investigation is to confirm the potential of the ion-irradiated Ce3+:GGG crystals for fabricating waveguide structures and devices. [ABSTRACT FROM AUTHOR]

• Planar and ridge waveguides are formed in Er3+-doped germanate glass. • Waveguides demonstrate acceptable guiding properties. • Ion implantation and fs laser ablation are used in Er3+-doped germanate glass. The work reports the hydrogen-ion implantation and femtosecond laser ablation in the Er3+-doped germanate glass to make planar and ridge optical waveguides. The energy is 400 keV and the dose is 6 × 1016 ion/cm2 for the ion implantation. The pulse energy is 3 μJ and the scanning speed is 50 μm/s for the femtosecond laser ablation. A microscope is used to observe the cross-section morphologies of the planar and ridge waveguides. A measurement of the near-field intensity distribution at 632.8 nm is performed by the end-face coupling system. The effective refractive indices of the propagation modes are recorded by the m-line technique. It's the first time that a ridge waveguide is fabricated in the Er3+-doped germanate glass by the proton implantation and femtosecond laser ablation, which is with potential application as new integrated optical devices. [ABSTRACT FROM AUTHOR]

Sm 3 + -doped bismuthate glass has been synthesized by means of the classic melt-quenching technique. Its optical properties were characterized, which included refractive index, absorption and fluorescence spectra. The measured data suggest that the Sm 3 + -doped bismuthate glass is suitable for optoelectronic applications. A Sm 3 + -doped bismuthate glass waveguide operating at 1.539  μ m has been manufactured by using the proton implantation with a 0.4 MeV energy and a 8.0 × 10 1 6 ions⋅cm − 2 fluence for the first time to our knowledge. The effective refractive indices of the propagation modes for the glass waveguide were obtained by the m-line technique. The energy loss caused by the collision of the irradiated protons and the nuclei of the target Sm 3 + -doped bismuthate glass was calculated by the SRIM 2013. The refractive index profile and the near-field guided mode distribution for the waveguide structure were fitted through the reflectivity calculation method (RCM) and the FD-BPM method, respectively. The proton-implanted Sm 3 + -doped bismuthate glass waveguide is an alternative for an integrated device in the telecommunication band. [ABSTRACT FROM AUTHOR]

Tb-doped aluminum borosilicate glasses are important magneto-optical materials for optical isolators. Optical waveguides are basic components in integrated photonics. By using the ion implantation technique, optical guiding structures can be produced in Tb-doped aluminum borosilicate glasses, and miniaturized waveguide isolators can be realized. In this paper, planar waveguides have been fabricated in Tb-doped aluminum borosilicate glasses by (6.0 + 5.5) MeV carbon ion implantation at doses of (8.0 + 4.0) × 10 ions/cm. The optical properties of optical waveguides are measured by equipments of prism coupling and end-face coupling systems. They are also analyzed by simulation programs of intensity calculation method and beam propagation method. The waveguides with good optical performances suggest potential applications on fabrication of waveguide isolators in Tb-doped aluminum borosilicate glasses. [ABSTRACT FROM AUTHOR]

The optical planar waveguides were fabricated by proton implantation with an energy of 400 keV and a dose of 8 × 1016 ions / cm2 or 400-keV helium-ion implantation with a fluence of 6 × 1016 ions / cm2 in the fluoride lead silicate glass. The morphologies were studied by a Zeiss microscope to estimate the thickness of the waveguides. The annealing effects on the fluoride lead silicate glass waveguides were investigated by 60 min annealing cycles at different temperatures ranging from 260°C to 310°C in air atmosphere. The dark-mode spectra and corresponding effective refractive indices before and after the thermal treatments were measured by the prism coupling system. The Stopping and Range of Ions in Matter 2013 code was used to simulate the irradiation process and calculate the energy losses. The refractive index distributions were reconstructed by the reflectivity calculation method. The near-field light intensity profiles of the proton and helium-ion implanted fluoride lead silicate glass waveguides were measured by the end-face coupling system. The comparison of optical properties between the proton-implanted waveguide and helium-ion implanted one was carried out. The experimental results show that the helium-ion implantation is more suitable for the fabrication of the fluoride lead silicate glass optical waveguides and the He + -implanted waveguide has better optical propagation performances. [ABSTRACT FROM AUTHOR]

This work systematically reports on the preparation of Nd3 + -doped silicate glass (NDSG) and its waveguide structure, as well as the optimization effects of annealing procedures on the waveguide performances. The NDSG was synthesized by the melt-quenching technique. Its absorption spectrum and photoluminescence properties were recorded by a JASCO V-570 spectrophotometer and an Edinburgh FLS920P fluorescence spectrometer, respectively. A planar optical waveguide was fabricated in the NDSG using 0.4-MeV proton implantation at a fluence of 8 × 1016 ions cm − 2. Its optical properties were optimized by 1-h stepwise annealing treatments with the temperature range of 260°C to 410°C. The distribution of the refractive index and the profile of near-field intensity were investigated by the prism-coupling equipment and the end-face coupling system, respectively. The obtained results show the prospects for using NDSG waveguides in planar photonic devices. [ABSTRACT FROM AUTHOR]

