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1. X-ray emission from layered media irradiated by an x-ray free-electron laser

Author

K. Le Guen, Olivier Peyrusse, Philippe Jonnard, Jean-Michel André, Physique des interactions ioniques et moléculaires (PIIM), Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-ATOM-PH]Physics [physics]/Physics [physics]/Atomic Physics [physics.atom-ph], X-ray, Free-electron laser, Bragg's law, Context (language use), Photoionization, 01 natural sciences, 010305 fluids & plasmas, Perfect crystal, [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph], 0103 physical sciences, Irradiation, Atomic physics, 010306 general physics, Refractive index
Abstract

International audience; This article presents a computational study of the x-ray fluorescence induced by the irradiation of thin layered media by intense, short x-ray pulses. The treatment is based on a numerical solution of the Helmholtz wave-equation both for the pump and for the fluorescence signal. Consistently with a possible heating of the medium during the x-ray pulse, complex refractive indices are calculated at each time step from the results of an underlying treatment of atomic physics. In the context of an important core-hole production as a result of photoionization, we discuss the peculiarities of the resulting amplified fluorescence grazing emission and of the Bragg diffraction which can be realized at some angles inside a multilayer material or even in a perfect crystal. * Electronic address: olivier.peyrusse@univ-amu.fr

Published
2020

2. Characterization of Pd/Y multilayers with B

Author

M Y, Wu, Q S, Huang, K, Le Guen, V, Ilakovac, B X, Li, Z S, Wang, A, Giglia, J P, Rueff, and P, Jonnard

Abstract

Pd/Y multilayers are high-reflectance mirrors designed to work in the 7.5-11 nm wavelength range. Samples, prepared by magnetron sputtering, are deposited with or without B

Published
2018

3. Characterization of Pd/Y multilayers with B4C barrier layers using GIXR and X-ray standing wave enhanced HAXPES

Author

Vita Ilakovac, B. X. Li, Zhenhua Wang, Philippe Jonnard, Angelo Giglia, Qiushi Huang, Meiyi Wu, K. Le Guen, Jean-Pascal Rueff, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Tongji University, Université de Cergy Pontoise (UCP), Université Paris-Seine, Northwestern Polytechnical University [Xi'an] (NPU), CNR Istituto Officina dei Materiali (IOM), Consiglio Nazionale delle Ricerche [Roma] (CNR), Synchrotron SOLEIL (SSOLEIL), and Centre National de la Recherche Scientifique (CNRS)

Subjects
Nuclear and High Energy Physics, Materials science, Photoemission spectroscopy, Enthalpy, FOS: Physical sciences, Applied Physics (physics.app-ph), 02 engineering and technology, Photon energy, 01 natural sciences, Molecular physics, 010309 optics, Standing wave, Pd/Y, hard x-ray photoemission spectroscopy, x-ray standing waves, 0103 physical sciences, [CHIM]Chemical Sciences, Reflectometry, nanometric multilayers, Instrumentation, Radiation, X-ray standing waves, X-ray, Physics - Applied Physics, Sputter deposition, 021001 nanoscience & nanotechnology, 0210 nano-technology
Abstract

Pd/Y multilayers are high reflectance mirrors designed to work in the 7.5-11 nm wavelength range. Samples, prepared by magnetron sputtering, are deposited with or without B4C barrier layers located at the interfaces of Pd and Y layers to reduce interdiffusion, which is expected by calculating mixing enthalpy of Pd and Y. Grazing incident x-ray reflectometry is used to characterize these multilayers. B4C barrier layers are found effective on reducing the Pd-Y interdiffusion. Details of the composition of the multilayers are revealed by hard x-ray photoemission spectroscopy under x-ray standing waves effect. It consists in measuring the photoemission intensity from samples that perform an angular scan in the region corresponding to the multilayer period and the incident photon energy according to the Bragg law. The experimental result indicates that Pd does not chemically react with B nor C at the Pd-B4C interfaces while Y does at the Y-B4C interfaces. The formation of Y-B or Y-C chemical compound can be the reason why the interfaces are stabilized. By comparing the experimentally obtained angular variation of the characteristic photoemission with the theoretical calculation, the depth distribution of each component element can be interpreted., 13 pages, 8 figures, 1 tables, 19 references

Published
2018
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4. Study of complex waveguide structure using soft X-ray reflectivity technique

Author

Amol Singh, J.-M. André, P. Jonnard, Mohammed H. Modi, Rajnish Dhawan, K. Le Guen, Raja Ramanna Centre for Advanced Technology, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Soft x ray, Materials science, business.industry, 02 engineering and technology, Surface finish, 021001 nanoscience & nanotechnology, 01 natural sciences, Reflectivity, Layered structure, Optics, Si substrate, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 0103 physical sciences, Waveguide (acoustics), 010306 general physics, 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS
Abstract

Grazing incidence x-ray reflectivity (GIXRR) technique is commonly used for structural investigation of layered structures. In case of complex x-ray waveguide structure it is difficult to obtain structural parameters using GIXRR technique owing to narrowly spaced Kiessig fringes. We used GIXRR and soft x-ray reflectivity (SXR) technique to study the x-ray waveguide structure composed of 4 layers Al/ZrC/Al/W on a Si substrate. Structural parameters of the stacks, density, thickness and roughness of the layers, are determined through fitting of SXR data. Advantages of SXR over GIXRR for such layered structure are shown.

Published
2017
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5. Study of Pd/Y based multilayers using high energy photoemission spectroscopy combined with x-ray standing waves

Author

Meiyi Wu, Zhenhua Wang, A. Giglia, K. Le Guen, Qiushi Huang, Philippe Jonnard, Vita Ilakovac, Jean-Michel André, Jean-Pascal Rueff, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), CNR Istituto Officina dei Materiali (IOM), Consiglio Nazionale delle Ricerche [Roma] (CNR), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Tongji University, Institute of Precision Optical Engineering [Shangai] (IPOE), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Materials science, Photoemission spectroscopy, Inverse photoemission spectroscopy, Angle-resolved photoemission spectroscopy, 02 engineering and technology, Photon energy, 7. Clean energy, 01 natural sciences, Pd/Y, Optics, Stack (abstract data type), 0103 physical sciences, 010306 general physics, ComputingMilieux_MISCELLANEOUS, business.industry, X-ray standing waves, Bragg's law, Sputter deposition, 021001 nanoscience & nanotechnology, Multilayers, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], Hard x-ray photoemission spectroscopy, Atomic physics, 0210 nano-technology, business
Abstract

We use hard x-ray photoemission spectroscopy combined with x-ray standing waves to characterize a series of Pd/Y multilayers designed to work in the 7.5-11 nm wavelength range. The samples, prepared by magnetron sputtering, are deposited either with or without nitrogen introduced in the sputtering gas. The aimed period of the samples is 4 nm. The experiments consist in obtaining the core level spectra of the various elements for a series of grazing angles. The angular scan is made in the range given by the Bragg law, the multilayer period and the incident photon energy. Given the period of the multilayer and the presence of a 2.5 nm-thick B4C capping layer, the photon energy is chosen to be 10 keV in order to probe the first 5-6 periods of the stack. Thus the Bragg angle is a little less than 1°. Rotating the sample enables putting the nodes of the electric field at some particular location of the stack, thus to make the excitation depth-selective, probing one interface or another or the center of one given layer. The changes of the chemical shift in the Pd 2p and 3d, Y 2p and 3d, O 1s, N 1s, C 1s and B 1s as a function of the angle, that is to say as a function of the location in the stack will give information about the possible interfacial process taking place in the Pd/Y multilayers.

Published
2017
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6. Cr/Sc multilayer radiator for parametric EUV radiation in 'water-window' spectral range

Author

J.-M. André, Ph Jonnard, F. Delmotte, V.V. Kaplin, A. S. Kubankin, S. de Rossi, S. R. Uglov, K. Le Guen, Evgueni Meltchakov, Tomsk Polytechnic University [Russie] (UPT), Belgorod State University, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)

Subjects
History, Photon, Materials science, Extreme ultraviolet lithography, радиаторы, энергия, Physics::Optics, Electron, Radiation, Photon energy, 01 natural sciences, Electromagnetic radiation, Education, Optics, 0103 physical sciences, 010306 general physics, ComputingMilieux_MISCELLANEOUS, Parametric statistics, 010302 applied physics, Water window, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], спектральные диапазоны, business.industry, излучения, фотоны, Computer Science Applications, угловые распределения, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], business, многослойные структуры
Abstract

The results of experimental investigation of parametric radiation generated by 5.7 MeV electrons in a multilayer structure consisting of 100 Cr/Sc bi-layers deposited on a Si[3]N[4] membrane are presented. The multilayer structure was specially created for generation of parametric radiation with photon energy in "water-window" spectral range. First test measurements of angular distributions of radiation have been done and discussed.

Published
2016
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7. An etched multilayer as a dispersive element in a curved-crystal spectrometer: implementation and performance

Author

N. Isac, K. Le Guen, Philippe Jonnard, Jean-René Coudevylle, and Jean-Michel André

Subjects
010302 applied physics, Diffraction, Materials science, Fabrication, Spectrometer, business.industry, Physics::Optics, Grating, 01 natural sciences, 010309 optics, Chemical state, Wavelength, Optics, 0103 physical sciences, Emission spectrum, Spectral resolution, business, Spectroscopy
Abstract

Etched multilayers obtained by forming a laminar grating pattern within interferential multilayer mirrors are used in the soft X-ray range to improve the spectral resolution of wavelength dispersive spectrometers equipped with periodic multilayers. We describe the fabrication process of such an etched multilayer dispersive element, its characterization through reflectivity measurement and simulations, and its implementation in a high-resolution Johann-type spectrometer. The specially designed patterning of a Mo/B4C multilayer is found fruitful in the range of the C K emission as the diffraction pattern narrows by a factor 4 with respect to the non-etched structure. This dispersive element with an improved spectral resolution was successfully implemented for electronic structure study with an improved spectral resolution by X-ray emission spectroscopy. As first results, we present the distinction between the chemical states of carbon atoms in various compounds, such as graphite, SiC and B4C, by the different shape of their C K emission band. Copyright © 2012 John Wiley & Sons, Ltd.

