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Deals with a study which utilized the metalorganic chemical vapor deposition (MOCVD) technique for the epitaxial growth of platinum thin films. Significance of MOCVD to thin film growth; Details on the deposition of thin films; Results of the x-ray diffraction analysis.

Considers the effects of growth parameters and substrate type on the characteristics of the metalorganic chemical vapor deposition-grown barium titanate thin films. Method used to study the surface and the cross-sectional morphology of the films; Surface morphology and microstructure of the thin films; Substrate effect on the thin film growth.

We report on the results of a recent study on the deposition of [100] textured MgO films on fused quartz substrates by using the metalorganic chemical vapor deposition technique. Magnesium β-diketonate was used as the metal source and the growth rate of the film was about 0.4 μm/h at 740 °C in a horizontal warm wall reactor. X-ray diffraction experiments provided evidence that the MgO films on fused quartz were fully textured with [100] orientation perpendicular to the substrate surface. The films had a very smooth surface morphology and optical transparency with an index of refraction of 1.71. [ABSTRACT FROM AUTHOR]

Highly textured single phase superconducting YBa2Cu3O7-x films have been successfully grown on the yttria-stabilized zirconia (100) substrates by using the metalorganic chemical vapor deposition technique. The as-deposited films grown at 650 °C were homogeneous mixtures of the related metal oxides and carbonates. Subsequent thermal annealing under oxygen flow yielded single phase superconducting films whose thickness corresponded to the deposition rates of approximately 10 μm/h. After the post-annealing the films deposited on the yttria-stabilized zirconia substrates exhibited a highly textured x-ray pattern with c axis perpendicular to the substrate surface. These films show an onset superconducting transition temperature of 93 K with the resistance becoming zero at 84 K. [ABSTRACT FROM AUTHOR]

PbTiO3 thin films have been grown successfully for the first time by using purely metalorganic precursors, namely, titanium isopropoxide and tetraethyllead. A scanning electron micrograph showed dense and noncolumnar growth with good surface morphology. Temperature-dependent x-ray diffraction studies provide evidences for a reversible tetragonal to cubic phase transition around 540 °C. At room temperature, the dielectric constant is about 180. [ABSTRACT FROM AUTHOR]

Superconducting Tl2CaBa2Cu2Oy thin films have been successfully grown on the single-crystal sapphire (1102) substrate by using the metalorganic chemical vapor deposition technique. The growth rate of the films was about 5 μm/h. The as-deposited film was post-annealed in a partially sealed ceramic crucible in the presence of a Tl2Ca2Ba2Cu3Oy pellet to achieve the superconducting phase. The x-ray data show strong diffraction from the Tl2CaBa2Cu2Oy superconducting phase in addition to the trace amounts of Ca2CuO3 and BaCO3. Superconducting transition temperatures with onset above 100 K and zero resistance at 94 K can be obtained by further heat treatment at 500 °C in oxygen. [ABSTRACT FROM AUTHOR]