32 results on '"Bhuiyan, A. F. M. Anhar Uddin"'
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2. MOCVD growth of (010) β-(AlxGa1−x)2O3 thin films
- Author
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Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Meng, Lingyu, and Zhao, Hongping
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- 2021
- Full Text
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3. Tutorial: Metalorganic chemical vapor deposition of β-Ga2O3 thin films, alloys, and heterostructures.
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Bhuiyan, A. F. M. Anhar Uddin, Feng, Zixuan, Meng, Lingyu, and Zhao, Hongping
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THIN film deposition , *CHEMICAL vapor deposition , *THIN films , *GALLIUM alloys , *HETEROSTRUCTURES , *CRYSTAL orientation - Abstract
β-phase gallium oxide (Ga2O3) is an emerging ultrawide bandgap (UWBG) semiconductor with a bandgap energy of ∼ 4.8 eV and a predicted high critical electric field strength of ∼8 MV/cm, enabling promising applications in next generation high power electronics and deep ultraviolet optoelectronics. The advantages of Ga2O3 also stem from its availability of single crystal bulk native substrates synthesized from melt, and its well-controllable n-type doping from both bulk growth and thin film epitaxy. Among several thin film growth methods, metalorganic chemical vapor deposition (MOCVD) has been demonstrated as an enabling technology for developing high-quality epitaxy of Ga2O3 thin films, (AlxGa1−x)2O3 alloys, and heterostructures along various crystal orientations and with different phases. This tutorial summarizes the recent progresses in the epitaxial growth of β-Ga2O3 thin films via different growth methods, with a focus on the growth of Ga2O3 and its compositional alloys by MOCVD. The challenges for the epitaxial development of β-Ga2O3 are discussed, along with the opportunities of future works to enhance the state-of-the-art device performance based on this emerging UWBG semiconductor material system. [ABSTRACT FROM AUTHOR]
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- 2023
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4. In situ MOCVD growth and band offsets of Al2O3 dielectric on β-Ga2O3 and β-(AlxGa1−x)2O3 thin films.
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Bhuiyan, A F M Anhar Uddin, Meng, Lingyu, Huang, Hsien-Lien, Hwang, Jinwoo, and Zhao, Hongping
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INDIUM gallium zinc oxide , *THIN films , *SCANNING transmission electron microscopy , *DIELECTRIC films , *ALUMINUM oxide , *X-ray photoelectron spectroscopy , *CHEMICAL vapor deposition , *DIELECTRIC devices - Abstract
The in situ metalorganic chemical vapor deposition (MOCVD) growth of Al2O3 dielectrics on β-Ga2O3 and β-(AlxGa1−x)2O3 films is investigated as a function of crystal orientations and Al compositions of β-(AlxGa1−x)2O3 films. The interface and film qualities of Al2O3 dielectrics are evaluated by high-resolution x-ray diffraction and scanning transmission electron microscopy imaging, which indicate the growth of high-quality amorphous Al2O3 dielectrics with abrupt interfaces on (010), (100), and ( 2 ¯ 01) oriented β-(AlxGa1−x)2O3 films. The surface stoichiometries of Al2O3 deposited on all orientations of β-(AlxGa1−x)2O3 are found to be well maintained with a bandgap energy of 6.91 eV as evaluated by high-resolution x-ray photoelectron spectroscopy, which is consistent with the atomic layer deposited (ALD) Al2O3 dielectrics. The evolution of band offsets at both in situ MOCVD and ex situ ALD deposited Al2O3/β-(AlxGa1−x)2O3 is determined as a function of Al composition, indicating the influence of the deposition method, orientation, and Al composition of β-(AlxGa1−x)2O3 films on resulting band alignments. Type II band alignments are determined at the MOCVD grown Al2O3/β-(AlxGa1−x)2O3 interfaces for the (010) and (100) orientations, whereas type I band alignments with relatively low conduction band offsets are observed along the ( 2 ¯ 01) orientation. The results from this study on MOCVD growth and band offsets of amorphous Al2O3 deposited on differently oriented β-Ga2O3 and β-(AlxGa1−x)2O3 films will potentially contribute to the design and fabrication of future high-performance β-Ga2O3 and β-(AlxGa1−x)2O3 based transistors using MOCVD in situ deposited Al2O3 as a gate dielectric. [ABSTRACT FROM AUTHOR]
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- 2022
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5. Al Incorporation up to 99% in Metalorganic Chemical Vapor Deposition‐Grown Monoclinic (AlxGa1–x)2O3 Films Using Trimethylgallium.
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Bhuiyan, A F M Anhar Uddin, Meng, Lingyu, Huang, Hsien-Lien, Chae, Christopher, Hwang, Jinwoo, and Zhao, Hongping
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SCANNING transmission electron microscopy , *CHEMICAL vapor deposition , *THIN films , *X-ray diffraction - Abstract
Growths of monoclinic (AlxGa1−x)2O3 thin films up to 99% Al contents are demonstrated via metalorganic chemical vapor deposition (MOCVD) using trimethylgallium (TMGa) as the Ga precursor. The utilization of TMGa, rather than triethylgallium, enables a significant improvement of the growth rates (>2.5 μm h−1) of β‐(AlxGa1−x)2O3 thin films on (010), (100), and (2¯01) β‐Ga2O3 substrates. By systematically tuning the precursor molar flow rates, growth of coherently strained phase pure β‐(AlxGa1−x)2O3 films is demonstrated by comprehensive material characterizations via high‐resolution X‐ray diffraction (XRD) and atomic‐resolution scanning transmission electron microscopy (STEM) imaging. Monoclinic (AlxGa1−x)2O3 films with Al contents up to 99, 29, and 16% are achieved on (100), (010), and (2¯01) β‐Ga2O3 substrates, respectively. Beyond 29% of Al incorporation, the (010) (AlxGa1−x)2O3 films exhibit β‐ to γ‐phase segregation. β‐(AlxGa1−x)2O3 films grown on (2¯01) β‐Ga2O3 show local segregation of Al along (100) plane. Record‐high Al incorporations up to 99% in monoclinic (AlxGa1−x)2O3 grown on (100) Ga2O3 are confirmed from XRD, STEM, electron nanodiffraction, and X‐ray photoelectron spectroscopy measurements. These results indicate great promises of MOCVD development of β‐(AlxGa1−x)2O3 films and heterostructures with high Al content and growth rates using TMGa for next‐generation high‐power and high‐frequency electronic devices. [ABSTRACT FROM AUTHOR]
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- 2023
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6. Electrical characteristics of in situ Mg-doped β-Ga2O3 current-blocking layer for vertical devices.
