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Gallium nitride high electron mobility transistors outperform Silicon devices due to their excellent physical properties. However, being an immature technology, it exhibits dynamic on-state resistance ($R_{\text{ds}, \text{on}}$). This causes increased conduction loss and leads to reduced operating efficiency. To evaluate the dynamic $R_{\text{ds}, \text{on}}$ of the device, a measurement circuit is required. In literature, a standardized double pulse test is widely used for the measurement of $R_{\text{ds}, \text{on}}$. However, due to the uncontrolled off-state time and inability to independently adjust, the test conditions result in restricted measurement. This article proposes a measurement circuit of the device in power electronics operations. The circuit uses an H-Bridge-derived topology with capacitive storage to enable forward and reverse conduction mode measurement of the device. In all the modes, the circuit allows measurement from the first switching cycle and independent control over the testing conditions by using a hysteresis current control. The proposed measurement circuit is validated using simulation and experimentation. Finally, analytical efficiency compared with the state-of-the-art measurement circuits is provided. [ABSTRACT FROM AUTHOR]

In this article, a physics-based analytical model which considers the channel charge (Qch) for enhancement-mode p-GaN power high-electron-mobility transistors (HEMTs) is developed. First, by considering the same dynamic channel charge (dQch) for the Schottky/p-GaN junction capacitance (Cj,Sch) and the p-i-n-junction capacitance (Cp-i-n), due to the p-GaN/AlGaN junction and two-dimensional electron gas (2DEG) charge, the analytical formula to calculate the voltage drop in the p-GaN layer (VpGaN) is presented. Second, by implementing the analytical formulae in the advanced SPICE model (ASM) GaN model, the proposed physics-based model reliably fits the measured C – V and I – D – V – G characteristics of the samples under different processing conditions. This provides significant insight regarding the Mg concentration, the voltage drop at the Schottky metal/p-GaN junction (Vj,Sch), and the voltage drop at the p-GaN/AlGaN junction (Vp-i-n). Finally, the I – D – V – G and I – D – V – D characteristics of enhancement-mode p-GaN power HEMTs are modeled, displaying good agreement with the experimental data. [ABSTRACT FROM AUTHOR]

In this letter, a fully transparent AlGaN/GaN HEMT (FT-HEMT) using indium-tin-oxide (ITO) as a transparent electrode is fabricated. The n-ohmic contacts are formed based on a Si-implant process using a deposited ITO rather than the conventional alloyed metal stacks. Following a post-annealing process at 600°C, the field-effect mobility and the maximum current density for an FT-HEMT were 1004 cm2/ $\text{V}{\cdot }\text{s}$ and 179 mA/mm, respectively. Furthermore, the measured transmittance for a fabricated chip in the visible range of 400 - 700 nm was greater than 70%, which is almost the same as an as-grown GaN-on-sapphire substrate. These results show that, by using this approach, an FT-HEMT that has superior electronic properties, such as high mobility and high output current, can be realized, and show great promise for applications in transparent and/or flexible electronics, as well as other optoelectronic devices. [ABSTRACT FROM AUTHOR]

In this work, we demonstrate the use of a machine learning (ML)-based statistical approach to model and analyze the impact of the fabrication processes on the threshold voltage in recessed gate AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors. First, we employ a ML-based Tikhonov regularization approach using the input of 19 different processing splits to generate a multivariable analytical equation that considers four critical processing parameters, such as the remaining AlGaN depth, ex-situ wet clean, in-situ plasma, and gate dielectric. Furthermore, the artificial neural network-based approach, which cannot be used to further analyze the impact of the process, is implemented for the comparison. Second, the results from this analytical equation show a nice agreement with the measured threshold voltage, indicating a successful correlation between the processing parameters and the threshold voltage. Finally, the impact of each process on the threshold voltage can be analyzed through the coefficient value related to each process, which can be a useful guidance for the device optimization toward the targeted performance. [ABSTRACT FROM AUTHOR]