Published
2012
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8. DUVEX: An X-ray counting system based on YAG:Ce scintillator

Author

Philippe Jonnard, K. Le Guen, Jean-Michel André, Yves Ménesguen, Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire National Henri Becquerel ( LNHB ), Département Métrologie Instrumentation & Information ( DM2I ), Laboratoire d'Intégration des Systèmes et des Technologies ( LIST ), Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay-Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies ( LIST ), Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay-Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Laboratoire National Henri Becquerel (LNHB), Département Métrologie Instrumentation & Information (DM2I), Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay, Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Département d'instrumentation Numérique (DIN (CEA-LIST)), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)

Subjects
Nuclear and High Energy Physics, Photomultiplier, Physics::Instrumentation and Detectors, Astrophysics::High Energy Astrophysical Phenomena, Nuclear instrumentation, 02 engineering and technology, [PHYS.NEXP]Physics [physics]/Nuclear Experiment [nucl-ex], Scintillator, plastic scintillator, Noise (electronics), Spectral line, 030218 nuclear medicine & medical imaging, Counting system, 03 medical and health sciences, 0302 clinical medicine, Optics, sensor, ultraviolet, X-rays, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], [ PHYS.PHYS.PHYS-INS-DET ] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Instrumentation, Physics, detector, Electronic architecture, Spectrometry, business.industry, Soft-x-ray, Detector, X-ray, Soft X-rays, 021001 nanoscience & nanotechnology, radioactivity, Extreme ultraviolet, Yield (chemistry), Optoelectronics, Extreme-UV, ionizing radiation, 0210 nano-technology, business
Abstract

10 pages; International audience; A detector system, called DUVEX, has been developed for the soft-x-ray and extreme ultraviolet domain. It consists of a YAG:Ce scintillator coupled to a photomultiplier module working under vacuum in counting mode. The design and the performances of this detector in terms of yield, absolute efficiency, response and noise are reported. Spectra in the soft x-ray range of different elements (W, Ag, Al, Mg, Cu, N, C and B) obtained in WDS mode using this detector are presented. DUVEX appears as a competitive detection tool in terms of cost and easiness of implementation.

Published
2011
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9. Molybdenum–silicon aperiodic multilayer broadband polarizer for 13–30nm wavelength range

Author

Philippe Jonnard, Lingyan Chen, M.Y. Tan, K. Le Guen, S. Nannarone, Nicola Mahne, A. Giglia, Zhanshan Wang, and Jingtao Zhu

Subjects
Physics, Nuclear and High Energy Physics, Silicon, business.industry, chemistry.chemical_element, Synchrotron radiation, Polarizer, Polarization (waves), Standard deviation, law.invention, Wavelength, Optics, chemistry, Molybdenum, law, Extreme ultraviolet, Optoelectronics, business, Instrumentation
Abstract

Aperiodic molybdenum/silicon (Mo/Si) multilayer designed as a broadband polarizer with reflectivity over a wide wavelength range of 13–30 nm at a fixed incidence angle of 45° was developed by a numerical method. The multilayer was prepared using direct current magnetron sputtering. The reflectivity and polarizing properties were characterized using synchrotron radiation. In 13–30 nm wavelength region, the measured s -reflectivity ( R s ) with standard deviation is 13.5%±3.1%, p -reflectivity ( R p ) with standard deviation is 1.4%±0.5%. The mean of polarization degree is 81.2%. This broadband multilayer polarizer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements.

Published
2011
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10. Interfacial properties and characterization of Sc/Si multilayers

Author

Hélène Maury, Jean-Michel André, Philippe Jonnard, P. Ochin, K. Le Guen, Ernst Z. Kurmaev, Tyler N. Shendruk, and Alexander Moewes

Subjects
X-ray absorption spectroscopy, Materials science, Silicon, Absorption spectroscopy, Annealing (metallurgy), Metals and Alloys, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Sputter deposition, Atmospheric temperature range, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Silicide, Materials Chemistry, Scandium
Abstract

We investigate the intermixing of layers in Sc/Si and Sc/B 4 C/Si/B 4 C multilayers using electron and synchrotron excited soft X-ray emission and absorption spectroscopy. The multilayers are annealed at 100, 200, 300, 400 and 500 °C after preparation by magnetron sputtering. Silicon K β emission and reflectivity measurements verify that the non-annealed multilayer systems are composed of distinct layers with only a minor interdiffusion in Sc/Si samples whereas annealing Sc/Si multilayers at 400 °C leads to a degradation of the multilayer structure and the formation of intermittent scandium silicide, ScSi. The presence of B 4 C barriers in Sc/B 4 C/Si/B 4 C hinders this degradation from developing for the entire temperature range considered. The barrier layers continue to be effective for the entire temperature range even after an extended shelf-life.

Published
2010
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11. Nanometer-designed Al/SiC periodic multilayers: characterization by a multi-technique approach

Author

K. Le Guen, C. Hecquet, E. Meltchakov, Franck Delmotte, Jean-Michel André, M.-H. Hu, Philippe Jonnard, and Anouk Galtayries

Subjects
Materials science, business.industry, Extreme ultraviolet lithography, Refractory metals, Mineralogy, Surfaces and Interfaces, General Chemistry, Surface finish, Sputter deposition, Condensed Matter Physics, Surfaces, Coatings and Films, X-ray reflectivity, Chemical state, chemistry.chemical_compound, chemistry, Materials Chemistry, Silicon carbide, Optoelectronics, Nanometre, business
Abstract

Nanometer-thick Al/SiC periodic multilayers, designed for the Extreme Ultra Violet (EUV) range, have been characterized by different techniques dedicated to such thin multilayers (each between 4 and 10 nm thick). In order to decrease the roughness and to improve the optical performances of the stacks, an ultrathin (2 nm) refractory metal layer has also been introduced, thus making Al/W/SiC and Al/Mo/SiC multilayer systems with three layers in period. The samples are deposited by magnetron sputtering. The stacks have a period ranging between 16 and 18 nm. Time-of-Flight SIMS (ToF-SIMS) is used here to determine the depth profiles of the different elements present within the multilayers. It is observed that the interfaces of the Al/W/SiC and Al/Mo/SiC multilayers are sharper than those of the Al/SiC system. X-ray emission spectroscopy (XES) is used to identify the chemical state of the Al and Si atoms within the multilayers and to check if there is any interfacial compound. The results show that there is no interaction between the Al and SiC layers leading to the formation of an interfacial compound. The results are confirmed by X-ray reflectivity (XRR) measurements. They show that the Al/SiC multilayers present large interfacial roughnesses, but the Al/W/SiC and Al/Mo/SiC multilayers have the lower roughness values. Copyright © 2010 John Wiley & Sons, Ltd.

Published
2010
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12. Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers

Author

Philippe Jonnard, Hélène Maury, Christophe Hecquet, Zhipeng Wang, Jingtao Zhu, Zhen Zhang, Stefano Nannarone, Franck Delmotte, Jean-Michel André, Françoise Bridou, Nicola Mahne, Angela Giglia, K. Le Guen, Jia Dong, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratorio Nazionale TASC (TASC), Consiglio Nazionale delle Ricerche (CNR), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Annealing (metallurgy), multilayers, Activation energy, Magnesium silicide, law.invention, chemistry.chemical_compound, Optics, law, x-ray emission, 68.65.Ac, 61.05.cm, 78.70.En, 73.90.+f, 66.30.Ny, 68.35.Fx, Silicon carbide, Crystallization, Thin film, Composite material, business.industry, Chemistry, [CHIM.MATE]Chemical Sciences/Material chemistry, Sputter deposition, Condensed Matter Physics, interface physics, Electronic, Optical and Magnetic Materials, X-ray reflectivity, mutilayer, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], x-ray reflectivity, interface, annealing, business
Abstract

16 pages; International audience; The interplay between optical performance and the thermally activated interface chemistry of periodic Mg/SiC multilayers designed for application at 30.4 nm are investigated by optical (hard x-ray, soft x-ray and ultraviolet ranges, i.e. from 0.154 to 30.4 nm) reflectivity and x-ray emission spectroscopy. The multilayers are prepared by magnetron sputtering and then annealed up to a temperature of 500°C. Two clear changes take place in the multilayer upon annealing. At first, between 200 and 300°C a strong decrease of the reflectivity is observed, due to the development of interfacial roughness following the crystallization of the Mg layers. No interfacial compound is detected. Then, between 350 and 400°C there is formation of the Mg2Si magnesium silicide at the interfaces following the reaction between the Mg and SiC layers. This also leads to the almost total loss of reflectivity of the multilayer. Thus, this kind of multilayer is thermally stable only for application requiring no heating above 200°C.

Published
2008
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13. X-ray interface analysis of aperiodic Mo/Si multilayers

Author

J.-M. André, H. Maury, Philippe Jonnard, Huanwen Wang, Zhipeng Wang, K. Le Guen, and Jingtao Zhu

Subjects
Amorphous silicon, Materials science, Valence (chemistry), Silicon, Analytical chemistry, X-ray, General Physics and Astronomy, chemistry.chemical_element, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films, Crystallography, chemistry.chemical_compound, chemistry, Transition metal, Molybdenum, Silicide, Emission spectrum
Abstract

We present the non-destructive analysis of aperiodic Mo/Si multilayers by X-ray emission spectroscopy induced by electrons. The Si 3p occupied valence states of the silicon atoms present within these structures are analysed. Because of the great sensitivity of these states to the physico-chemical environment of the Si atoms, it is possible to distinguish the emission from the center of the Si layer (amorphous silicon) to that of the interfacial zones between the Mo and Si layers. Thus, the presence of molybdenum silicides is evidenced in the interfacial zones. It is also shown that the relative proportion of interfacial silicides depends on the deposition conditions.