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Saha, Sudipto, Meng, Lingyu, Bhuiyan, A. F. M. Anhar Uddin, Sharma, Ankit, Saha, Chinmoy Nath, Zhao, Hongping, and Singisetti, Uttam
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CHEMICAL vapor deposition ,MASS spectrometry ,DOPING agents (Chemistry) - Abstract
The lack of p-type doping has impeded the development of vertical gallium oxide (Ga
2 O3 ) devices. Current blocking layers (CBLs) using implanted deep acceptors have been used to demonstrate vertical devices. This paper presents a pioneering demonstration of in situ Mg-doped β-Ga2 O3 CBLs grown using metal–organic chemical vapor deposition. The Mg-doping density during growth was calibrated by quantitative secondary ion mass spectroscopy. Electrical test structures were designed with in situ Mg doped layers with various targeted Mg doping concentrations. The effectiveness of the CBL is characterized by using temperature-dependent current–voltage measurements using n-Mg-doped-n structures, providing crucial insight into the underlying mechanisms. Pulsed measurements show similar blocking characteristics as DC. To further validate the experimental results, a TCAD simulation is performed, and the electrically active effective doping is found to be dependent on the Mg-doping density, offering an alternate perspective on the optimization of CBL performance. Breakdown measurements show a peak 4 MV/cm field strength. [ABSTRACT FROM AUTHOR]- Published
- 2023
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7. Temperature dependent characteristics of β-Ga2O3 FinFETs by MacEtch.
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Ren, Zhongjie, Huang, Hsien-Chih, Lee, Hanwool, Chan, Clarence, Roberts, Henry C., Wu, Xihang, Waseem, Aadil, Bhuiyan, A F M Anhar Uddin, Zhao, Hongping, Zhu, Wenjuan, and Li, Xiuling
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METAL oxide semiconductor field-effect transistors ,FIELD-effect transistors ,DEBYE temperatures ,THRESHOLD voltage ,THERMAL stability ,HIGH temperatures - Abstract
Understanding the thermal stability and degradation mechanism of β-Ga
2 O3 metal-oxide-semiconductor field-effect transistors (MOSFETs) is crucial for their high-power electronics applications. This work examines the high temperature performance of the junctionless lateral β-Ga2 O3 FinFET grown on a native β-Ga2 O3 substrate, fabricated by metal-assisted chemical etching with Al2 O3 gate oxide and Ti/Au gate metal. The thermal exposure effect on threshold voltage (Vth ), subthreshold swing (SS), hysteresis, and specific on-resistance (Ron,sp ), as a function of temperature up to 298 °C, is measured and analyzed. SS and Ron,sp increased with increasing temperatures, similar to the planar MOSFETs, while a more severe negative shift of Vth was observed for the high aspect-ratio FinFETs here. Despite employing a much thicker epilayer (∼2 μm) for the channel, the high temperature performance of Ion /Ioff ratios and SS of the FinFET in this work remains comparable to that of the planar β-Ga2 O3 MOSFETs reported using epilayers ∼10–30× thinner. This work paves the way for further investigation into the stability and promise of β-Ga2 O3 FinFETs compared to their planar counterparts. [ABSTRACT FROM AUTHOR]- Published
- 2023
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8. The role of carbon and C-H neutralization in MOCVD β-Ga2O3 using TMGa as precursor.
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Meng, Lingyu, Bhuiyan, A F M Anhar Uddin, and Zhao, Hongping
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CHEMICAL vapor deposition , *CARRIER density , *MASS spectrometry , *THIN films , *LOW temperatures - Abstract
In this Letter, the role of background carbon in metalorganic chemical vapor deposition (MOCVD) β-Ga2O3 growth using trimethylgallium (TMGa) as the Ga precursor was investigated. The quantitative C and H incorporations in MOCVD β-Ga2O3 thin films grown at different growth rates and temperatures were measured via quantitative secondary ion mass spectroscopy (SIMS). The SIMS results revealed both [C] and [H] increase as the TMGa molar flow rate/growth rate increases or growth temperature decreases. The intentional Si incorporation in MOCVD β-Ga2O3 thin films decreases as the growth rate increases or the growth temperature decreases. For films grown at relatively fast growth rates (GRs) (TMGa > 58 μmol/min, GR > 2.8 μm/h) or relatively low temperature (<950 °C), the [C] increases faster than that of the [H]. The experimental results from this study demonstrate the previously predicted theory—H can effectively passivate the compensation effect of C in n-type β-Ga2O3. The extracted net doping concentration from quantitative SIMS {[Si]-([C]-[H])} agrees well with the free carrier concentration measured from Hall measurement. The revealing of the role of C compensation in MOCVD β-Ga2O3 and the effect of H incorporation will provide guidance on designing material synthesis for targeted device applications. [ABSTRACT FROM AUTHOR]
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- 2023
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9. Scaled β-Ga2O3 thin channel MOSFET with 5.4 MV/cm average breakdown field and near 50 GHz fMAX.
