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In this work a novel type of substrate for thin film silicon solar cells is studied. The substrate has the advantage of being physically flat to allow the growth of cells with excellent material quality while being optically rough for enhanced light trapping that leads to high short circuit current density. The substrate is made of rough zinc oxide (ZnO) which is grown on a flat silver reflector. The ZnO is then covered with amorphous silicon and the stack is polished to expose the tips of the pyramidal ZnO surface. The ZnO embedded in the amorphous matrix provides the desirable scattering of light while the surface onto which the cell is deposited is flat and allows for the growth of good quality material. We present results of ~4 µm thick microcrystalline silicon solar cells prepared on such substrates with high open circuit voltages of 520 mV. We also demonstrate a large relative efficiency gain of 10 compared to a state of the art cell which is grown directly on an optimized textured substrate. © 2012 Elsevier B.V. All rights reserved.

The imprinting of random square based pyramidal textures with micrometric scale at the air/glass interface of thin film silicon solar cells is presented as an efficient alternative to anti-reflective coatings to minimize reflection losses at the cell entrance. This novel processing step, which can be applied after cell or module manufacture, is found to simultaneously enhance light in-coupling and light-trapping in amorphous silicon/microcrystalline silicon tandem solar cells. A remarkable total current gain of more than 5% is demonstrated with the imprinting of such structures, resulting in a tandem cell with a high initial efficiency of 13% for a total absorber layer thickness below 1.5 mu m. (C) 2011 Elsevier B.V. All rights reserved.

The challenge for all photovoltaic technologies is to maximize light absorption, to convert photons with minimal losses into electric charges, and to efficiently extract them to the electrical circuit. For thin-film solar cells, all these tasks rely heavily on the transparent front electrode. Here we present a multiscale electrode architecture that allows us to achieve efficiencies as high as 14.1% with a thin-film silicon tandem solar cell employing only 3 μm of silicon. Our approach combines the versatility of nanoimprint lithography, the unusually high carrier mobility of hydrogenated indium oxide (over 100 cm(2)/V/s), and the unequaled light-scattering properties of self-textured zinc oxide. A multiscale texture provides light trapping over a broad wavelength range while ensuring an optimum morphology for the growth of high-quality silicon layers. A conductive bilayer stack guarantees carrier extraction while minimizing parasitic absorption losses. The tunability accessible through such multiscale electrode architecture offers unprecedented possibilities to address the trade-off between cell optical and electrical performance.

High reflectivity is essential when a metal is used as back contact and reflector in thin film silicon solar cells. We show that thermal annealing at 150 °C improves the reflectivity of silver films deposited by sputtering at room temperature on nanotextured substrates. The annealing provokes two interlinked effects: rearrangement of the silver layer with a modification of its morphology and an increase of up to 42 in the grain size of the polycrystalline film for the preferential orientation as measured by X ray diffraction. The main consequence of these two mechanisms is a large increase in the reflectivity of silver when measured in air. This reflectivity increase is also noticeable in devices: amorphous silicon thin film solar cells grown on annealed silver films yield higher internal and external quantum efficiencies compared to cells grown on as deposited silver. The morphology modification smoothes down the substrate which is revealed by a clear increase of the open circuit voltage and fill factor of the cells grown on top. An amorphous silicon cell with a 200 nm nominally thick i layer fabricated on a flexible plastic substrate yielded an initial efficiency close to 10 with 15.9 mA/cm 2 of short circuit current using highly reflective annealed textured silver. We also propose for industrial purpose the sputtering of thin silver layer (120 nm) under moderate substrate temperature (~150 °C) to increase the layer reflectivity which avoids lengthening of the back reflector fabrication. © 2011 Elsevier B.V. All rights reserved.

Nanopatterning has gained tremendous importance in the field of photovoltaics, as absorption of sunlight in solar cells can be enhanced drastically by proper engineering of photonic nanostructures1– 8. However, despite intensive efforts, neither the ideal surface morphology nor the ideal scattering characteristics foroptimumlight trapping have been identified. Experimentally, a method capable of implementing arbitrarily designed surface morphologies directly into functional devices is desirable. Here, we establish a nanomoulding process that provides exactly such a platform, enabling precise, large-area, nanoscale patterning of functional zinc oxide films at low cost. We illustrate the application of nanomoulded zinc oxide films as transparent front electrodes in amorphous silicon solar cells, demonstrating excellent initial conversion efficiencies of 10.1%. In the quest to find the most efficient light-harvesting scheme, we anticipate that nanomoulding will catalyse the development and integration of exciting new nanophotonic structures.