Compact and miniaturized Er3+-doped waveguide structure is an important research direction in integrated optics. In this work, the Er3+-doped germanate glass was bombarded by a 400-keV He+ ion beam with a fluence of 6.0 × 1016 ions/cm2 for the formation of the one-dimensional waveguide in a vacuum. Subsequently, the precise diamond blade with a rotating velocity of 20,000 rpm and a cutting speed of 0.1 mm/s was applied to dice the surface of the one-dimensional waveguide for the fabrication of the two-dimensional structure. The formation mechanism and the refractive index profile of the one-dimensional waveguide were studied by the SRIM 2013 and the RCM, respectively. The electromagnetic field profiles for the fundamental modes of both one-dimensional and two-dimensional waveguides were measured by the end-face coupling method. It presents some useful information in the field of fabrication and characterization of optical waveguides for active photonic applications. • Planar and ridge waveguides are formed in Er3+-doped germanate glass. • Waveguides demonstrate acceptable guiding properties. • Ion implantation and diamond blade dicing are used in Er3+-doped germanate glass. [ABSTRACT FROM AUTHOR]

Planar waveguides in magneto-optical glasses (Tb 3+ -doped aluminum borosilicate glasses) have been produced by a 550-keV proton implantation at a dose of 4.0×10 16 ions/cm 2 for the first time to our knowledge. After annealing at 260 °C for 1.0 h, the dark-mode spectra and near-field intensity distributions are measured by the prism-coupling and end-face coupling methods. The damage profile, refractive index distribution and light propagation mode of the planar waveguide are numerically calculated by SRIM 2010, RCM and FD-BPM, respectively. The effects of implantation on the structural and optical properties are investigated by Raman and absorption spectra. It suggests that the proton-implanted Tb 3+ -doped aluminum borosilicate glass waveguide is a good candidate for a waveguide isolator in optical fiber communication and all-optical communication. [ABSTRACT FROM AUTHOR]

Terbium scandium aluminum garnet crystal is a promising material which has excellent characteristics for magneto-optical devices. We report on the fabrication of optical planar and ridge waveguides in the terbium scandium aluminum garnet by using combination of helium ion implantation and precise diamond blade dicing. The conditions for the ion implantation are an energy of 400 keV and a fluence of 6 × 1016 ions/cm2. The rotating velocity and cutting speed of the diamond blade were set to be 20,000 rpm and 0.1 mm/s, respectively. The implantation depth and distributions of energy loss were calculated by the stopping and range of ions in matter 2013. The refractive index distribution and the dark-mode spectrum for the implanted planar waveguide were obtained by the reflectivity calculation method and the prism coupling system, respectively. The near-field intensity profiles of both the planar and ridge waveguides were measured by the end-face coupling technique. The optical guiding properties of the terbium scandium aluminum garnet waveguides suggest that they can serve as candidates for optical waveguide isolators. • Planar and ridge waveguides are formed in terbium scandium aluminum garnet. • Waveguides demonstrate acceptable guiding properties. • Ion implantation and diamond blade dicing are used in TSAG crystal. [ABSTRACT FROM AUTHOR]

Ion implantation and precise diamond blade dicing are amazing tools allowing the accurate formation of waveguide structures. In this work, we report on the fabrication and assessment of a ridge waveguide in the high-gain Nd3+-doped laser glass by the 400-keV H+-ion implantation with a fluence of 8.0 × 1016 ions/cm2 and the precise diamond blade dicing at a rotating speed of 2.0 × 104 rpm. The relative atom displacement induced by the proton implantation was simulated by the SRIM 2013. The cross section of the two-dimension structure was captured by a microscope and its lateral dimensions were 3.75 μm × 10 μm. The optical confinement of the ridge waveguide was recorded by the technique of the end-face coupling and its propagation loss was about 3.9 dB/cm at 976 nm. The ridge waveguide supported mono-mode at 976 nm can serve as a photonic device. [ABSTRACT FROM AUTHOR]

In this paper, the fabrication of optical planar waveguide in PTR glass by proton implantation is reported for the first time to our knowledge. The planar waveguide with a width of approximately 3.4 μm was generated under the condition of 400 keV H+ ion implantation with a dose of 8.0 × 1016 ions ‧ cm−2 at room temperature. The formation mechanism of PTR glass waveguide was illustrated with the aid of the SRIM program. The optical characteristics of the PTR waveguide, such as refractive index profile and near-field intensity distribution, were investigated in detail. The fabricated PTR waveguide presents a structure of both index-well and optical barrier according to the reconstructed refractive index profile. The finite-difference beam propagation method was carried out to simulate guiding modal distribution. Besides, in order to study the thermal stability of the H+-implanted PTR waveguide, annealing treatment was conducted at different temperatures. [ABSTRACT FROM AUTHOR]