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Saha, Chinmoy Nath, Vaidya, Abhishek, Bhuiyan, A. F. M. Anhar Uddin, Meng, Lingyu, Sharma, Shivam, Zhao, Hongping, and Singisetti, Uttam
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METAL organic chemical vapor deposition ,METAL oxide semiconductor field-effect transistors ,BREAKDOWN voltage ,SILICON nitride ,INDIUM gallium zinc oxide ,LENGTH measurement - Abstract
This Letter reports a high performance β -Ga
2 O3 thin channel MOSFET with T gate and degenerately doped (n++) source/drain contacts regrown by metal organic chemical vapor deposition. Highly scaled T-gate with a gate length of 160–200 nm was fabricated to achieve enhanced RF performance and passivated with 200 nm silicon nitride. Peak drain current (ID,MAX ) of 285 mA/mm and peak transconductance (gm ) of 52 mS/mm were measured at 10 V drain bias with 23.5 Ω mm on resistance (RON ). Metal/n++ contact resistance of 0.078 Ω mm was extracted from transfer length measurements. RON is possibly dominated by interface resistance between channel and highly doped n++ regrown layer. A gate-to-drain breakdown voltage of 192 V is measured for LGD = 355 nm resulting in average breakdown field (EAVG ) of 5.4 MV/cm. This EAVG is the highest reported among all sub-micron gate length lateral FETs. Current gain cut off frequency (fT ) of 11 GHz and record power gain cut off frequency (fMAX ) of approximately 48 GHz were extracted from small signal measurements. fT is limited by DC-RF dispersion due to interface traps which needs further investigation. The fT ·VBR product is 2.112 THz V for 192 V breakdown voltage. Device surpasses the switching figure of merit of Silicon and competitive with mature wide bandgap devices. [ABSTRACT FROM AUTHOR]- Published
- 2023
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10. Vacuum Annealed β -Ga 2 O 3 Recess Channel MOSFETs With 8.56 kV Breakdown Voltage.
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Sharma, Shivam, Meng, Lingyu, Bhuiyan, A. F. M. Anhar Uddin, Feng, Zixuan, Eason, David, Zhao, Hongping, and Singisetti, Uttam
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BREAKDOWN voltage ,METAL oxide semiconductor field-effect transistors ,MOLECULAR beam epitaxy ,CHEMICAL vapor deposition - Abstract
This letter reports vacuum annealing of lateral field-plated $\beta $ -Ga2O3 MOSFETs with significant current recovery and improvement in the on-state resistance, $\text{R}_{\text {on}}$ , after Reactive Ion Etching (RIE) induced damage. We fabricate and characterize MOSFETs based on Molecular Beam Epitaxy (MBE) and Metal-Organic Chemical Vapor Deposition (MOCVD) grown $\beta $ -Ga2O3 wafers to better understand the effects of vacuum annealing. We see a clear trend of vacuum annealed devices showing no reduction in breakdown voltages, $\text{V}_{\text {br}}$ , as compared to polymer passivated MOSFETs. This trend holds for identical gate-drain separation, $\text{L}_{\text {gd}}$ , varying from $20 ~\mu \text{m}$ to $60 ~\mu \text{m}$. Devices show up to 10 times reduction in $\text{R}_{\text {on}}$ as compared to previously reported $\text{R}_{\text {on}}$ for SU-8 passivated devices. For MBE sample, $\text{V}_{\text {br}}$ of 7.16 kV for a $\text{L}_{\text {gd}}$ = $40 ~\mu \text{m}$ device, with an average field strength of 1.79 MVcm $^{{-{1}}}$ and peak drain current density of 40 mA/mm, is reported. $\text{R}_{\text {on}}$ is $897 \Omega $. mm, giving Baliga’s Figure of Merit (BFOM) as 5.71 MWcm $^{{-{2}}}$. For a $\text{L}_{\text {gd}}$ = $60 ~\mu \text{m}$ device, we report record high breakdown of 8.56 kV with BFoM of 4.9 MWcm $^{{-{2}}}$. For MOCVD grown sample, a $\text{L}_{\text {gd}}$ = $60 ~\mu \text{m}$ device has $\text{V}_{\text {br}}$ of 6.11 kV, $\text{R}_{\text {on}}$ of 1.98 $\text{k}\Omega $. mm and corresponding BFoM of 1.88 MWcm $^{{-{2}}}$. Transfer Length Method (TLM) analysis indicates incomplete post etch current recovery after vacuum annealing. [ABSTRACT FROM AUTHOR]
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- 2022
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11. MOCVD growth and band offsets of κ-phase Ga2O3 on c-plane sapphire, GaN- and AlN-on-sapphire, and (100) YSZ substrates.