We present amorphous silicon solar cells on random and periodic back reflector geometries. 1D gratings offer an intuitive understanding of the light trapping process by excitation of guided modes. Using the same period and similar shape, better performance is observed on 2D gratings due to a higher number of resonances.

Improving micromorph devices performances nowadays requires a current density increase: good devices typically exhibit an open circuit voltage times fill factor product of one (V oc ×FF∼1.4V×0.71=1). Their short-circuit current density (J sc ) value thus dictates their efficiency (expressed in %). Maximizing it with reasonable cells thicknesses necessitates therefore combining robust cell design with adequate light management through transparent electrodes and intermediate reflectors engineering. We will first show how record micromorph devices (13.5% initial and >11.5% stabilized efficiencies) are prepared on optimized single-layer ZnO electrodes. Such electrodes requirements will be discussed: 1) Strong and wide light scattering is needed on the entire useful wavelength range. Large features grant high total currents (>26mA/cm2) while sharp ones allow for high top cell currents (>13mA/cm2). 2) Sufficiently small or smooth substrate features permits high quality cell growth, providing good cell design (typically V oc over 1.4V). 3) Good conduction and transparency for electrodes (requiring ∼50cm2/V/s TCO mobility) should preserve sheet resistance close to 20Ω/□ (for FF>70%) with low absorption. We will then focus on pushing further micromorph devices potential. Either textured intermediate reflectors can fulfill the bottom cell needs, or double-texture substrates can be implemented: light scattering at large wavelengths is here achieved via nanoimprint lithography (a versatile approach to glass-texturing), topped by small and sharp ZnO features guaranteeing high top cell current. By combining excellent TCO with smart under-structures, thin devices delivering high currents with excellent efficiencies are within reach.

Finding the optimal structure to enhance light trapping in thin film silicon solar cells has attracted much attention in the previous decades. However, because of problems in integrating theory and experiment, there are only few comprehensive contributions that provide guidelines for the optimal design of such structures. In this work, a realistic thin film solar cell with almost conformal layers based on a one-dimensional metallic grating back-reflector is investigated through experiment and theory. The external quantum efficiency of the cell is obtained with the aid of both theory and experiment for different angles of incidence and in both polarizations to validate the computational method and to show the impact of guided mode excitation. Different substrate shapes that are compatible with solar cell fabrication are then considered and the effect of geometrical parameters on the short circuit current density of the device is investigated. Calculations show that among the investigated shapes, trinagular gratings with a very sharp slope in one side, so called sawtooth gratings, are the most promising one-dimensional grating for light trapping. Furthermore, the role of material property is discussed specifically in the back-reflector by simulating aluminum and silver back-reflectors. It is shown that the blue response of the solar cells is similar almost regardless of the back-reflector material but their red response is viable to change due to variation in resonant properties of the structure.

Silver can be used as the back contact and reflector in thin film silicon solar cells. When deposited on textured substrates, silver films often exhibit reduced reflectance due to absorption losses by the excitation of surface plasmon resonances. We show that thermal annealing of the silver back reflector increases its reflectance drastically. The process is performed at low temperature (150°C) to allow the use of plastic sheets such as polyethylene naphthalate and increases the efficiency of single junction amorphous solar cells dramatically. We present the best result obtained on a flexible substrate: a cell with 9.9% initial efficiency and 15.82 mA/cm2 in short circuit current is realized in n-i-p configuration.

We investigate the influence of refractive index contrast on the light scattering properties of nanotextured interfaces, which serve as front contact for p-i-n thin-film silicon solar cells. We here focus on ZnO surfaces with randomly oriented pyramidal features, known for their excellent light trapping performance. Transparent replicas, with a different refractive index, but practically identical morphology compared to their ZnO masters, were fabricated via nanoimprinting. Within the theoretical framework we recently proposed, we show how the angular and spectral dependence of light scattered by nanostructures with identical morphology but different refractive index may be related to each other allowing direct comparison of their light trapping potential within the device.

Angle resolved measurements of the external quantum efficiency of a-Si solar cells deposited on a grating show strong absorption phenomena which are well explained with the guided mode structure in an equivalent flat multilayer system.