Published
2007
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14. Kossel diffraction and photonic modes in one-dimensional photonic crystal

Author

Philippe Jonnard, Jean-Michel André, F. Bridou, K. Le Guen, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Diffraction, FOS: Physical sciences, Physics::Optics, One-dimensional photonic crystal, Standing wave, symbols.namesake, Fermi's golden rule, PACS numbers :78.67.Pt, 78-70.En,42.70 Qs, 61-05 C, Mathematical Physics, Photonic crystal, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Condensed matter physics, business.industry, density of photonic modes, reciprocity theorem, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Kossel diffraction, symbols, standing-wave, Photonics, business, Excitation, Optics (physics.optics), Physics - Optics
Abstract

International audience; Kossel diffraction under standing-wave excitation in a one-dimensional photonic crystal is investigated. It is shown that by combining the reciprocity theorem, the Fermi golden rule and the concept of density of photonic modes, it is possible to predict the behaviour of the Kossel diffraction in such a system.

Published
2015
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15. Development of a four-element conical electron lens dedicated to high resolution Auger electron–ion(s) coincidence experiments

Author

Catalin Miron, F. Burmeister, Denis Céolin, A. Naves de Brito, Stacey L. Sorensen, Alexandra Mocellin, R. Guillemin, M. Bougeard, Pascal Morin, N. Leclercq, K. Le Guen, Mario Simon, Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS), Department of Chemistry, University of Nevada [Reno], Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Department of Physics, Uppsala University, Department of Synchrotron Radiation Research, University of Lund-Czech Academy of Sciences [Prague] (CAS), and Lund University [Lund]-Czech Academy of Sciences [Prague] (CAS)

Subjects
numerical analysis, electrostatic lenses, Synchrotron radiation, Electron, 01 natural sciences, Electron spectroscopy, electron lenses, law.invention, Auger, electron optics, Optics, law, 0103 physical sciences, 010306 general physics, Instrumentation, Electrostatic lens, Physics, Auger electron spectroscopy, 010304 chemical physics, synchrotron radiation, business.industry, physics computing, [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, Lens (optics), Electron optics, PACS: 41.85.Ne, 07.81.+a, 07.85.Qe, 41.60.Ap, 79.20.Fv, 02.60.Cb, business
Abstract

A four-element conical electron lens has been developed in view of its integration to a double toroidal electron energy analyzer (DTA) dedicated to Auger electron–ion coincidence measurements. The lens design, using electron trajectory numerical simulations, was entirely guided by the perspective of analyzing energetic electrons with high resolution in the multicoincidence regime. The design, construction, and experimental characterization stages of this electron optics system are described in this article. Emphasis is put on the importance of third generation synchrotron radiation sources when performing such multicoincidence experiments.

Published
2002
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16. Spontaneous soft x-ray fluorescence from a superlattice under Kossel diffraction conditions

Author

K. Le Guen, Zhenhua Wang, Jean-Michel André, Philippe Jonnard, Yanyan Yuan, Jingtao Zhu, F. Bridou, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), ANR-10-INTB-0902,COBMUL,Nouveaux matériaux multicouches à base de cobalt pour applications optiques dans l'extrême ultra-violet(2010), European Project, Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Institute of Precision Optical Engineering. ( IPOE ), Laboratoire Charles Fabry / XUV, Laboratoire Charles Fabry ( LCF ), Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ), and Work was done in the framework of the international ANR-NSFC COBMUL project (ANR #10-INTB-902-01 and NSFC #11061130549),Work was done in the framework of the international ANR-NSFC COBMUL project (ANR #10-INTB-902-01 and NSFC #11061130549)

Subjects
Diffraction, Superlattice, Astrophysics::High Energy Astrophysical Phenomena, 01 natural sciences, 010305 fluids & plasmas, law.invention, Optics, law, 0103 physical sciences, Spontaneous emission, Stimulated emission, 010306 general physics, spontaneous emission, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, multilayer, Free-electron laser, superlattice, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, Kossel diffraction, Optical cavity, fluorescence, Atomic physics, business, Excitation
Abstract

International audience; The present study gives the proof of principle of a technique that is an extension of Kossel diffraction both from crystals to superlattices and toward the soft x-ray region, allowing the characterization of the interfaces within a periodic structure. We measure the intensity of the Co Lα and Mg Kα characteristic fluorescence emissions from a Mg/Co superlattice upon soft x-ray excitation. The observation is made so that the angle between the sample surface and the detection direction is scanned around the first and second Bragg peaks of the fluorescence emissions. Clear modulations of the emitted intensities are observed and well reproduced by simulations based on the reciprocity theorem and assuming a perfect stack. The present work gives evidence that such a superlattice plays the role of an optical cavity for the spontaneous emission generated within the stack. This should also be the case for stimulated emission, which when combined with pumping free electron laser, will open the road to innovative x-ray distributed feedback lasers.

Published
2014
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17. Characterization of multilayers and their interlayers: application to Co-based systems

Author

J.-M. André, P. Jonnard, K. Le Guen, Z. S. Wang, Jingtao Zhu, M.-H. Hu, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université Pierre et Marie Curie - Paris 6 (UPMC), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Part of this work was performed within the frame- work of the ANR-NSFC COBMUL project (ANR-10- INTB-902-01 and NSFC11061130549)., ANR-10-INTB-0902,COBMUL,Nouveaux matériaux multicouches à base de cobalt pour applications optiques dans l'extrême ultra-violet(2010), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
spectroscopy, Materials science, Extreme ultraviolet lithography, Nanotechnology, Surface finish, 01 natural sciences, 010309 optics, Multilayer X ray mirrors, Optics, Stack (abstract data type), 0103 physical sciences, Electrical and Electronic Engineering, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, [CHIM.MATE]Chemical Sciences/Material chemistry, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Characterization (materials science), Secondary ion mass spectrometry, Chemical state, Transmission electron microscopy, Extreme ultraviolet, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], Optoelectronics, interface, business, X-ray and EUV Reflectivity
Abstract

This paper was published in Chinese Optics Letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.col.org.cn/abstract.aspx?id=COL201311S10601-04. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.; International audience; We use complementary analysis techniques to determine the structure of nanometric periodic multilayers and particularly their interfaces. We focus on Co-based multilayer which can be used as efficient optical component in the extreme ultraviolet (EUV) range. The samples are characterized using reflectivity measurements in order to determine the thickness and roughness of the various layers, X-ray emission and nuclear magnetic resonance (NMR) spectroscopies to identify the chemical state of the atoms present within the stack and know if they interdiffuse. Results are validated through the use of destructive techniques such as transmission electron microscopy or secondary ion mass spectrometry.

Published
2013
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18. Analysis by Coupled-Mode Theory of X-ray Multilayer Gratings

Author

J.-M. André, K. Le Guen, and P. Jonnard

Subjects
Polychromator, Optics, Band-pass filter, Beamline, Computer science, business.industry, X-ray, Electrical engineering, Coupled mode theory, business
Abstract

Multilayer gratings developed since the end of the ninethies are now used for various purposes in x-uv optics: polychromator, narrow bandpass monochromators…We have implemented the Coupled-Mode Theory (CMT) to calculate the performances of these devices (efficiencies, bandwidths…) especially for quasi-lamellar gratings with different shapes of the multilayer pitch. We have fabricated such gratings and compared CMT calculations with measurements obtained at the BEAR beamline of ELETTRA.

Published
2013
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19. Thermal effects on Co/Mo2C multilayer mirrors studied by soft x-ray standing wave enhanced photoemission spectroscopy

Author

Philippe Jonnard, A. Giglia, S. Nannarone, Nicola Mahne, Zhenhua Wang, Subhrangsu Mukherjee, Jingtao Zhu, Jean-Michel André, Yijia Yuan, K. Le Guen, and Huizhi Li

Subjects
Free electron model, Materials science, business.industry, Photoemission spectroscopy, Bragg peak, Electron, Photon energy, Molecular physics, Chemical compounds, Chemicals, Electrons, Free electron lasers, Interfaces, Mirrors, Multilayers, Optics, Photons, Standing wave, Chemical state, Specular reflection, business
Abstract

Here is presented the spectroscopic study of the evolution of the first buried interfaces of a B4C capped Co/Mo2C multilayer mirror induced by thermal treatment up to 600°C. This kind of study is typically performed to simulate the response of multilayer optics working in extreme conditions, as for instance when irradiated by new high brilliance sources as Free Electron Lasers. In fact, the efficiency of multilayers is related to the optical contrast between the alternating high and low density layers, and then to the degree of interdiffusion and the creation or evolution of interface compounds. The analysis has been performed at the Co L23 edge with different soft x-ray spectroscopic techniques including diffuse and specular reflectivity, total electron and fluorescent yield at the BEAR beamline at Elettra (Trieste) (http://www.elettra.trieste.it/elettra-beamlines/bear.html). The presentation is focused on the spectroscopic results obtained by soft x-ray standing wave enhanced photoemission (XSW) from the Mo 3d, B 1s, C 1s, O 1s core levels by using a photon energy close to the Co L23 edge and corresponding to the first Bragg peak of the multilayer. The experimental results have been compared with simulations to obtain information both on the chemical state (e.g. oxidation state) and interface morphology in terms of profiles of distribution of elements and interdiffusion of B, oxidized B and C in the interface region. In summary, it is possible to conclude in favour of a good stability of the multilayer in the investigated temperature range, as confirmed by the good performance in terms of reflectivity. These results confirm the usefulness of XSW for this kind analysis of multilayer optics.