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Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Huang, Hsien-Lien, Meng, Lingyu, Hwang, Jinwoo, and Zhao, Hongping
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SCANNING transmission electron microscopy ,SAPPHIRES ,THIN films ,X-ray photoelectron spectroscopy ,CHEMICAL vapor deposition ,EPITAXY - Abstract
Epitaxial growth of κ-phase Ga
2 O3 thin films is investigated on c-plane sapphire, GaN- and AlN-on-sapphire, and (100) oriented yttria stabilized zirconia (YSZ) substrates via metalorganic chemical vapor deposition. The structural and surface morphological properties are investigated by comprehensive material characterization. Phase pure κ-Ga2 O3 films are successfully grown on GaN-, AlN-on-sapphire, and YSZ substrates through a systematical tuning of growth parameters including the precursor molar flow rates, chamber pressure, and growth temperature, whereas the growth on c-sapphire substrates leads to a mixture of β- and κ-polymorphs of Ga2 O3 under the investigated growth conditions. The influence of the crystalline structure, surface morphology, and roughness of κ-Ga2 O3 films grown on different substrates are investigated as a function of precursor flow rate. High-resolution scanning transmission electron microscopy imaging of κ-Ga2 O3 films reveals abrupt interfaces between the epitaxial film and the sapphire, GaN, and YSZ substrates. The growth of single crystal orthorhombic κ-Ga2 O3 films is confirmed by analyzing the scanning transmission electron microscopy nanodiffraction pattern. The chemical composition, surface stoichiometry, and bandgap energies of κ-Ga2 O3 thin films grown on different substrates are studied by high-resolution x-ray photoelectron spectroscopy (XPS) measurements. The type-II (staggered) band alignments at three interfaces between κ-Ga2 O3 and c-sapphire, AlN, and YSZ substrates are determined by XPS, with an exception of κ-Ga2 O3 /GaN interface, which shows type-I (straddling) band alignment. [ABSTRACT FROM AUTHOR]- Published
- 2022
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12. Metalorganic chemical vapor deposition of (100) β-Ga2O3 on on-axis Ga2O3 substrates.
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Meng, Lingyu, Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Huang, Hsien-Lien, Hwang, Jinwoo, and Zhao, Hongping
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CHEMICAL vapor deposition ,THIN films ,SCANNING transmission electron microscopy ,ELECTRON mobility ,SURFACE roughness - Abstract
Metalorganic chemical vapor deposition (MOCVD) growths of β-Ga
2 O3 on on-axis (100) Ga2 O3 substrates are comprehensively investigated. Key MOCVD growth parameters including growth temperature, pressure, group VI/III molar flow rate ratio, and carrier gas flow rate are mapped. The dependence of the growth conditions is correlated with surface morphology, growth rate, and electron transport properties of the MOCVD grown (100) β-Ga2 O3 thin films. Lower shroud gas (argon) flow is found to enhance the surface smoothness with higher room temperature (RT) electron Hall mobility. The growth rate of the films decreases but with an increase of electron mobility as the VI/III molar flow rate ratio increases. Although no significant variation on the surface morphologies is observed at different growth temperatures, the general trend of electron Hall mobilities are found to increase with increasing growth temperature. The growth rates reduce significantly with uniform surface morphologies as the chamber pressure increases. By tuning the silane flow rate, the controllable carrier concentration of (100) β-Ga2 O3 thin films between low-1017 cm−3 and low-1018 cm−3 was achieved. Under optimized growth condition, an (100) β-Ga2 O3 thin film with RMS roughness value of 1.64 nm and a RT mobility of 24 cm2 /Vs at a carrier concentration of 7.0 × 1017 cm−3 are demonstrated. The mobilities are primarily limited by the twin lamellae and stacking faults defects generated from the growth interface. Atomic resolution scanning transmission electron microscopy reveals the formation of twin boundary defects in the films, resulting in the degradation of crystalline quality. Results from this work provide fundamental understanding of the MOCVD epitaxy of (100) β-Ga2 O3 on on-axis Ga2 O3 substrates and the dependence of the material properties on growth conditions. The limitation of electron transport properties of the (100) β-Ga2 O3 thin films below 25 cm2 /Vs is attributed to the formation of incoherent boundaries (twin lamellae) and stacking faults grown along the on-axis (100) crystal orientation. [ABSTRACT FROM AUTHOR]- Published
- 2022
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13. Pulsed-Mode MOCVD Growth of ZnSn(Ga)N2 and Determination of the Valence Band Offset with GaN.
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Zhang, Kaitian, Hu, Chenxi, Bhuiyan, A. F. M. Anhar Uddin, Zhu, Menglin, Vangipuram, Vijay Gopal Thirupakuzi, Karim, Md Rezaul, Jayatunga, Benthara Hewage Dinushi, Hwang, Jinwoo, Kash, Kathleen, and Zhao, Hongping
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- 2022
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14. High-Mobility MOCVD β‑Ga2O3 Epitaxy with Fast Growth Rate Using Trimethylgallium.
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Meng, Lingyu, Feng, Zixuan, Bhuiyan, A F M Anhar Uddin, and Zhao, Hongping
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- 2022
- Full Text
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15. MOCVD growth of (010) β-(AlxGa1−x)2O3 thin films.
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Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Meng, Lingyu, and Zhao, Hongping
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- 2021
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16. Band offsets at metalorganic chemical vapor deposited β-(AlxGa1−x)2O3/β-Ga2O3 interfaces—Crystalline orientation dependence.
