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12 results on '"Malapert, Julien"'

1. Tilted Micro Air Jet for Flow Control

Author

Malapert, Julien, Yahiaoui, Réda, Zeggari, Rabah, and Manceau, Jean-François

Subjects
Physics - Classical Physics, Physics - Fluid Dynamics
Abstract

In this paper, we present an interesting method to microfabricate a tilted micro air jet generator. We used the well-know deep reactive ion etching (DRIE) technique in order to realize in a silicon substrate a double side etching. For aircraft and cars, micro air jets will take an important place for fluid control. Micro air jets are characterized by their speed, frequency and tilt. Usually, this micro air jets are produced by fluidic microsystems. We presented experimental results about micro tilted air jets. A comparison between finite element method simulation, theory and experimental results are performed to define the microsystem geometry leading a specific air jet angle.

Published
2009

4. CMOS Post-Processing of Ciliary Motion Actuators of UV-patterned Polyimides

Author

Malapert, Julien, Morishita, Satoshi, Ataka, Manabu, Fujita, Hiroyuki, Mita, Yoshio, intelligente Semiconductor Microsystem Laboratory (iSML), The University of Tokyo (UTokyo), Laboratory for Integrated Micro Mechatronics Systems (LIMMS), Centre National de la Recherche Scientifique (CNRS)-The University of Tokyo (UTokyo), Center for Internationnal Research on Micronano Mechatronics (CIRMM), and Malapert, Julien

Subjects
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, CMOS, conveyor, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, bimorph, actuator, Polyimide
Abstract

International audience; The fabrication of a ciliary motion system (CMS) has been successfully achieved using photosensitive polyimides patterned by a direct UV lithography technique. The characteristics of the device are equivalent to those of the previous devices made by classical methods, including plasma ashing. Process of micro-fabrication has also been enhanced.

Published
2012

5. Micro- Actionneurs Fluidiques Distribués

Author

Zeggari, Rabah, Yahiaoui, Réda, Malapert, Julien, Manceau, Jean-Francois, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and ANR-06-ROBO-0009,Smart Surface,Smart Surface based on autonomous distributed microrobotic systems for robust and adaptive micromanipulation(2006)

Subjects
[SPI.FLUID]Engineering Sciences [physics]/Reactive fluid environment, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Published
2009

6. Design and realization of silicon cantilever beams in micro actuator for boundary layer control

Author

Malapert, Julien, Yahiaoui, Réda, Addouche, Mahmoud, Renaud Frutos, Jean, Renaud Coudevylle, Jean, Thèvenet, Julien, François Manceau, Jean, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and ANR-06-ROBO-0009,Smart Surface,Smart Surface based on autonomous distributed microrobotic systems for robust and adaptive micromanipulation(2006)

Subjects
MEMS, micro-fluidic, boundary layer, electrostatic micro-valve, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, flow control
Abstract

International audience; In aeronautic sector, the reattachement of separeted air flows close to aircraft wings can be actively controlled by blowing air jets in the boundary layer, through submillimetric holes situated on airplane wings near the seperation edges. Performance improvement of next generation planes (lift enhancement, drag reduction) pushes plane designers to investigate MEMS solutions in order to provide active air flow control. This paper presents realization of silicon cantilever beams by Deep Reactive Ion Etching (DRIE) in order to reach high aspect ratio. These cantilever beams take place in the design and realization of a micro-valve which will provide high speed pulsated air jets for boundary layer control.

Published
2007

7. Conception et réalisation d'un micro-actionneur électrostatique pour le contrôle de la couche limite

Author

Malapert, Julien, Yahiaoui, Réda, Addouche, Mahmoud, Manceau, Jean-François, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and AEROMEMS II

Subjects
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2007

8. Design and realization of a Microsystem for boundary layer control

Author

Malapert, Julien, Yahiaoui, Réda, Addouche, Mahmoud, Bennès, Jonathan, Renaud Frutos, Jean, Renaud Coudevylle, Jean, Thèvenet, Julien, Euphrasie, Sebastien, François Manceau, Jean, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
MEMS, Microfluidic, boundary layer, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, electrostatic microvalve, flow control, microelectronic
Abstract

International audience; Aeraulic flow control constitutes an important stake in the transport sector and especially in aeronautics. It allows a consequent energetic savings. Fluidic Microsystems are the perfect candidates to decrease the fuel consumption and sound pollution. These microsystems are intended to act on aircraft aerodynamic performances by controlling the trailing air-flows of aircraft flaps on the boundary layer. This work presents the design and the manufacture of an electrostatic micro-valve. The purpose of this device is shift the boundary layer separation point by transferring momentum energy via high speed pulse micro air jets. The device is based on a pair of rigid electrodes and a S-shaped flexible ribbon. It can provide local high electrostatic forces required to control rather large pressures. This kind of micro-actuators is called “Zip” actuators. It can act efficiently on the boundary layer control by modulating pressures. We will present finite elements simulations with the software Ansys They validate the dimensioning of our prototype and show that it can control pressures up to 1 bar upstream a 45° skew, 400 μm diameter orifice. For this maximum pressure, the corresponding velocity is close to 170 m/s. We will also present the clean-room process we developed to manufacture this micro-valve.

Published
2006

9. Handling and detecting droplets for Lab-on-Chip with Surface Acoustic Wave (SAW)

Author

Bennès, Jonathan, Malapert, Julien, Yahaoui, Réda, Cherioux, Frederic, Ballandras, Sylvain, Manceau, Jean-François, Bastien, Francois, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [CHIM.ORGA]Chemical Sciences/Organic chemistry, [PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph]
Published
2006

10. Conception et réalisation d'un micro-système pour le contrôle de couche limite

Author

Malapert, Julien, Yahiaoui, Réda, Coudevylle, J.-R., Thèvenet, Julien, Manceau, Jean-Francois, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and AEROMEMS II

Subjects
[SPI.FLUID]Engineering Sciences [physics]/Reactive fluid environment, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Published
2006

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