Published
2013

20. Co/Mo2C mirror as studied by x-ray fluorescence and photoelectron spectroscopies induced by x-ray standing waves

Author

Subhrangsu Mukherjee, Z. S. Wang, S. Nannarone, A. Giglia, K. Le Guen, P. Jonnard, Nicola Mahne, Jingtao Zhu, Yijia Yuan, J.-M. André, and Huizhi Li

Subjects
Boron, Contamination, Interfaces, Intermodulation, Luminescence, Mirrors, Multilayers, Oxygen, Radiation, Simulations, Materials science, business.industry, X-ray standing waves, Bragg peak, Photoelectric effect, Sputter deposition, Spectral line, Standing wave, Optics, X-ray photoelectron spectroscopy, Electric field, Atomic physics, business
Abstract

We study a periodic Co/Mo2C multilayer prepared by magnetron sputtering. The period is 4.1 nm and the sample is designed to work around 778 eV, i.e. close to the Co 2p3/2 threshold, at a glancing angle of 11°. In this condition, strong x-ray standing waves set up within the sample. In order to probe different depths within the stack, particularly the interfaces, the glancing angle is moved along the first Bragg peak, while, the B 1s, C 1s, Mo 3d or O 1s photoelectron spectra, the Co Lα x-ray spectrum as well as the drain current of the sample are measured. Boron is present in the 3.5 nm B4C capping layer and oxygen is from surface contamination. The photoelectrons bring information from the superficial zone, i.e. the 5 first nm, while the characteristic x-rays probe the whole stack. Clear modulations of the intensity of the studied signals as well as core level shifts are observed when going through the Bragg peak. In order to understand what happens in the multilayer calculations of depth distributions of the electric field and the energy loss by the radiation are made with the IMD and OPAL codes, respectively. The combination of experimental results and theoretical simulations will enable us to determine from which place originate the various signals and to know if some interaction exists between the Co and Mo2C layers.

Published
2012
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21. Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

Author

Haochuan Li, Angela Giglia, Nicola Mahne, S.-K. Zhou, Michael Walls, Jean-Michel André, K. Le Guen, Philippe Jonnard, Jie Zhu, M.-H. Hu, Zhanshan Wang, Imène Esteve, Stefano Nannarone, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Institute of Precision Optical Engineering. ( IPOE ), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg ( IPCMS ), Université de Strasbourg ( UNISTRA ) -Centre National de la Recherche Scientifique ( CNRS ) -Matériaux et nanosciences d'Alsace, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Réseau nanophotonique et optique, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ), CNR - Istituto Officina dei Materiali ( IOM ), Consiglio Nazionale delle Ricerche [Roma] ( CNR ), Institut de minéralogie et de physique des milieux condensés ( IMPMC ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -IPG PARIS-Université Paris Diderot - Paris 7 ( UPD7 ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Physique des Solides ( LPS ), Université Paris-Sud - Paris 11 ( UP11 ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), CNR Istituto Officina dei Materiali (IOM), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Institut de minéralogie et de physique des milieux condensés (IMPMC), Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Institut de Physique du Globe de Paris (IPG Paris)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Physique des Solides (LPS), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université Pierre et Marie Curie - Paris 6 (UPMC), Université de Strasbourg (UNISTRA)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Consiglio Nazionale delle Ricerche [Roma] (CNR), Université Pierre et Marie Curie - Paris 6 (UPMC)-IPG PARIS-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS), and Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)

Subjects
Materials science, Annealing (metallurgy), Scanning electron microscope, Extreme ultraviolet lithography, Mg, Analytical chemistry, FOS: Physical sciences, 02 engineering and technology, 01 natural sciences, Co, 0103 physical sciences, Scanning transmission electron microscopy, General Materials Science, Thermal stability, Emission spectrum, 010302 applied physics, Condensed Matter - Materials Science, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], electron energy loss spectroscopy, [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], multilayer, Electron energy loss spectroscopy, Materials Science (cond-mat.mtrl-sci), General Chemistry, x-ray emission spectroscopy, [ PHYS.COND.CM-GEN ] Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], EUV reflectivity, 021001 nanoscience & nanotechnology, 3. Good health, nuclear magnetism resonance spectroscopy, Condensed Matter - Other Condensed Matter, Chemical state, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], scanning transmission electron microscopy, interface, annealing, 0210 nano-technology, scanning electron microscopy, Physics - Optics, Other Condensed Matter (cond-mat.other), Optics (physics.optics)
Abstract

We present the results of the characterization of Mg/Co periodic multilayers and their thermal stability for the EUV range. The annealing study is performed up to a temperature of 400\degree C. Images obtained by scanning transmission electron microscopy and electron energy loss spectroscopy clearly show the good quality of the multilayer structure. The measurements of the EUV reflectivity around 25 nm (~49 eV) indicate that the reflectivity decreases when the annealing temperature increases above 300\degreeC. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. Nuclear magnetic resonance used to determine the chemical state of the Co atoms and scanning electron microscopy images of cross sections of the Mg/Co multilayers reveal changes in the morphology of the stack from an annealing temperature of 305\degreee;C. This explains the observed reflectivity loss., Comment: Published in Applied Physics A: Materials Science \& Processing Published at http://www.springerlink.com.chimie.gate.inist.fr/content/6v396j6m56771r61/ 21 pages

Published
2011
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22. DUVEX a versatile EUV-X detector

Author

Y. Ménesguen, Philippe Jonnard, Jean-Michel André, and K. Le Guen

Subjects
Physics, Photomultiplier, Physics::Instrumentation and Detectors, business.industry, Extreme ultraviolet lithography, Detector, Scintillator, Noise (electronics), Spectral line, Wavelength, Optics, Extreme ultraviolet, Optoelectronics, business
Abstract

A detector system has been developed for the soft x-ray and extreme UV ranges. It is called DUVEX and has been designed in order to be easy to implement and use, and cheap to operate. It consists in a YAG:Ce scintillator coupled to a photomultiplier module working in the counting mode. The system can be operated under vacuum. We report on the design and the performances of this detector in terms of response, noise, stability and efficiency. Soft x-ray spectra of different elements (from B to W) obtained in the wavelength dispersive mode acquitted with DUVEX are presented.

Published
2011
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23. Characterization of EUV periodic multilayers

Author

Evgueni Meltchakov, Jean-Michel André, Philippe Jonnard, Franck Delmotte, K. Le Guen, Anouk Galtayries, Zhanshan Wang, M.-H. Hu, Christophe Hecquet, Jingtao Zhu, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Laboratoire de Physico-Chimie des Surfaces (LPCS), Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
010302 applied physics, extreme UV, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, multilayers, Analytical chemistry, 02 engineering and technology, [CHIM.MATE]Chemical Sciences/Material chemistry, Sputter deposition, 021001 nanoscience & nanotechnology, 01 natural sciences, Spectral line, Ion, NMR spectra database, Chemical state, x-ray, Extreme ultraviolet, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 0103 physical sciences, interdiffusion, Emission spectrum, 0210 nano-technology, Spectroscopy, roughness
Abstract

13 pages; International audience; Nanometric Co/Mg, Co/Mg/B4C, Al/SiC and Al/Mo/SiC periodic multilayers deposited by magnetron sputtering are studied in order to correlate their optical performances in the extreme ultraviolet (EUV) range to their structural quality. To that purpose, our recently developed methodology based on high resolution x-ray emission spectroscopy (XES) and x-ray and EUV reflectometry is now extended to nuclear magnetic resonance (NMR) spectroscopy and time-of-flight secondary ions mass spectrometry (ToF-SIMS). The analysis of the Co Lalpha,beta and Mg Kbeta emission spectra shows that the Co and Mg atoms within the multilayers are in a chemical state equivalent to that of the atoms in the pure Co and Mg references respectively. But NMR spectra give evidence for a reaction between Co atoms and B and/or C atoms from B4C. The Al and Si Kbeta emission spectra do not reveal the formation of an interfacial compound in Al/SiC and Al/Mo/SiC. Only the roughness limits the optical quality of Al/SiC. The comparative analysis of the ToF-SIMS spectra of Al/SiC and Al/Mo/SiC indicates that the structural quality is enhanced when Mo is introduced within the stack.

Published
2011
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24. Origin of step-like behavior in the Co/Si system

Author

K. Le Guen, Archna Sagdeo, Rajeev Rawat, Philippe Jonnard, G. S. Lodha, Sanjay Rai, and Avanish Kumar Srivastava

Subjects
Silicon, Materials science, Kerr effect, Condensed matter physics, Magnetoresistance, Cobalt, Coercivity, Condensed Matter Physics, Condensed Matter::Materials Science, Magnetization, chemistry.chemical_compound, Magnetics, Ferromagnetism, chemistry, Models, Chemical, Transmission electron microscopy, Silicide, Materials Testing, General Materials Science, Computer Simulation, Layer (electronics)
Abstract

A systematic investigation of the structure, nature of the interface and their possible connections with magnetic properties for the as-deposited Co/Si/Co trilayer system has been carried out. X-ray reflectivity, cross-sectional transmission electron microscopy and x-ray emission measurements performed on the Co/Si/Co trilayer system show that when the Si layer thickness is less than ~ 20 A, the full Si layer is converted into a cobalt silicide layer whereas when the Si layer thickness > 20 A along with the silicide layer. the pure Si layer also remains. A comparison of magneto-optical Kerr effect and magnetoresistance measurements reveals the absence of antiferromagnetic coupling in these samples. Double-step-like magnetization, in the case of Si layer thickness > 20 A between two Co layers, is explained by magnetization reversal of two ferromagnetic layers having different coercivities, independent of each other.