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Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Huang, Hsien-Lien, Meng, Lingyu, Hwang, Jinwoo, and Zhao, Hongping
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TWO-dimensional electron gas ,CONDUCTION bands ,VALENCE fluctuations ,VALENCE bands ,GALLIUM alloys ,X-ray photoelectron spectroscopy - Abstract
The β-(Al
x Ga1−x )2 O3 alloy represents an emerging ultrawide bandgap semiconductor material for applications in high-power electronics and deep ultraviolet optoelectronics. The recent demonstrations of orientation-dependent epitaxial growth of high quality β-(Alx Ga1−x )2 O3 films have unlocked prospects for the development of ultrahigh frequency β-(Alx Ga1−x )2 O3 /Ga2 O3 based transistors with high-power tolerance. To control the electronic and optical properties of β-(Alx Ga1−x )2 O3 /Ga2 O3 heterostructure-based devices, an understanding of the band offsets between β-(Alx Ga1−x )2 O3 and β-Ga2 O3 is crucial. However, there have been no systematic experimental studies on the evolution of the band offsets between differently oriented β-(Alx Ga1−x )2 O3 /Ga2 O3 heterointerfaces as a function of Al compositions. This work presents the valence and conduction band offsets at (010) and (2 ¯ 01) oriented β-(Alx Ga1−x )2 O3 /Ga2 O3 interfaces using x-ray photoelectron spectroscopy. β-(Alx Ga1−x )2 O3 films with x ≤ 0.35 and x ≤ 0.48 were grown by metalorganic chemical vapor deposition on (010) and (2 ¯ 01) oriented β-Ga2 O3 substrates, respectively. The determined band offsets reveal the formation of a type-II (staggered) band alignment at (010) oriented β-(Alx Ga1−x )2 O3 /Ga2 O3 and a type-I (straddling) heterojunction between (2 ¯ 01) β-(Alx Ga1−x )2 O3 and β-Ga2 O3 . For both crystalline orientations, the valence and conduction band offsets are found to increase with increasing Al content with a much weaker variation in the valence band offsets as compared to the conduction band offsets. Among different orientations investigated, such as (010), (2 ¯ 01) , and (100), the largest conduction band offset occurs at a β-(Alx Ga1−x )2 O3 /Ga2 O3 interface with (100) orientation, providing opportunities for excellent electron confinement with a high-density two-dimensional electron gas. Results from this study on the tunable and orientation-dependent band offsets with the variation of the Al alloy fraction will provide guidance for the design of heterostructures in future β-(Alx Ga1−x )2 O3 /Ga2 O3 based devices. [ABSTRACT FROM AUTHOR]- Published
- 2021
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17. Planar and three-dimensional damage-free etching of β-Ga2O3 using atomic gallium flux.
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Kalarickal, Nidhin Kurian, Fiedler, Andreas, Dhara, Sushovan, Huang, Hsien-Lien, Bhuiyan, A F M Anhar Uddin, Rahman, Mohammad Wahidur, Kim, Taeyoung, Xia, Zhanbo, Eddine, Zane Jamal, Dheenan, Ashok, Brenner, Mark, Zhao, Hongping, Hwang, Jinwoo, and Rajan, Siddharth
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MOLECULAR beam epitaxy ,ETCHING ,GALLIUM nitride films ,GALLIUM ,EPITAXY ,ULTRAHIGH vacuum - Abstract
In situ etching using Ga flux in an ultra-high vacuum environment like molecular beam epitaxy is introduced as a method to make high aspect ratio three-dimensional (3D) structures in β -Ga
2 O3 . Etching of β -Ga2 O3 due to excess Ga adatoms on the epilayer surface had been viewed as non-ideal for epitaxial growth especially since it results in plateauing and lowering of the growth rate. In this study, we use this well-known reaction from epitaxial growth to intentionally etch β -Ga2 O3 . We demonstrate etch rate ranging from 2.9 to 30 nm/min with the highest reported etch rate being only limited by the highest Ga flux used. Patterned in situ etching is also demonstrated and used to study the effect of fin orientation on the sidewall profiles and dopant (Si) segregation on the etched surface. Using in situ Ga etching, we also demonstrate 150 nm wide fins and 200 nm wide nanopillars with high aspect ratio. This etching method could enable future development of highly scaled vertical and lateral 3D devices in β -Ga2 O3 . [ABSTRACT FROM AUTHOR]- Published
- 2021
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18. Metalorganic chemical vapor deposition of α-Ga2O3 and α-(AlxGa1−x)2O3 thin films on m-plane sapphire substrates.
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Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Huang, Hsien-Lien, Meng, Lingyu, Hwang, Jinwoo, and Zhao, Hongping
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CHEMICAL vapor deposition ,THIN films ,SAPPHIRES ,X-ray photoelectron spectroscopy ,VALENCE bands ,CONDUCTION bands ,GALLIUM alloys ,ZINC oxide films - Abstract
Single α-phase (Al
x Ga1−x )2 O3 thin films are grown on m-plane sapphire (α-Al2 O3 ) substrates via metalorganic chemical vapor deposition. By systematically tuning the growth parameters including the precursor molar flow rates, chamber pressure, and growth temperature, the epitaxial growth of high-quality phase pure α-(Alx Ga1−x )2 O3 films (0 ≤ x ≤ 1) is demonstrated with smooth surface morphologies and alloy homogeneities by comprehensive material characterization. The asymmetrical reciprocal space mapping reveals fully relaxed films for α-(Alx Ga1−x )2 O3 films with x ≤ 0.5. The coherent growth of α-(Alx Ga1−x )2 O3 /α-Al2 O3 superlattice structures is demonstrated with abrupt interfaces and uniform Al distribution for higher Al compositions at x = 0.78 in the α-(Alx Ga1−x )2 O3 layer. The influence of growth parameters, such as growth temperature and chamber pressure, on the phase stabilization and Al incorporation in the α-(Alx Ga1−x )2 O3 films is investigated. While lower growth temperatures facilitate the phase stabilization of α-Ga2 O3 thin films, lower chamber pressure leads to higher Al incorporation in α-(Alx Ga1−x )2 O3 films. High resolution x-ray photoelectron spectroscopy was utilized for determining the Al compositions and bandgaps of α-(Alx Ga1−x )2 O3 . Furthermore, the evolution of the valance and conduction band offsets at α-Al2 O3 /α-(Alx Ga1−x )2 O3 heterojunctions is evaluated with the variation of Al compositions, which reveals the formation of type-I (straddling) band alignment between α-Al2 O3 and α-(Alx Ga1−x )2 O3 . [ABSTRACT FROM AUTHOR]- Published
- 2021
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19. Large-size free-standing single-crystal β-Ga2O3 membranes fabricated by hydrogen implantation and lift-off.