This study examined the effects of three cumulative γ-ray irradiation doses on AlGaN/GaN epilayer material and on high electron mobility transistor (HEMT) devices. After a cumulative γ-ray dose of 16 kGy, the Hall mobility increased from 1800 cm2/V s to 2100 cm2/V s, as determined through Hall measurement. Atomic force microscopy indicated an improvement in surface roughness but no change in the surface potential ∅ s . The HEMT device exhibited improvement in the drain current, with a subtle decreasing tendency in the leakage current. At high doses of γ-ray irradiation, the trends in the material and device parameters saturated. Moreover, the metal–semiconductor interface degraded, as confirmed through scanning electron microscopy image analysis. [ABSTRACT FROM AUTHOR]

III-V heterostructure based high electron mobility transistors (HEMTs) offer superior performance as compared to CMOS silicon transistors owing to the high mobility in the 2D electron gas (2DEG) channel at the heterostructure interface. Gallium nitride (GaN) based HEMTs are also suitable for high power and high temperature applications. GaN has a rich offering of material properties spanning domains of non-linear optics, piezoelectric micro-electro-mechanical systems, and monolithic microwave integrated circuits. In this paper, we propose HEMT inspired III-V electro-optic modulator topologies and study the light interaction with 2DEG in such structures. We analyze the electroabsorption and electrorefraction on account of the 2DEG interaction with light and present a design framework to selectively leverage the desired mechanism of modulation. Our analysis suggests that modulation index of electrorefractive modulation in a HEMT-like structure is comparable to silicon photonic modulators. By leveraging the higher electron mobility in these material platforms, the device concepts proposed here could potentially be used to design electro-optic modulators with extremely high modulation rates. [ABSTRACT FROM AUTHOR]

This letter reports an in-depth study of the negative threshold voltage instability in GaN-on-Si metal-insulator–semiconductor high electron mobility transistors with partially recessed AlGaN. Based on a set of stress/recovery experiments carried out at several temperatures, we demonstrate that: 1) operation at high temperatures and negative gate bias (−10 V) may induce a significant negative threshold voltage shift, that is well correlated to a decrease in on-resistance; 2) this process has time constants in the range between 10–100 s, and is accelerated by temperature, with activation energy equal to 0.37 eV; and 3) the shift in threshold voltage is recoverable, with logarithmic kinetics. The negative shift in threshold voltage is ascribed to the depletion of trap states located at the SiN/AlGaN interface and/or in the gate insulator. [ABSTRACT FROM PUBLISHER]

We focus on slow de-trapping phenomena in AlGaN/GaN MIS-HEMTs with a bilayer dielectric ( in-situ Si 3 N 4 /Al 2 O 3 ) with two different thicknesses of in-situ Si 3 N 4 (10 nm and 5 nm). By using a “filling pulse” at a positive gate voltage, a trap with activation energy of 0.69–0.7 eV was identified to be responsible for the V TH shift. Based on literature, filling conditions, and the simulated band diagrams, this trap is most probably located at the interface between the dielectrics and AlGaN barrier. A physical model is proposed to explain the V TH shift due to the trapping/de-trapping phenomena based on the occupation dynamics of donor traps at the interface between the in-situ Si 3 N 4 /Al 2 O 3 and the AlGaN barrier. [ABSTRACT FROM AUTHOR]

The reliability of Au-free Ohmic contacts has been evaluated under a constant current stress (500 mA/mm) in a high temperature environment (150 °C, 175 °C, and 200 °C). Two Ohmic contact schemes with different Ti/Al thicknesses (5 nm/100 nm and 10 nm/100 nm) have been tested. The results showed that the degradation of the resistance ( R increase ) is accelerated at a higher temperature condition. Moreover, R increase has a square root dependence with the time. This indicates that a diffusion process could be responsible for the observed degradation. This has been confirmed by means of physical failure analyses (FIB/TEM) performed on a highly degraded device: an apparent roughness of the interface between TiN and the Ohmic metal layer was observed. On top of this, Nitrogen out-diffusion into the Ohmic metal was observed in the EDS/EELS analyses, suggesting that a material diffusion phenomenon might play a role. In addition, we observed that the devices with a lower initial contact resistance ( R c ) showed lower degradation with respect to devices with a larger initial R c . This suggests that obtaining lower R c is beneficial not only for the performance but also for the reliability. [ABSTRACT FROM AUTHOR]