Published
2011

25. Optical, chemical, depth, and magnetic characterization of Mg/Co-based nanometric periodic multilayers

Author

Imène Esteve, Z. S. Wang, Jingtao Zhu, Christian Meny, S. Nannarone, Nicola Mahne, Adriano Verna, K. Le Guen, Philippe Jonnard, M.-H. Hu, H. Ch. Li, S.-K. Zhou, Michael Walls, Jean-Michel André, Anouk Galtayries, A. Giglia, AA. VV., Lequime M, Macleod H A, Ristau D, Jonnard, P., Le Guen, K., Hu, M. H., André, J. M., Zhou, S. K., Li, H. C. h., Zhu, J. T., Wang, Z. S., Mahne, N., Giglia, A., Nannarone, S., Verna, Adriano, Meny, C., Galtayries, A., Estève, I., and Walls, M.

Subjects
Secondary ion mass spectrometry, X-ray reflectivity, ultraviolet optical elements, multilayer systems, Magnetization, Materials science, Absorption edge, Scanning electron microscope, Magnetism, Annealing (metallurgy), Analytical chemistry, Emission spectrum
Abstract

We have developed and elaborated a series of Mg/Co-based periodic multilayers to build efficient mirrors for the extreme ultraviolet (EUV) range. For s-polarized light and at 45° of grazing incidence, the reflectivity of as-deposited Mg/Co is 42.6% at 25.1 nm. X-ray emission spectroscopy and nuclear magnetic resonance measurements do not indicate any noticeable interdiffusion at the interfaces between layers. Scanning transmission electronic microscopy images attest the high structural quality of the stack. X-ray reflectivity (XRR) curves in the hard x-ray and EUV domains confirm this description and estimate a weak interfacial roughness (~ 0.5 nm). Taking advantage of the magnetic character of Co, we have performed resonant magnetic reflectivity measurements by scanning the photon energy around the Co L absorption edge for opposite circular polarizations. The magnetization profile of the Co layers within Co/Mg determined with an expected depth resolution of one monolayer confirms the interface abruptness. Scanning electron microscopy images and XRR curves give evidence of the thermal stability of Mg/Co up to 300 °C. From that value, a strong change in the sample morphology due to the delamination of the multilayer from the substrate occurs. This should account for the drastic reflectivity drop observed above this temperature. Starting from Mg/Co, we have inserted a Zr layer at one or at the other interface or at both interfaces to estimate the effect of the introduction of a third material within the period. We have found that Mg/Co/Zr is more efficient (50% of reflectivity) than Mg/Zr/Co and Mg/Zr/Co/Zr (~ 40%). Through time-of-flight secondary ion mass spectrometry depth profiling and NMR measurements, we have assigned this difference to an intermixing process when Co layers are deposited onto Zr layers.

Published
2011
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26. Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range

Author

Jean-Michel André, H. Ch. Li, Z.-S. Wang, S.-K. Zhou, K. Le Guen, Philippe Jonnard, Jingtao Zhu, M.-H. Hu, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Extreme ultraviolet lithography, Mg, Analytical chemistry, 02 engineering and technology, Surface finish, Boron carbide, Photon energy, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Co, chemistry.chemical_compound, 0103 physical sciences, x-ray emission, Emission spectrum, Physical and Theoretical Chemistry, 010302 applied physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], multilayer, EUV reflectivity, 021001 nanoscience & nanotechnology, NMR, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, X-ray reflectivity, Wavelength, Chemical state, Crystallography, General Energy, chemistry, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], x-ray reflectivity, interface, 0210 nano-technology
Abstract

Reprinted with permission from (J. Phys. Chem. C, 2010, 114 (14), pp 6484-6490). Copyright (2010) American Chemical Society.; International audience; We propose a new system, namely the periodic Co/Mg multilayer system, for optics applications in the EUV range. Close to the Mg L edge, i.e., around a wavelength of 25 nm or a photon energy of 50 eV, a reflectivity of about 43% is measured at 45° for s-polarized radiation. Moreover, it appears that this system is stable over a period of time of three months. The introduction of thin boron carbide interfacial layers proves disastrous contrary to simulations that show this could be beneficial. We combine X-ray reflectivity in the hard X-ray range, X-ray emission spectroscopy, and nuclear magnetic resonance to determine the thickness and roughness of the Co and Mg layers as well as the chemical state of the Co and Mg atoms at the interfaces. This reveals that in the Co/Mg system the interfaces are abrupt and there is no interdiffusion between the Co and Mg layers. Then the difference between the experimental and simulated reflectivities is ascribed to the interfacial roughness of the order of 0.4 nm. In the Co/Mg/B4C system, evidence of a large mixing of the Co and B4C layers is presented and explains the poor reflectance of this system.

Published
2010
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27. Introduction of Zr in nanometric periodic Mg/Co multilayers

Author

Philippe Jonnard, Angela Giglia, Jean-Michel André, Jie Zhu, S.-K. Zhou, S. Nannarone, Z.-S. Wang, K. Le Guen, M.-H. Hu, N. Mahne, Haochuan Li, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, CNR Istituto Officina dei Materiali (IOM), Consiglio Nazionale delle Ricerche [Roma] (CNR), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Materials science, Annealing (metallurgy), Extreme ultraviolet lithography, multilayers, Mg, Analytical chemistry, chemistry.chemical_element, FOS: Physical sciences, 02 engineering and technology, 01 natural sciences, Spectral line, 010309 optics, Co, Transition metal, 0103 physical sciences, General Materials Science, material order, x-ray and EUV reflectivity, Alkaline earth metal, Zirconium, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Condensed Matter - Materials Science, Zr, multilayer, Materials Science (cond-mat.mtrl-sci), General Chemistry, Atmospheric temperature range, 021001 nanoscience & nanotechnology, Condensed Matter - Other Condensed Matter, chemistry, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], X-ray crystallography, 0210 nano-technology, Physics - Optics, Other Condensed Matter (cond-mat.other), Optics (physics.optics)
Abstract

We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45deg of grazing incidence and reaches 51.3% upon annealing at 200deg C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out., Comment: 19 pages

Published
2010
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28. Thermal properties, optical and interface characterization of Mg/Co multilayers for the EUV range

Author

H. Ch. Li, Jean-Michel André, Jingtao Zhu, Nicola Mahne, Z. S. Wang, Philippe Jonnard, M.-H. Hu, S.-K. Zhou, K. Le Guen, A. Giglia, and Stefano Nannarone

Subjects
interfaces, X-ray reflectivity, Chemical species, Chemical state, Materials science, Scanning electron microscope, Annealing (metallurgy), multilayers, Extreme ultraviolet lithography, Analytical chemistry, Thermal stability, Emission spectrum
Abstract

We present the results of the thermal stability of Mg/Co multilayers in the EUV range. The annealing study is performed up to a temperature of 400°C. The X-ray reflectivity at 0.154 nm is used in order to determine the structural parameters (thickness, roughness and density) of the layers. The measurements of the EUV reflectivity around 25 nm show that the reflectivity decreases when the annealing temperature increases above 300°C. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. The results show a small oxidation after annealing at 305°C, which increases greatly at 400°C. Scanning electron microscopy images of cross sections of the multilayer show a change of the surface morphology above 305°C. This large change of morphology and the oxidation explain the large reflectivity loss.

Published
2010

29. High Spectral Resolution With Multilayer Gratings

Author

J.-M. André, K. Le Guen, P. Jonnard, Melissa Denecke, and Clive T. Walker

Subjects
Materials science, Excited state, Resolution (electron density), Electron beam processing, Analytical chemistry, Emission spectrum, Irradiation, Grating, Spectral resolution, Spectral line
Abstract

The improvement of spectral resolution brought about by the use of multilayer grating (MG) instead of multilayer mirror (MM) is analyzed. The spectrum of a complex sample containing various elements excited under electron irradiation is studied. This sample is a pellet made by pressing powders of Cu and compounds with Fe and F atoms. The MM is a Mo/B4C periodic multilayer with a period of about 6 nm; for the MG a grating of 1 μm period has been etched in the MM. It is shown that the MG can easily resolve the F Kα and Fe Lα emissions, separated by about 30 eV, whereas the MM is unable to give such a performance. A comparison with an EDS (SDD) detector is also given. It is also shown that the MG can improve the detection limit. Finally the role of the slit placed in front of the detector is discussed.

Published
2010
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30. Co/Mg/X Multilayer Mirrors For the EUV Range

Author

Z. S. Wang, M.-H. Hu, J.-M. André, S.-K. Zhou, K. Le Guen, H. Ch. Li, P. Jonnard, and Jingtao Zhu

Subjects
Materials science, business.industry, Extreme ultraviolet lithography, Superlattice, Analytical chemistry, chemistry.chemical_element, Yttrium, Polarization (waves), Electromagnetic radiation, Carbide, Barrier layer, Optics, chemistry, Transition metal, business
Abstract

A new material combination namely Co/Mg multilayer designed for optics applications in the EUV range, is reported. Simulations show that reflectivity value of the Co/Mg multilayer can reach a reflectivity of 55% at 25.2 nm (49.2 eV), when the grazing incidence angle is set to 45° and s polarization is considered. The introduction of additional materials, e.g., Y and Zr can improve the reflectivity to 61%. Co/Mg and Co/Mg/B4C multilayers have been deposited following the parameters deduced from the simulations. The introduction of a B4C barrier layer would in principle increase the multilayer reflectivity to 61%. In fact the reflectivity measurements at 0.154 nm show that the introduction of B4C does not improve the structural quality of the multilayers.