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Zheng, Yixiong, Feng, Zixuan, Bhuiyan, A. F. M. Anhar Uddin, Meng, Lingyu, Dhole, Samyak, Jia, Quanxi, Zhao, Hongping, and Seo, Jung-Hun
- Abstract
In this paper, we demonstrated large-size free-standing single-crystal β-Ga
2 O3 NMs fabricated by the hydrogen implantation and lift-off process directly from MOCVD grown β-Ga2 O3 epifilms on native substrates. The optimum implantation conditions were simulated with a Monte-Carlo simulation method to obtain a high hydrogen concentration with a narrow ion distribution at the desired depth. Two as grown β-Ga2 O3 samples with different orientations ([100] and [001]) were used to successfully create 1.2 μm thick β-Ga2 O3 NMs without any physical damage. These β-Ga2 O3 NMs were then transfer-printed onto rigid and flexible substrates such as SiC and polyimide substrates. Various material characterization studies were performed to investigate their crystal quality, surface morphologies, optical properties, mechanical properties, and bandgaps before and after the lift-off and revealed that the good material quality was maintained. This result offers several benefits in that the thickness, doping, and size of β-Ga2 O3 NMs can be fully controlled. Moreover, more advanced β-Ga2 O3 -based NM structures such as (Alx Ga1−x )2 O3 /Ga2 O3 heterostructure NMs can be directly created from their bulk epitaxy substrates; thus this study provides a viable route for the realization of high performance β-Ga2 O3 NM-based electronics and optoelectronics that can be built on various substrates and platforms. [ABSTRACT FROM AUTHOR]- Published
- 2021
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20. Direct observation of site-specific dopant substitution in Si doped (AlxGa1−x)2O3 via atom probe tomography.
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Sarker, Jith, Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Zhao, Hongping, and Mazumder, Baishakhi
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ATOM-probe tomography , *DOPING agents (Chemistry) , *CHEMICAL bond lengths , *DISTRIBUTION (Probability theory) - Abstract
In this work, the interaction of n-type dopants in Si doped (AlxGa1−x)2O3 films with varying Al content over the entire composition range (x = 0%–100%) was analyzed using atom probe tomography. An almost uniform dopant distribution with dopant density in the range of 1018 cm−3 was obtained in (AlxGa1−x)2O3 layers with Al contents, x < 0.60. At x , small Si segregated zones were observed which was attributed to the increased donor-acceptor transition centers or bond length differences in Al–O, Ga–O and Si–O at high Al content. We have demonstrated that for the single phase β-(AlxGa1−x)2O3 films with Al content of x < 0.30, dopants prefer to occupy on Ga sites while Al site is preferred for high Al content (x > 0.50) (AlxGa1−x)2O3 layers. It was also observed for Al content, x = 0.30–0.50, no specific cationic site occupancy was observed, Si occupies either Al or Ga sites. This can be attributed to highly inhomogeneous layers within this Al composition range due to which dopant Si atoms are either in the Al-rich or Al-depleted regions. [ABSTRACT FROM AUTHOR]
- Published
- 2021
- Full Text
- View/download PDF
21. Band offsets of (100) β-(AlxGa1−x)2O3/β-Ga2O3 heterointerfaces grown via MOCVD.
- Author
-
Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Johnson, Jared M., Huang, Hsien-Lien, Hwang, Jinwoo, and Zhao, Hongping
- Subjects
- *
CONDUCTION bands , *VALENCE bands , *X-ray photoelectron spectroscopy , *CHEMICAL vapor deposition , *ATOMIC spectra - Abstract
The valence and conduction band offsets at (100) β-(AlxGa1−x)2O3/β-Ga2O3 heterointerfaces with the increasing Al composition are determined via x-ray photoelectron spectroscopy. The (100) β-(AlxGa1−x)2O3 thin films with the Al composition of 0.10 < x < 0.52 are grown on (100) β-Ga2O3 substrates by the metalorganic chemical vapor deposition method. By examining the onset of inelastic energy loss in core-level atomic spectra, the bandgaps of β-Ga2O3 and β-(AlxGa1−x)2O3 alloys with different Al compositions are measured from 4.83 ± 0.12 eV (x = 0) to 5.85 ± 0.08 eV (x = 0.52). The valence band offsets are determined to be −0.06 ± 0.06 eV (x = 0.10), −0.11 ± 0.06 eV (x = 0.33), and −0.19 ± 0.06 eV (x = 0.52). The conduction band offsets of 0.34 ± 0.17 eV (x = 0.10), 0.62 ± 0.17 eV (x = 0.33), and 1.21 ± 0.16 eV (x = 0.52) are determined from the extracted bandgaps of β-(AlxGa1−x)2O3 alloys. The determined band alignments at β-(AlxGa1−x)2O3/β-Ga2O3 interfaces reveal the formation of type-II (staggered gap) heterojunctions for all Al compositions investigated. The bowing parameters obtained from the quadratic fitting of both conduction band minimum and valence band maximum values are estimated to be 1.25 eV and 0.005 eV, respectively. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
