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The relationship between sensitivity and other factors in the sense circuit of a single transistor MOS RAM has been investigated by computer simulation. An expression for sensitivity of the sense circuit has been derived. It suggests key points to increase the sensitivity of the sense circuit. A new sense circuit that defects a signal less than /spl plusmn/30 mV and has low power capability 50 /spl mu/W/circuit is realized by following the suggestions. The high performance of the proposed sense circuit has been verified through the fabrication of a 1K MOS RAM. Fine pattern technology, such as 2-/spl mu/m minimum pattern width and spacing and 500-/spl Aring/ gate oxide thickness, has been adopted. The threshold voltage of the MOS transistor is 0.8 V and dc supplies are 7 V and /spl plusmn/2 V. This 1K RAM has characteristics of 80-ns access time, 150-ns cycle time, and 30-mW power dissipation.

A novel fusible-link 4 kbit MOS programmable read-only memory (PROM) has been developed with n-channel silicon-gate technology. The programmable element is a poly-Si resistor which makes an irreversible resistivity transition. A low programming voltage of 10 V and a small programming current on 4 mA ius obtained by optimizing the undoped polycrystalline silicon (poly-Si) deposition conditions and reducing the electrode area of a poly-Si resistor. The fabrication is compatible with conventional silicon-gate processing. New clock generator and clamping circuits result in low-voltage and high-speed programming. High-speed reading is achieved by adopting a dual X-line layout. The fabricated 4 kbit PROM can be programmed within 5 /spl mu/s by applying a voltage of less than 14 V. Measured access time is less than 130 ns and active power dissipation is 125 mW at 300 ns cycle time with a single 5 V supply.

A low power read-only memory (128K EB-ROM) has been developed using direct electron-beam data writing and 2 /spl mu/m VLSI fabrication technology. Programming of information in the ROM is accomplished by selective use of a field oxide in place of a thin gate oxide. The memory cell array is divided into eight current discharge (CD) units. Only one of the eight CD units, which contains a selected cell, is activated by the 3-bit extra decoder. The large capacitance enlarged by the Miller effect is markedly reduced. Moreover, the total capacitance to be precharged is also reduced. High performance output buffer circuitry is adopted, which has a high logic threshold voltage. As a result, the fabricated 128K EB-ROM is capable of 65 mW power dissipation under 400 ns cycle time and 5 V DC supply voltage conditions and 200 ns access time. Memory cell and chip dimensions are 8 /spl mu/m/spl times/7.75/spl mu/m and 3.75 mm/spl times/5.5 mm, respectively.

A 64-kbit dynamic MOS RAM is developed by using 2 /spl mu/m rule VLSI fabrication technology and low power circuit technology. The 2 /spl mu/m rule VLSI fabrication technology is achieved by improving various aspects of the ultraviolet photolithographic, thin-gate oxidation, arsenic ion implantation, and multilevel interconnection processes. Microminiaturization of the device structure has made the voltage requirements for its MOST threshold voltage and DC supply voltages low. A highly sensitive and low power dissipating sense circuit has been developed for the VLSI RAM. A new level-detecting circuit with a logic threshold which is independent of MOST threshold voltage is proposed. A dynamic address-buffer circuit is also shown. The fabricated 64K RAM has 200 ns of access time, 370 ns of minimum cycle time, and 150 mW of power dissipation under typical supply voltage conditions of V/SUB DD/=7 V and V/SUB BB/=-2 V.

Describes a high speed 16K molybdenum gate (Mo-gate) dynamic MOS RAM using a single transistor cell. New circuit technologies, including a capacitive-coupled sense-refresh amplifier and a dummy sense circuit, enable the achievement of high speed performance in combination with reduced propagation delay in the molybdenum word line due to the low resistivity. The n-channel Mo-gate process was established by developing an evaporation apparatus and by an improved heat treatment to reduce surface charge density. Ultraviolet photolithography for 2 /spl mu/m patterns and HCl oxidation for 400 /spl Aring/ thick gate oxide are used. The 16K word/spl times/1 bit device is fabricated on a 3.2 mm/spl times/4.0 mm chip. Cell size is 16 /spl mu/m/spl times/16 /spl mu/m Access time is less than 65 ns at V/SUB DD/=7 V and V/SUB BB/=-2 V. Power dissipation is 210 mW at 170 ns read-modify-write (RMW) cycle.

Describes a 256K molybdenum-polysilicon (Mo-poly) gate dynamic MOS RAM using a single transistor cell. Circuit technologies, including a capacitive-coupled sense-refresh amplifier and a redundant circuitry, enable the achievement of high performance in combination with Mo-poly technology. Electron-beam direct writing and dry etching technologies are fully utilized to make 1 /spl mu/m accurate patterns. The 256K word/spl times/1 bit device is fabricated on a 5.83 mm/spl times/5.90 mm chip. Cell size is 8.05 /spl mu/m/spl times/8.60 /spl mu/m. The additional 4K spare cells and the associated circuits, in which newly developed electrically programmable elements are used, occupy less than 10 percent of the whole chip area. The measured access time is 160 ns under V/SUB DD/=5 V condition.

A multiple word/bit line redundancy technique introduced into a fault-tolerant 256K MOS RAM is described. The address of the defective lines are stored in spare decoders and defective lines are replaced by redundant lines. New electrically programmable elements are used in these spare decoders. Yield improvement as a result of the implementation of the redundant lines is discussed, and a detailed description of the redundancy circuit design is given. The redundancy occupies less than 10 percent of the whole chip area of the 256K MOS RAM. The good (defect-free) chip functions without any degradation of speed and power caused by the redundancy, while the power consumption and access time increases in the repaired chip are 10 and 25 percent, respectively.