Published
2010
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31. On the Kramers-Kronig transform with logarithmic kernel for the reflection phase in the Drude model

Author

N. Mahne, S. Nannarone, Philippe Jonnard, K. Le Guen, Jean-Michel André, Angela Giglia, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratorio Nazionale TASC (TASC), Consiglio Nazionale delle Ricerche (CNR), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
optical properties, Karush–Kuhn–Tucker conditions, Kramers–Kronig relations, Logarithm, reflectance, Synchrotron radiation, FOS: Physical sciences, Physics::Optics, 02 engineering and technology, Dielectric, 01 natural sciences, 0103 physical sciences, Kramers-Kronig analysis, 010306 general physics, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Drude model, Mathematical analysis, 16. Peace & justice, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, Kernel (image processing), thin films, 0210 nano-technology, Refractive index, Physics - Optics, Optics (physics.optics)
Abstract

We use the Kramers-Kronig transform (KKT) with logarithmic kernel to obtain the reflection phase and, subsequently, the complex refractive index of a bulk mirror from reflectance. However, there remains some confusion regarding the formulation for this analysis. Assuming the damped Drude model for the dielectric constant and the oblique incidence case, we calculate the additional terms: phase at zero frequency and Blashke factor and we propose a reformulated KKT within this model. Absolute reflectance in the s-polarization case of a gold film is measured between 40 and 350 eV for various glancing angles using synchrotron radiation and its complex refractive index is deduced using the reformulated KKT that we propose. The results are discussed with respect to the data available in the literature., Comment: 18 pages, piblished in j. Mod. Opt. 57, 1504 (2010)

Published
2010
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32. Formation of silicides in annealed periodic multilayers

Author

Hélène Maury, K. Le Guen, Philippe Jonnard, and Jean-Michel André

Subjects
Valence (chemistry), Materials science, Silicon, Annealing (metallurgy), business.industry, Extreme ultraviolet lithography, chemistry.chemical_element, X-ray reflectivity, Chemical species, chemistry.chemical_compound, Optics, chemistry, Silicon carbide, Optoelectronics, Thermal stability, business
Abstract

Periodic multilayers of nanometric period are widely used as optical components for the X-ray and extreme UV (EUV) ranges, in X-ray space telescopes, X-ray microscopes, EUV photolithography or synchrotron beamlines for example. Their optical performances depend on the quality of the interfaces between the various layers: chemical interdiffusion or mechanical roughness shifts the application wavelength and can drastically decrease the reflectance. Since under high thermal charge interdiffusion is known to get enhanced, the study of the thermal stability of such structures is essential to understand how interfacial compounds develop. We have characterized X-ray and EUV siliconcontaining multilayers (Mo/Si, Sc/Si and Mg/SiC) as a function of the annealing temperature (up to 600°C) using two non-destructive methods. X-ray emission from the silicon atoms, describing the Si valence states, is used to determine the chemical nature of the compounds present in the interphases while X-ray reflectivity in the hard and soft X-ray ranges can be related to the optical properties. In the three cases, interfacial metallic (Mo, Sc, Mg) silicides are evidenced and the thickness of the interphase increases with the annealing temperature. For Mo/Si and Sc/Si multilayers, silicides are even present in the as-prepared multilayers. Characteristic parameters of the stacks are determined: composition of the interphases, thickness and roughness of the layers and interphases if any. Finally, we have evidenced the maximum temperature of application of these multilayers to minimize interdiffusion.

Published
2009
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33. Optical, chemical, and depth characterization of Al/SiC periodic multilayers

Author

M.-H. Hu, Anouk Galtayries, Evgueni Meltchakov, Jean-Michel André, Philippe Jonnard, K. Le Guen, Christophe Hecquet, Franck Delmotte, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratoire de Physico-Chimie des Surfaces (LPCS), Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Charles Fabry de l'Institut d'Optique ( LCFIO ), Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Physico-Chimie des Surfaces ( LPCS ), Ecole Nationale Supérieure de Chimie de Paris- Chimie ParisTech-PSL ( ENSCP ) -Centre National de la Recherche Scientifique ( CNRS ), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], Chemistry, Refractory metals, Analytical chemistry, 02 engineering and technology, Surface finish, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, X-ray reflectivity, Secondary ion mass spectrometry, Chemical species, Chemical state, Time of flight, 0103 physical sciences, Emission spectrum, 0210 nano-technology, ComputingMilieux_MISCELLANEOUS
Abstract

We present the characterization of Al/SiC periodic multilayers designed for op tical applications. In some samples, a thin layer of W or Mo is added at the SiC-on-Al interfaces. We use x-ray reflectivity (XRR) in order to determine the parameters of the stacks, i.e. thickness and roughness of all the layers. We have performed x-ray emission spectroscopy (XES) to identify the chemical state of th e Al and Si atoms present within the stru cture from an analysis of the shape of the Al KE and Si KE emission bands. Finally, time of flight secondary ion mass spectrometry (ToF-SIMS) is used to obtain the depth profile of the different elements present within the studied stacks. A fit of the XRR curves shows that the Al/SiC multilayer present large interfacial roughness (up to 2.8 nm), which is decreased considerably (down to 1 nm or less) when the refractory metal layers are introduced in the periodic structure. The combination of XES and ToF-SIMS allows us to conclude that in these systems the roughness is a purely geometrical parameter and not related to chemical interfacial reactions. Keywords: periodic multilayer, x-ray emission, x-ray reflectivity, time of flight secondary ion mass spectrometry * philippe.jonnard@upmc.fr , phone 33 1 44 27 63 03, fax 33 1 44 27 62 26, www.lcpmr.upmc.fr/

Published
2009
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34. Spectroscopic study of interfaces in Al/Ni periodic multilayers

Author

G. Gamblin, B. Rouvellou, M. Salou, K. Le Guen, Stéphane Rioual, Philippe Jonnard, J. Ben Youssef, Polytech'Paris-UPMC, Université Pierre et Marie Curie - Paris 6 (UPMC), Laboratoire de magnétisme de Bretagne (LMB), Université de Brest (UBO)-Institut Brestois du Numérique et des Mathématiques (IBNM), Université de Brest (UBO)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
010302 applied physics, Diffraction, Condensed Matter - Materials Science, Valence (chemistry), Chemistry, Annealing (metallurgy), Intermetallic, Analytical chemistry, Materials Science (cond-mat.mtrl-sci), FOS: Physical sciences, 02 engineering and technology, Metals and alloys, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Electronic, Optical and Magnetic Materials, Multilayers, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 0103 physical sciences, X-ray emission spectra and fluorescence, Physical Sciences, Emission spectrum, 0210 nano-technology, Instrumentation
Abstract

Using electron-induced X-ray emission spectroscopy (XES), we have studied two Al/Ni periodic multilayers that differ only by their annealing temperature: as-deposited and annealed at 115C. Our aim is to show that XES can provide further details about the chemistry at the metal-metal interface, in addition to what is obtained by X-ray diffraction. The distribution of valence states exhibiting Al 3p and Ni 3d character is determined from the analysis of the Al Kbeta and Ni Lalpha emission bands respectively. The multilayer emission bands are compared to those of reference materials: pure Al and Ni metals as well as Al3Ni, Al3Ni2 and AlNi intermetallics. We provide evidence that, for temperatures up to 115C, Al3Ni is the major component of the multilayer., Comment: 5 pages. Can also be found at : http://www.epjap.org/action/displayAbstract?fromPage=online\&aid=8011580

Published
2009
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35. Analysis of periodic Mo/Si multilayers: influence of the Mo thickness

Author

F. Delmotte, Nicola Mahne, Hélène Maury, Jean-Michel André, Angelo Giglia, Stefano Nannarone, K. Le Guen, Françoise Bridou, Philippe Jonnard, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Istituto Nazionale per la Fisica della Materia (INFM), Università del Salento [Lecce], Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), European Project, Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), CNR - Istituto Officina dei Materiali ( IOM ), Consiglio Nazionale delle Ricerche [Roma] ( CNR ), Laboratoire Charles Fabry de l'Institut d'Optique ( LCFIO ), Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratorio Nazionale TASC ( TASC ), Consiglio Nazionale delle Ricerche ( CNR ), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Laboratorio Nazionale TASC (TASC), and Consiglio Nazionale delle Ricerche (CNR)

Subjects
Materials science, Superlattices, multilayers, Analytical chemistry, [ PHYS.COND.CM-MS ] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], FOS: Physical sciences, 02 engineering and technology, Surface finish, 01 natural sciences, x-ray reflection, molybdenum, 0103 physical sciences, x-ray emission, Materials Chemistry, x-ray scattering, Emission spectrum, ComputingMilieux_MISCELLANEOUS, roughness, 010302 applied physics, Condensed Matter - Materials Science, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], multilayer, Materials Science (cond-mat.mtrl-sci), silicon, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Reflectivity, optics, Surfaces, Coatings and Films, Amorphous solid, X-ray reflectivity, Crystallography, Wavelength, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Crystallite, 0210 nano-technology, Refractive index, Crystalline-amorphous interfaces
Abstract

International audience; A set of Mo/Si periodic multilayers is studied by non destructive analysis methods. The thickness of the Si layers is 5 nm while the thickness of the Mo layers changes from one multilayer to another, from 2 to 4 nm. This enables us to probe the effect of the transition between the amorphous to crystalline state of the Mo layers near the interfaces with Si on the optical performances of the multilayers. This transition results in the variation of the refractive index (density variation) of the Mo layers, as observed by x-ray reflectivity (XRR) at a wavelength of 0.154 nm. Combining x-ray emission spectroscopy and XRR, the parameters (composition, thickness and roughness) of the interfacial layers formed by the interaction between the Mo and Si layers are determined. However, these parameters do not evolve significantly as a function of the Mo thickness. It is observed by diffuse scattering at 1.33 nm that the lateral correlation length of the roughness strongly decreases when the Mo thickness goes from 2 to 3 nm. This is due to the development of Mo crystallites parallel to the multilayer surface.