22. Mg acceptor doping in MOCVD (010) β-Ga2O3.
- Author
-
Feng, Zixuan, Bhuiyan, A F M Anhar Uddin, Kalarickal, Nidhin Kurian, Rajan, Siddharth, and Zhao, Hongping
- Subjects
- *
THIN films , *CHEMICAL vapor deposition , *BUFFER layers , *ELECTRIC capacity , *DIFFUSION barriers , *SURFACE morphology - Abstract
In this Letter, in situ Mg doping in β-Ga2O3 was demonstrated via metalorganic chemical vapor deposition (MOCVD) epitaxy. The electrical insulating property of the Mg acceptors in β-Ga2O3 was found to be intrinsically activated in the as-grown Mg-doped β-Ga2O3 thin films. Growth conditions for MOCVD β-Ga2O3 were further explored and optimized at a lower growth temperature regime, leading to a better confinement of the Mg-doping profile. Detailed analysis of Mg diffusion characteristics revealed a diffusion barrier energy Ebarrier ∼ 0.9 eV for Mg in MOCVD β-Ga2O3, which is likely related to an interstitial-assisted process. Surface morphologies and electron transport were characterized on samples grown with different growth temperatures and Mg doping levels. The MOCVD growth method demonstrated its feasibility to grow semi-insulating Mg-doped β-Ga2O3 epilayers with controllable Mg incorporation while maintaining good material quality and smooth surface morphology. From capacitance-voltage charge profiling, it is verified that the Mg-doped buffer layer grown at the substrate-epilayer interface could effectively compensate the charge accumulation at the interface. The in situ acceptor doping of Mg in MOCVD β-Ga2O3 will provide versatility for designing β-Ga2O3 power devices. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
23. Influence of growth temperature on defect states throughout the bandgap of MOCVD-grown β-Ga2O3.
- Author
-
Ghadi, Hemant, McGlone, Joe F., Feng, Zixuan, Bhuiyan, A F M Anhar Uddin, Zhao, Hongping, Arehart, Aaron R., and Ringel, Steven A.
- Subjects
DEEP level transient spectroscopy ,MOLECULAR beam epitaxy ,MASS spectrometry ,TEMPERATURE distribution ,OPTICAL spectroscopy - Abstract
The influence of growth temperature on the distribution (concentrations and energy levels) of individual defect states in metal organic chemical vapor deposition-grown, Si-doped β-Ga
2 O3 is investigated. A combination of deep level thermal transient/optical spectroscopies and admittance spectroscopy (AS) was used to quantitatively monitor the evolution of trap states throughout the ∼4.8 eV bandgap. States are observed at EC -0.12 eV by AS; at EC -0.4 eV by deep level transient spectroscopy; and at EC -1.2 eV, EC -2.0 eV, and EC -4.4 eV by deep level optical spectroscopy, and showed different dependencies on growth temperatures ranging from 800 °C to 920 °C. The EC -0.4 eV and EC -4.4 eV states both displayed a strong reduction in its concentration with increasing growth temperature, whereas no consistent trends were seen for the states at EC -1.2 eV and 2.0 eV over the temperature range studied. In contrast, the concentration of the EC -0.12 eV trap monotonically increased over the same range of increasing growth temperature, which tracked a slight, monotonic increase in overall Si concentration measured by secondary ion mass spectroscopy with growth temperature. The opposing trends in concentrations for some of these states shifted the dominant deep level in the bandgap from the EC -4.4 eV state at the lowest growth temperature explored here to the EC -0.12 eV state at the highest growth temperature. The shifting dominance of various bandgap states can have important ramifications on β-Ga2 O3 device behavior, and the different trends for these deep levels cannot only guide further growth optimization but also advance the identification of their physical sources. [ABSTRACT FROM AUTHOR]- Published
- 2020
- Full Text
- View/download PDF
24. MOCVD growth of β-phase (AlxGa1−x)2O3 on (2¯01) β-Ga2O3 substrates.
- Author
-
Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Johnson, Jared M., Huang, Hsien-Lien, Hwang, Jinwoo, and Zhao, Hongping
- Subjects
- *
METAL organic chemical vapor deposition , *HIGH resolution spectroscopy , *ATOMIC force microscopy , *SCANNING electron microscopy , *THIN films - Abstract
β-(AlxGa1−x)2O3 thin films are grown on ( 2 ¯ 01) β-Ga2O3 substrates via metal organic chemical vapor deposition to investigate the solubility of Al in β-phase Ga2O3. The x-ray diffraction (XRD) spectra reveal crystalline quality ( 2 ¯ 01) β-(AlxGa1−x)2O3 thin films with Al compositions up to 48%. The Al compositions are further confirmed by high resolution x-ray spectroscopy measurements and energy-dispersive x-ray spectra (EDS) mapping. The bandgap energies extracted from XPS spectra range between 5.20 ± 0.06 eV and 5.72 ± 0.08 eV for x = 21%–48%. The surface morphology evaluated by both scanning electron microscopy and atomic force microscopy shows elongated features with granules along the [010] direction, which are suppressed with the increasing Al content. A systematic growth study through tuning growth parameters indicates that the chamber pressure plays an important role in both surface morphology and Al incorporation. Material characterization via high resolution scanning transmission electron microscopy and STEM-EDS reveals Al fluctuations in the sample with the 48% Al composition. Atomic resolution STEM imaging and XRD spectra for ( 2 ¯ 01) β-(AlxGa1−x)2O3/Ga2O3 superlattice structures confirm that the periodicity of the β-(AlxGa1−x)2O3/Ga2O3 sub-layers is well maintained with high-Al compositions. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