We investigate the influence of the oxygen content in boron-doped nanocrystalline silicon oxide films (p-nc-SiOx) and introduce this material as window layer in n-i-p solar cells. The dependence of both, optical and electrical properties on the oxygen content is consistent with a bi-phase model which describes the p-nc-SiOx material as a mixture of an oxygen-rich (O-rich) phase and a silicon-rich (Si-rich) phase. We observe that increasing the oxygen content enhances the optical gap E-04 while deteriorating the activation energy and the planar conductivity. These trends are ascribed to a higher volume fraction of the O-rich phase. Incorporated into n-i-p a-Si: H cells, p-nc-SiOx layers with moderate oxygen content yield open circuit voltage (V-oc) up to 945mV, which corresponds to a relative gain of 11% compared to an oxygen-free p-layer. As a similar gain is obtained on planar and on textured substrates, we attribute the increase in V-oc to the higher work function of the p-nc-SiOx layer made possible by its wider band gap. These results are attained without changing the dilution ratio of the 250 nm thick intrinsic layer. We also observe an enhancement of 0.6mA cm(-2) in short circuit current density in the short wavelengths due to the higher transparency of the p-nc-SiOx layer. Finally, an initial efficiency of 9.9% for a single junction 250 nm a-Si:H n-i-p solar cell on plastic foil is achieved with the optimization of the p layer thickness, the doping ratio of the front transparent conductive oxide, and the optical properties of the back reflector. (C) 2011 American Institute of Physics. [doi:10.1063/1.3669389]

We investigate the performance of hydrogenated indium oxide as a transparent front electrode for micromorph thin-film silicon solar cells on glass. Light trapping is achieved by replicating the morphology of state-of-the-art zinc oxide electrodes, known for their outstanding light trapping properties, via ultraviolet nanoimprint lithography. As a result of the high electron mobility and excellent near-infrared transparency of hydrogenated indium oxide, the short-circuit current density of the cells is improved with respect to indium tin oxide and zinc oxide electrodes. We assess the potential for further current gains by identifying remaining sources of parasitic absorption and evaluate the light trapping capacity of each electrode. We further present a method, based on nonabsorbing insulating silicon nitride electrodes, allowing one to directly relate the optical reflectance to the external quantum efficiency. Our method provides a useful experimental tool to evaluate the light trapping potential of novel photonic nanostructures by a simple optical reflectance measurement, avoiding complications with electrical cell performance.

Despite the progress in the engineering of structures to enhance photocurrent in thin film solar cells, there are few comprehensive studies which provide general and intuitive insight into the problem of light trapping. Also, lack of theoretical propositions which are consistent with fabrication is an issue to be improved. We investigate a real thin film solar cell with almost conformal layers grown on a 1D grating metallic back-reflector both experimentally and theoretically. Photocurrent increase is observed as an outcome of guided mode excitation in both theory and experiment by obtaining the external quantum efficiency of the cell for different angles of incidence and in both polarization directions. Finally, the effect of geometrical parameters on the short circuit current density of the device is investigated by considering different substrate shapes that are compatible with solar cell fabrication. Based on our simulations, among the investigated shapes, triangular gratings with a very sharp slope in one side, so called sawtooth gratings, are the most promising 1D gratings for optimal light trapping.

We study the plasmonic and the non-plasmonic regimes of operation of a thin-film amorphous-silicon solar cell. By rigorous calculation, we discuss the impact of the cell geometry on the nature of its optical resonances.

We describe a method based on nanoimprinting and non-absorbing insulating silicon nitride electrodes for evaluating the light trapping potential of photonic nanostructures for thin-film silicon solar cells. We validate our method by relating the optical reflectance of the full solar cell stack to the external quantum efficiency of functional cells. Our method provides a useful experimental tool to compare different nanostructures circumventing complications arising from parasitic absorption and electrical cell performance.

We propose the use of transparent replicated random nanostructures fabricated via nanoimprinting on glass as next-generation superstrates for thin film silicon solar cells. We validate our approach by demonstrating short-circuit current densities for p-i-n hydrogenated microcrystalline silicon solar cells as high as for state-of-the-art nanotextured ZnO front electrodes. Our methodology opens exciting possibilities to integrate a large variety of nanostructures into p-i-n solar cells and allows to systematically investigate the influence of interface morphology on the optical and electronic properties of the device in order to further improve device performance.