Published
2008
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36. Inter-diffusion effects in as-deposited Al/Ni polycrystalline multi-layers

Author

B. Rouvellou, K. Le Guen, Philippe Jonnard, J. Ben Youssef, M. Salou, G. Gamblin, D. T. Dekadjevi, Stéphane Rioual, S. P. Pogossian, Laboratoire de magnétisme de Bretagne (LMB), Université de Brest (UBO)-Institut Brestois du Numérique et des Mathématiques (IBNM), Université de Brest (UBO)-Centre National de la Recherche Scientifique (CNRS), Polytech'Paris-UPMC, Université Pierre et Marie Curie - Paris 6 (UPMC), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), and Ben Youssef, Jamal

Subjects
Materials science, Analytical chemistry, 02 engineering and technology, 01 natural sciences, [PHYS] Physics [physics], X-ray photoelectron spectroscopy, Sputtering, 0103 physical sciences, Materials Chemistry, Diffusion (business), [PHYS.COND]Physics [physics]/Condensed Matter [cond-mat], ComputingMilieux_MISCELLANEOUS, 010302 applied physics, [PHYS]Physics [physics], Surfaces and Interfaces, General Chemistry, Sputter deposition, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Surfaces, Coatings and Films, Atomic diffusion, Crystallite, 0210 nano-technology, Aluminide, [PHYS.COND] Physics [physics]/Condensed Matter [cond-mat], Stoichiometry
Abstract

Al/Ni multi-layers, deposited by magnetron sputtering at room temperature have been studied by complementary techniques; XPS, sputter depth profiling, electron-induced X-ray emission spectroscopy (XES) and X-ray diffraction (XRD). XPS depth profile technique evidenced an atomic diffusion dominated by Ni atoms. Moreover, the Ni diffusion results in the formation of an amorphous phase with a stoichiometry close to the Al3Ni aluminide. Copyright © 2008 John Wiley & Sons, Ltd.

Published
2008

37. X-ray spectroscopic application of Cr/Sc periodic multilayers

Author

Marie-Françoise Ravet-Krill, Philippe Jonnard, F. Delmotte, K. Le Guen, A. Hardouin, Hélène Maury, J.-M. André, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Charles Fabry de l'Institut d'Optique ( LCFIO ), Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ), and Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)

Subjects
Water window, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, Microscope, [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], Physics and Astronomy (miscellaneous), Spectrometer, X-ray, Analytical chemistry, chemistry.chemical_element, Physics::Optics, 02 engineering and technology, 021001 nanoscience & nanotechnology, Mass spectrometry, 01 natural sciences, law.invention, 010309 optics, Wavelength, Chemical state, chemistry, law, 0103 physical sciences, Scandium, 0210 nano-technology
Abstract

International audience; The use of Cr/Sc multilayer interferential mirrors (MIMs) in optical systems such as x-ray microscopes or telescopes have been reported for the water window (between C K- and O K-absorption edges). However, their possibilities in spectroscopic application have never been described in the literature. The purpose of the paper is to report for the first time on the performances of Cr/Sc MIMs as Bragg dispersive devices for the analysis in wavelength dispersive spectrometry of samples containing N or Sc atoms. The possibility to distinguish the chemical state of the emitting N or Sc atoms is evidenced by using Johan-type and double-crystal spectrometers.

Published
2007
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39. H2S ultrafast dissociation probed by energy-selected resonant Auger electron–ion coincidence measurements

Author

Olle Björneholm, Mario Simon, N. Leclercq, K. Le Guen, Stacey Ristinmaa Sörensen, Catalin Miron, R. Guillemin, Denis Céolin, A. Naves de Brito, Pascal Morin, Alexandra Mocellin, Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS), Institute of Physics, Universidade de Brasilia [Brasília] (UnB), Department of Physics, Uppsala University, Department of Synchrotron Radiation Research, University of Lund-Czech Academy of Sciences [Prague] (CAS), and Lund University [Lund]-Czech Academy of Sciences [Prague] (CAS)

Subjects
Auger electron spectroscopy, 010304 chemical physics, Auger effect, Chemistry, PACS : 33.80.Eh, 33.80.Gj, Photodissociation, hydrogen compounds, General Physics and Astronomy, photodissociation, 01 natural sciences, Dissociation (chemistry), Ion, Auger, Photoexcitation, [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, symbols.namesake, Fragmentation (mass spectrometry), photoexcitation, 0103 physical sciences, symbols, molecule-photon collisions, Auger electron spectra, Physical and Theoretical Chemistry, Atomic physics, 010306 general physics
Abstract

International audience; We have studied the ultrafast dissociation of the H2S molecule upon S 2p3/26a1 inner-shell excitation by combining high-resolution resonant Auger spectroscopy and energy-selected Auger electron–ion coincidence measurements. Auger final states have been correlated to the different fragmentation pathways (S+, HS+, and H2S+ ions). As an original result, we evidence a three-step mechanism to describe the resonant production of S+: the Auger recombination in the HS* fragment is followed for the A 3 and c 1 states by the S++H fragmentation mechanism.

Published
2007
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40. Experimental and theoretical NEXAFS/XPS study of the room-temperature adsorption of acetonitrile onSi(001)−2×1

Author

Sylvie Rangan, Vita Ilakovac, K. Le Guen, Fausto Sirotti, Fabrice Bournel, Georges Dufour, François Rochet, Stéphane Carniato, S. Kubsky, and Jean-Jacques Gallet

Subjects
Crystallography, X-ray spectroscopy, Materials science, Absorption spectroscopy, Extended X-ray absorption fine structure, Chemisorption, Molecule, Density functional theory, Atomic physics, Condensed Matter Physics, XANES, Vicinal, Electronic, Optical and Magnetic Materials
Abstract

Combining synchrotron radiation N $1s$ x-ray photoemission and x-ray absorption spectroscopy to density functional theory calculations of electron transition energies and cross sections performed on silicon clusters, we have re-examined the issue of acetonitrile adsorption on single- and two-domain $\mathrm{Si}(001)\text{\ensuremath{-}}2\ifmmode\times\else\texttimes\fi{}1$ surfaces, taking into consideration the various adsorption models proposed in the recent theoretical works. It is shown that at 300 K and saturation coverage, the molecule is chemisorbed both under nondissociated and dissociated forms. The nondissociative adsorption mode results from a $\mathrm{di}\text{\ensuremath{-}}\ensuremath{\sigma}$ bonding involving the cyano group. The use of a vicinal surface allows us to show that the side-on (a cycloadditionlike product on the Si dimer) is the majority species of $\mathrm{di}\text{\ensuremath{-}}\ensuremath{\sigma}$ type. The datively bonded molecule (end-on) is not observed at 300 K. The molecule also dissociates on the surface, under the form of a cyanomethyl plus a silicon monohydride, a model which has not been so far proposed by theoretical works.

Published
2005
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41. Adsorption of benzonitrile onSi(001)−2×1at 300 K

Author

K. Le Guen, Fausto Sirotti, Fabrice Bournel, Jean-Jacques Gallet, Stéphane Carniato, Vita Ilakovac, Stefan Kubsky, François Rochet, Georges Dufour, and Sylvie Rangan

Subjects
Materials science, Absorption spectroscopy, Extended X-ray absorption fine structure, Photoemission spectroscopy, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Crystallography, Benzonitrile, chemistry.chemical_compound, Adsorption, Chemical bond, chemistry, Chemisorption, Molecule, Atomic physics
Abstract

We have studied the adsorption geometries of benzonitrile (C{sub 6}H{sub 5}-C{identical_to}N) deposited on Si(001)-2x1 at 300 K, using synchrotron radiation x-ray photoemission spectroscopy and x-ray absorption spectroscopy. The experimental data are interpreted through density functional theory calculations of ground and excited states. It is shown that the molecule chemisorbs under multiple forms. While the literature indicated that adsorption is highly selective at 110 K (bonding via the cyano), at 300 K, cyano bonding is observed concomitantly with other geometries for which the molecule interacts with the surface by the phenyl ring. Among the phenyl-bonded species, the cyano group can remain unreacted or can make a dativelike bond with the substrate via its nitrogen end (the latter species is a minority species at surface saturation). Real-time kinetic studies show that all species are present on the surface with the same distribution from the very beginning of the adsorption process.

Published
2005
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42. Dynamic and kinetic aspects of the adsorption of acrylonitrile onSi(001)−2×1

Author

Ulrich Köhler, Fabrice Bournel, Jean-Jacques Gallet, R. Funke, Georges Dufour, Sylvie Rangan, K. Le Guen, M. Kneppe, Fausto Sirotti, G. Piaszenski, François Rochet, and S. Kubsky

Subjects
Physics, X-ray spectroscopy, Crystallography, Chemical bond, Branching fraction, Product (mathematics), Image (category theory), Saturation (graph theory), Atomic physics, Condensed Matter Physics, Kinetic energy, XANES, Electronic, Optical and Magnetic Materials
Abstract

Using scanning tunnelling microscopy (STM), photoelectron and photoabsorption spectroscopies, we have examined how acrylonitrile $({\mathrm{H}}_{2}\mathrm{C}\mathrm{C}\mathrm{H}\text{\ensuremath{-}}\mathrm{C}\mathrm{N})$ reacts with the $\mathrm{Si}(001)\text{\ensuremath{-}}2\ifmmode\times\else\texttimes\fi{}1$ surface for coverages ranging from $\ensuremath{\sim}{10}^{12}\phantom{\rule{0.3em}{0ex}}\text{molecules}∕{\mathrm{cm}}^{2}\phantom{\rule{0.3em}{0ex}}\text{to}\phantom{\rule{0.3em}{0ex}}\ensuremath{\sim}{10}^{14}\phantom{\rule{0.3em}{0ex}}\text{molecules}∕{\mathrm{cm}}^{2}$. At $300\phantom{\rule{0.3em}{0ex}}\mathrm{K}$, in the very low coverage regime (below ${10}^{13}\phantom{\rule{0.3em}{0ex}}\text{molecules}∕{\mathrm{cm}}^{2}$), filled- and empty-state STM images show that the molecule bridges, via its $\ensuremath{\beta}$ carbon and nitrogen ends, two silicon dangling bonds, across the trench separating two dimer rows. A cumulative-double-bond unit $(\mathrm{C}\mathrm{C}\mathrm{N})$ is formed. The $300\phantom{\rule{0.3em}{0ex}}\mathrm{K}$ STM image results from the dynamic flipping of the molecule between two equivalent equilibrium positions, which can be seen when the molecular motion is slowed down at $80\phantom{\rule{0.3em}{0ex}}\mathrm{K}$. For coverages larger than ${10}^{13}\phantom{\rule{0.3em}{0ex}}\text{molecules}∕{\mathrm{cm}}^{2}$, for which STM does not show ordered adsorption any more, the adsorption kinetics were observed in real-time using valence band photoemission and resonant Auger yield, associated with N $1s$ x-ray absorption spectroscopy (NEXAFS). At $300\phantom{\rule{0.3em}{0ex}}\mathrm{K}$, these techniques point to a situation more complex than the one explored by STM at very low coverage. Three species (cyano-bonded, vinyl-bonded, and cumulative-double-bond species) are detected. Their distribution does not vary with increasing coverage. All dimerization-related surface states are quenched at saturation. The uptake rates versus coverage relationship points to the presence of a mobile precursor. Finally, the paper discusses a possible mechanism leading to the formation of cross-trench $\mathrm{C}\mathrm{C}\mathrm{N}$ unit at low coverage, and the reasons why the product branching ratio changes with increasing coverage.