This letter demonstrates that GaN-based MIS-HEMTs submitted to stress with high-temperature, high drain bias, and constant source current (HTSC stress) may show degradation modes that are not detectable during standard high temperature reverse bias (HTRB) stress. Based on a number of stress/recovery experiments, we demonstrate the following novel results: 1) the combined presence of high drain bias and constant drain–source current (HTSC stress) can lead to a significant increase in ON-resistance ( R\mathrm{\scriptscriptstyle ON} ) that is not detected under conventional HTRB stress; 2) R\mathrm{\scriptscriptstyle ON} increases without changes in the threshold voltage, indicating that charge trapping takes place in the access regions, and not under the gate; 3) the R\mathrm{\scriptscriptstyle ON} increase has a monotonic dependence on the source current flowing during stress; and 4) for the same stress current level, the R\mathrm{\scriptscriptstyle ON} increase has a negative dependence on temperature. The strong correlation between R\mathrm{\scriptscriptstyle ON} increase and source current and the negative temperature coefficient strongly support the hypothesis that trapping originates from the injection of hot electrons toward the gate–drain access region. [ABSTRACT FROM PUBLISHER]

In this paper, we review and add additional data and understandings on our findings on the two most common failure modes of GaN-based HEMTs: 1) permanent gate leakage current increase and 2) output current drop. We suggested that they have different origins and one is not necessarily correlated to the other. Yet, they can both concur to the device degradation. First, we demonstrate that the phenomenon of gate leakage current increase has a voltage-accelerated degradation kinetic. Therefore, the identification of the critical voltage for leakage increase is meaningless. We demonstrate that the time-to-breakdown tBD data are Weibull distributed and we prove that they represent intrinsic failures. According to our data, this phenomenon is not related to the inverse piezoelectric effect. Finally, a new degradation model for the gate leakage current increase based on the percolation path theory is proposed. Second, we show that the permanent output current drop is a consequence of the relaxation of AlGaN layer. This occurs by means of formation of crystallographic defects as described by the inverse piezoelectric degradation model. Finally, we show an excellent stability of devices with reduced Al content in the AlGaN barrier, proving the crucial role of strain in the reliability of AlGaN/GaN HEMTs. [ABSTRACT FROM AUTHOR]

In this work, recessed gate AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) with double AlGaN barrier designs are fabricated and investigated. Two different recessed depths are designed, leading to a 5 nm and a 3 nm remaining bottom AlGaN barrier under the gate region, and two different Al% (15% and 20%) in the bottom AlGaN barriers are designed. First of all, a double hump trans-conductance (gm)–gate voltage (VG) characteristic is observed in a recessed gate AlGaN/GaN MIS-HEMT with a 5 nm remaining bottom Al0.2Ga0.8N barrier under the gate region. Secondly, a physical model is proposed to explain this double channel characteristic by means of a formation of a top channel below the gate dielectric under a positive VG. Finally, the impacts of Al% content (15% and 20%) in the bottom AlGaN barrier and 5 nm/3 nm remaining bottom AlGaN barriers under the gate region are studied in detail, indicating that lowering Al% content in the bottom can increase the threshold voltage (VTH) toward an enhancement-mode characteristic. [ABSTRACT FROM AUTHOR]

This paper investigates the robustness of normally-off High Electron Mobility Transistors (HEMTs) with p-GaN gate submitted to forward gate bias overstress. By means of combined DC and spectral analysis we demonstrate the following results: (i) the devices demonstrate a time-dependent failure mechanism; (ii) time to failure (TTF) can be described by a Weibull distribution with a shape factor higher than 1, suggesting a wear-out failure; (iii) the devices have an estimated 20-years lifetime for a gate voltage of 7.2 V; (iv) TTF is temperature-dependent, with an activation energy of 0.5 eV; (v) emission microscopy reveals the presence of hot spots, whose emission originates from yellow luminescence and/or hot electron radiation. [ABSTRACT FROM AUTHOR]