Substrates with extremely low roughness to allow the growth of good-quality silicon material but that nevertheless present high light trapping properties are presented. In a first application, silver reflectors are used in single and tandem-junction amorphous silicon (a-Si:H) solar cells. High initial (stable) efficiencies of 10.4 % (8.1 %) for single-junction a-Si:H cells on glass and 11.1 % (9.2 %) for tandem-junction a-Si:H/a-Si:H cells on plastic are obtained. A second application better suited to multi-junction solar cells based on microcrystalline silicon (μc-Si:H) solar cells is presented: the substrate consists of rough zinc oxide (ZnO) grown on a flat silver reflector which is covered with a-Si:H; polishing of this structure yields an a-Si:H/ZnO interface that provides high light scattering even though the cell is deposited on a flat interface. We present results of ∼ 4-μm-thick μc-Si:H solar cells prepared on such substrates with high open-circuit voltages of 520 mV. A large relative efficiency gain of 20% is observed compared to a co-deposited cell grown directly on an optimized textured substrate.

In this paper, we investigate tandem amorphous/microcrystalline silicon solar cells with asymmetric intermediate reflectors grown in the n–i–p substrate configuration. We compare different types of substrates with respect to their light-trapping properties as well as their influence on the growth of single-junction microcrystalline cells. Our most promising back reflector combines a textured zinc oxide film grown by low-pressure chemical vapor deposition, a silver film for reflection, and a zinc oxide buffer layer. Grown on this substrate, microcrystalline cells exhibit excellent response in the infrared while keeping high open-circuit voltage and fill factor, leading to efficiencies of up to 10.0%. After optimizing the morphology of the asymmetric intermediate reflector, we achieve an n–i–p micromorph solar cell stabilized efficiency of 11.6%, using 270 nm and 1.7 mm of silicon for the absorber layer of the amorphous top cell and the microcrystalline bottom cell, respectively. Using this original device architecture, we reach efficiencies close to those of state-of-the-art n–i–p and p–i–n micromorph devices, demonstrating a promising route to deposit high-efficiency thin-film silicon solar cells on opaque substrates.

We investigate the transfer of random nanostructures commonly used in thin film silicon solar cells onto inexpensive substrates such as glass or flexible polyethylene sheets. Morphological and optical analyses of masters and replicas show the successful transfer of details with sizes much below 1 µm. These high quality replicas are obtained by UV nano imprinting avoiding the use of PDMS as an intermediate mold which has been identified as being responsible for the lack of resolution found in previous works. © 2010 Elsevier B.V. All rights reserved.

In this work, we study the replication of nanotextures used in thin film silicon solar cells to enhance light trapping onto inexpensive substrates such as glass or polyethylene naphtalate (PEN). Morphological analysis was carried out to asses the quality of these replicas. Moreover, single and tandem a-Si:H solar cells were deposited on top of the master and replica structures to verify their suitability to be used as substrates for solar cells in n-i-p configuration. We find stabilized efficiencies around 8% which are similar for tandem cells on masters and PEN replicas.

Thin film silicon solar cells are attractive for photovoltaics; however, the poor charge transport in this material requires that the devices are thinner than the absorption length. Adequate absorption can nevertheless be achieved by light scattering at textured interfaces because light can get trapped inside the absorber layer if it is scattered into angles above the critical angle of total internal reflection. This situation can be identified with the propagation of a guided mode in a waveguide where silicon plays the role of the high index guiding medium and the interface texture serves to couple the incident light to modes via grating coupling. We present an experimental realization of a solar cell structure on a line grating where the enhanced photocurrent can be clearly related to resonant excitation of waveguide modes.

We investigate the influence of patterned metallic back reflector on absorption in thin-film silicon photovoltaics. The impact of symmetry, periodicity, and angle of incidence of light is discussed by simulation and experiment.

Angle resolved measurements of the external quantum efficiency of n-i-p single junction amorphous solar cell deposited on a grating structure show clearly defined peaks of enhanced photocurrent in the weakly absorbing region between 1.6 and 2.15 eV. We explain these absorption phenomena and their angular variation with the excitation of guided modes via grating coupling. Calculation using an equivalent flat multilayer system permits to relate the theoretical values with the experimental data.

Texturing of interfaces in thin film silicon solar cells is essential to enhance the produced photocurrent and thus the efficiencies.AUVnano-imprint-lithography (UV-NIL) replication processwas developed to prepare substrates with textures that are suitable for the growth of n-i-p thin film silicon solar cells. Morphological and optical analyses were performed to assess the quality of the replicas. A comparison of single junction amorphous solar cells on the original structures and on their replicas on glass revealed good light trapping and excellent electrical properties on the replicated structures. A tandem amorphous silicon/amorphous silicon (a-Si/a-Si) cell deposited on a replica on plastic exhibits a stabilized efficiency of 8.1% and a high yield of 90% of good cells in laboratory conditions. It demonstrates the possibility to obtain appropriate structure on low cost plastic substrate. Copyright © 2010 John Wiley & Sons, Ltd.