Published
2005
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43. Photofragmentation study of hexamethyldisiloxane following core ionization and direct double ionization

Author

Eiji Shigemasa, P. Millie, R. Guillemin, Pascal Lablanquie, Pascal Morin, Francis Penent, Mario Simon, Denis Céolin, M. Ahmad, C. Miron, K. Le Guen, Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Ultraviolet Synchrotron Orbital Radiation Facility (UVSOR), Institute for Molecular Science, Laboratoire de Chimie Physique D'Orsay (LCPO), Université Paris-Sud - Paris 11 (UP11)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Department of Chemistry, Atomic Energy Commission of Syria, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Hexamethyldisiloxane, Double ionization, General Physics and Astronomy, Photoionization, 010402 general chemistry, 01 natural sciences, Molecular physics, Ion, ENERGY, chemistry.chemical_compound, Fragmentation (mass spectrometry), Ionization, 0103 physical sciences, EXCITATION, Physics::Atomic and Molecular Clusters, SPECTRA, SPECTROMETER, Physics::Atomic Physics, Physical and Theoretical Chemistry, Physics::Chemical Physics, PROBE, Auger electron spectroscopy, SPECTROSCOPY, 010304 chemical physics, Chemistry, DISSOCIATION, 0104 chemical sciences, Dication, [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, RESOLUTION, MOLECULAR-DYNAMICS, Atomic physics
Abstract

X-ray photoelectron spectroscopy and Auger spectroscopy studies of gas-phase hexamethyldisiloxane (HMDSO) are presented. The photodissociation of this molecule is studied using various experimental coincidence techniques. We compare the fragmentation pathways observed after core ionization followed by Auger decay and after valence double photoionization of the molecule. A strongly selective production of the doubly charged tetramethyldisiloxane ion is observed in the low binding-energy regions. Theoretical calculations are carried out to tentatively explain the stability of the produced dication.

Published
2005
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44. Nondipolar Electron Angular Distributions from Fixed-in-Space Molecules

Author

Denis Céolin, Oliver Hemmers, Renaud Guillemin, C. Miron, N. Leclercq, Mario Simon, Eiji Shigemasa, Pascal Morin, P. W. Langhoff, K. Le Guen, Dennis W. Lindle, Department of Chemistry, University of Nevada [Reno], Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics, Photon, PACS: 33.60.Fy, 33.80.Eh, General Physics and Astronomy, Electron, Space (mathematics), 01 natural sciences, 010305 fluids & plasmas, Azimuth, Momentum, [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, Total angular momentum quantum number, 0103 physical sciences, Angular momentum coupling, Molecule, Physics::Atomic Physics, Atomic physics, 010306 general physics
Abstract

4 pages; The first indication of nondipole effects in the azimuthal dependence of photoelectron angular distributions emitted from fixed-in-space molecules is demonstrated in N 2. Comparison of the results with angular distributions observed for randomly oriented molecules and theoretical derivations for the nondipole correction first order in photon momentum suggests that higher orders will be needed to describe distributions measured in the molecular frame.

Published
2002
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45. Dynamical Angular Correlation in Molecular Auger Decay

Author

K. Le Guen, N. Leclercq, Catalin Miron, Renaud Guillemin, E. Shigemasa, D. Ceolin, P. Morin, M. Simon, Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics, 33.80.Eh, Auger effect, General Physics and Astronomy, Sigma, Photoionization, Photon energy, 01 natural sciences, 010305 fluids & plasmas, Auger, [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, symbols.namesake, Ionization, 0103 physical sciences, Physics::Atomic and Molecular Clusters, Perpendicular, symbols, Molecule, Physics::Atomic Physics, Atomic physics, 010306 general physics
Abstract

International audience; The first measurements of the angular distribution of Auger electrons from fixed-in-space molecules have been performed in the C K-shell ionization region of CO, for both parallel and perpendicular orientations of the molecular axis with respect to the light polarization vector. The angular distributions obtained for the CO2+B1Σ Auger final state show dramatic spectral variations, which also depend on the initial ionization channels, Σ or Π, and on the ionization photon energy. This dynamical angular correlation process strongly suggests the breakdown of a two-step model in which the Auger decay is treated independently of the initial photoionization process.

Published
2001
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46. The TPLUS project : a table-top tunable parametric UV radiation source

Author

F. Delmotte, G Turk, Philippe Jonnard, Arnaud Jérôme, A L Coutrot, Jean-Michel André, K. Le Guen, S. de Rossi, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry / Scop, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Charles Fabry ( LCF ), Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
History, Radiation, medicine.disease_cause, Table (information), 01 natural sciences, 010305 fluids & plasmas, Education, Optics, 0103 physical sciences, medicine, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, [ PHYS.PHYS.PHYS-INS-DET ] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Parametric radiation, Electron gun, Parametric statistics, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], EUV source, multilayer, business.industry, tunable source, Computer Science Applications, Extreme ultraviolet, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, [ SPI.OPTI ] Engineering Sciences [physics]/Optics / Photonic, x-ray source, business, Energy (signal processing), Ultraviolet
Abstract

5 pages; International audience; We present the project of a parametric radiation source, the Tunable Parametric Laboratory Ultraviolet Source (TPLUS). We aim at building a prototype of such a source with an electron gun of moderate energy, 100 keV, interacting with a periodic multilayer within a high vacuum experiment chamber. The objective of this table-top facility is to provide users with a cost-effective, simple-handling mean to provide a tunable and intense radiation source in the extreme UV and soft x-ray ranges.

Published
2012
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47. Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers

Author

S.-K. Zhou, Christian Meny, M.-H. Hu, Jean-Michel André, H. Ch. Li, Philippe Jonnard, K. Le Guen, Jingtao Zhu, Anouk Galtayries, Z. S. Wang, Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Institute of Precision Optical Engineering ( IPOE ), Institut de Physique et Chimie des Matériaux de Strasbourg ( IPCMS ), Université de Strasbourg ( UNISTRA ) -Centre National de la Recherche Scientifique ( CNRS ) -Matériaux et nanosciences d'Alsace, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Réseau nanophotonique et optique, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ), Laboratoire de Physico-Chimie des Surfaces ( LPCS ), Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire de Physico-Chimie des Surfaces (LPCS), Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Physics and Astronomy (miscellaneous), Period (periodic table), Optical contrast, Superlattice, Aucun, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, 010309 optics, 0103 physical sciences, Zirconium, multilayer, Magnesium, [CHIM.MATE]Chemical Sciences/Material chemistry, [ PHYS.COND.CM-GEN ] Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 021001 nanoscience & nanotechnology, Reflectivity, Secondary ion mass spectrometry, Crystallography, chemistry, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], [ CHIM.MATE ] Chemical Sciences/Material chemistry, interface, 0210 nano-technology, Cobalt
Abstract

We have developed Mg/Co, Mg/Zr/Co, Mg/Co/Zr, and Mg/Zr/Co/Zr periodic multilayers and measured at 25.1 nm a reflectivity (R) highly sensitive to the material order within the period. To understand why Mg/Co/Zr is a more efficient mirror (R=50%) than Mg/Zr/Co and Mg/Zr/Co/Zr (similar to 40%), we have probed the interface quality through time-of-flight secondary ion mass spectrometry and nuclear magnetic resonance measurements. The Zr-on-Co interface is found quite sharp while a strong intermixing process is evidenced between the upper Co and lower Zr layers, responsible for the decrease in optical contrast and subsequent R loss. (C) 2011 American Institute of Physics. [doi:10.1063/1.3601859]

Published
2011
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48. New setup for angular distribution measurements of Auger electrons from fixed in space molecules

Author

P. Morin, Catalin Miron, Kiyoshi Ueda, K. Le Guen, D. Ceolin, Eiji Shigemasa, Marc Simon, N. Leclercq, and R. Guillemin

Subjects
Physics, Auger electron spectroscopy, symbols.namesake, Auger effect, Ionization, symbols, Electron, Atomic physics, Radiation, Polarization (waves), Instrumentation, Electron spectroscopy, Gas chromatography ion detector
Abstract

A new experimental setup for measurement of the angular distributions of energy selected Auger electrons emitted from fixed in space molecules is presented. The system is based on two identical ion detectors with a small angular acceptance placed at 0° and 90° relative to the polarization axis of the incident radiation, and a high luminosity double-toroidal electron analyzer combined with position sensitive detection. This setup allows selection of the molecular alignment for σ and π ionization channels simultaneously and provides an energy and ejection angle measurement of the outgoing electron. The performance in terms of energy and angular resolution, as well as the calibration procedure, are discussed. Sample results obtained on the carbon monoxide ionized above the C 1s threshold are presented.

Published
2000
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