This paper reports an extensive analysis of the trapping and reliability issues in AlGaN/GaN metal insulator semiconductor (MIS) high electron mobility transistors (HEMTs). The study was carried out on three sets of devices with different gate insulators, namely PEALD SiN, RTCVD SiN and ALD Al 2 O 3 . Based on combined dc, pulsed and transient measurements we demonstrate the following: (i) the material/deposition technique used for the gate dielectric can significantly influence the main dc parameters (threshold current, subthreshold slope, gate leakage) and the current collapse; and (ii) current collapse is mainly due to a threshold voltage shift, which is ascribed to the trapping of electrons at the gate insulator and/or at the AlGaN/insulator interface. The threshold voltage shift (induced by a given quiescent bias) is directly correlated to the leakage current injected from the gate; this demonstrates the importance of reducing gate leakage for improving the dynamic performance of the devices. (iii) Frequency-dependent capacitance–voltage (C–V) measurements demonstrate that optimized dielectric allow to lower the threshold-voltage hysteresis, the frequency dependent capacitance dispersion, and the conductive losses under forward-bias. (iv) The material/deposition technique has a significant impact on device robustness against gate positive bias stress. Time to failure is Weibull-distributed with a beta factor not significantly influenced by the properties of the gate insulator. The results presented within this paper provide an up-to-date overview of the main advantages and limitations of GaN-based MIS HEMTs for power applications, on the related characterization techniques and on the possible strategies for improving device performance and reliability. [ABSTRACT FROM AUTHOR]

In this work, we have demonstrated the wireless power transfer (WPT) system based on the pristine and irradiated E-mode GaN devices. The GaN device has been irradiated up to the 100 kGy dose under the γ-ray irradiation, showing the improved electrical characteristic, such as the drain current increase (~8.34%) and gate current decrease (~−7.79%). An off-state drain induced instability measurement shows the robust performance in pristine and irradiated GaN device. Noted that the irradiated device exhibits less ΔV TH , suggesting the device instability has been improved. Moreover, the wireless power transfer efficiency was evaluated by utilizing different load (20 Ω ~ 120 Ω) at V DS = 50 V and V GS = 4 V. The results indicate that the transfer efficiency of WPT by implementing the pristine and irradiated GaN device are similar. Furthermore, the output power of WPT using the irradiated GaN device becomes higher, which is mainly due to the improved drain current in irradiated GaN power devices. • Demonstration of the wireless power transfer (WPT) system based on the pristine and irradiated E-mode GaN devices. • The GaN device has been irradiated (γ-ray with 100kGy dose), showing the I D increase (~8.34%) and I G decrease (~-7.79%). • The wireless power transfer efficiency was evaluated by utilizing different loads (20 Ω~120 Ω) at V DS = 50V and V GS = 4V. • The transfer efficiency of WPT by implementing pristine and irradiated GaN device are similar. • Furthermore, the output power of WPT using the irradiated GaN device becomes higher. [ABSTRACT FROM AUTHOR]

In this work, GaN-on-Si power Metal-Insulator-Semiconductor High Electron Mobility Transistors (MIS-HEMTs) are irradiated through different regimes of cumulative γ -ray irradiation, namely 1, 2, 3, 4, and 5 kGy for the first sample; 1, 3, and 5 kGy for the second sample; 1, 5, and 10 kGy for the third sample; and 1, 10, and 20 kGy for the fourth sample. After each irradiation dose, drain current (I D), threshold voltage (V Th), and gate leakage current (I g) are electrically characterized in all the samples. An improvement in I D with a shift in V Th is observed in all the samples, which saturates after a higher irradiation dose. X-ray photoelectron spectroscopy (XPS) analysis confirms creation of nitrogen vacancies that act as donor and improves the I D. No significant change in I g is observed except for an increase in noise in gate leakage current. Scanning electron microscopy (SEM) shows the Al-based metallization pad degrades due to formation of small cavities. Finally, energy dispersive X-ray (EDX) analysis confirms the formation of Al native oxides due to γ -ray irradiation. [ABSTRACT FROM AUTHOR]