25. Probing Charge Transport and Background Doping in Metal‐Organic Chemical Vapor Deposition‐Grown (010) β‐Ga2O3.
- Author
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Feng, Zixuan, Bhuiyan, A F M Anhar Uddin, Xia, Zhanbo, Moore, Wyatt, Chen, Zhaoying, McGlone, Joe F., Daughton, David R., Arehart, Aaron R., Ringel, Steven A., Rajan, Siddharth, and Zhao, Hongping
- Subjects
- *
CHEMICAL vapor deposition , *ELECTRON mobility , *POLLUTION , *SURFACE contamination , *THIN films , *CHARGE transfer - Abstract
A new record‐high room‐temperature electron Hall mobility (μRT = 194 cm2 V−1 s−1 at n ≈ 8 × 1015 cm−3) for β‐Ga2O3 is demonstrated in the unintentionally doped thin film grown on (010) semi‐insulating substrate via metal‐organic chemical vapor deposition (MOCVD). A peak electron mobility of ≈9500 cm2 V−1 s−1 is achieved at 45 K. Further investigation on the transport properties indicates the existence of sheet charges near the epilayer/substrate interface. Si is identified as the primary contributor to the background carrier in both the epilayer and the interface, originating from both surface contamination and growth environment. The pregrowth hydrofluoric acid cleaning of the substrate leads to an obvious decrease in Si impurity both at the interface and in the epilayer. In addition, the effect of the MOCVD growth condition, particularly the chamber pressure, on the Si impurity incorporation is studied. A positive correlation between the background charge concentration and the MOCVD growth pressure is confirmed. It is noteworthy that in a β‐Ga2O3 film with very low bulk charge concentration, even a reduced sheet charge density plays an important role in the charge transport properties. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
26. Probing Charge Transport and Background Doping in Metal‐Organic Chemical Vapor Deposition‐Grown (010) β‐Ga2O3.
- Author
-
Feng, Zixuan, Bhuiyan, A F M Anhar Uddin, Xia, Zhanbo, Moore, Wyatt, Chen, Zhaoying, McGlone, Joe F., Daughton, David R., Arehart, Aaron R., Ringel, Steven A., Rajan, Siddharth, and Zhao, Hongping
- Subjects
CHEMICAL vapor deposition ,ELECTRON mobility ,POLLUTION ,SURFACE contamination ,THIN films ,CHARGE transfer - Abstract
A new record‐high room‐temperature electron Hall mobility (μRT = 194 cm2 V−1 s−1 at n ≈ 8 × 1015 cm−3) for β‐Ga2O3 is demonstrated in the unintentionally doped thin film grown on (010) semi‐insulating substrate via metal‐organic chemical vapor deposition (MOCVD). A peak electron mobility of ≈9500 cm2 V−1 s−1 is achieved at 45 K. Further investigation on the transport properties indicates the existence of sheet charges near the epilayer/substrate interface. Si is identified as the primary contributor to the background carrier in both the epilayer and the interface, originating from both surface contamination and growth environment. The pregrowth hydrofluoric acid cleaning of the substrate leads to an obvious decrease in Si impurity both at the interface and in the epilayer. In addition, the effect of the MOCVD growth condition, particularly the chamber pressure, on the Si impurity incorporation is studied. A positive correlation between the background charge concentration and the MOCVD growth pressure is confirmed. It is noteworthy that in a β‐Ga2O3 film with very low bulk charge concentration, even a reduced sheet charge density plays an important role in the charge transport properties. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
27. A combined approach of atom probe tomography and unsupervised machine learning to understand phase transformation in (AlxGa1-x)2O3.
- Author
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Sarker, Jith, Broderick, Scott, Bhuiyan, A. F. M. Anhar Uddin, Zixuan Feng, Hongping Zhao, and Mazumder, Baishakhi
- Subjects
ATOM-probe tomography ,PHASE transitions ,GALLIUM alloys ,THIN films ,MACHINE learning ,METAL organic chemical vapor deposition - Abstract
In this paper, we investigated the evolution of microstructural chemistry of metal organic chemical vapor deposition grown (010) (AlxGa1x)2O3 films with varying Al contents, x 0.10-1.0, using atom probe tomography (APT). At a low Al content (x 0.25), the films are homogeneous, where layer inhomogeneity appears at a high Al content (x>0.25). Further increasing the Al content up to x 0.60 results in a homogeneous (AlxGa1x)2O3 layer. This change in microstructural features was linked to the phase transformation of (AlxGa1x)2O3 using a manifold learning approach to capture the governing features hidden in the data dimensionality. Combining APT to unsupervised machine learning enables APT to be an independent material characterization tool to investigate the microstructure, chemical composition, and phase related information. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
28. Phase transformation in MOCVD growth of (AlxGa1−x)2O3 thin films.
- Author
-
Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Johnson, Jared M., Huang, Hsien-Lien, Sarker, Jith, Zhu, Menglin, Karim, Md Rezaul, Mazumder, Baishakhi, Hwang, Jinwoo, and Zhao, Hongping
- Subjects
THIN films ,SCANNING transmission electron microscopy ,ATOM-probe tomography ,CHEMICAL vapor deposition ,X-ray spectra - Abstract
This paper investigated the growth of (Al
x Ga1−x )2 O3 thin films on semi-insulating (010) Ga2 O3 substrates over the entire Al composition range (0% < x ≤ 100%) via metalorganic chemical vapor deposition (MOCVD). For the Al composition x < 27%, high quality single phase β-(Alx Ga1−x )2 O3 was achieved. A mixture of β and γ phases existed in (Alx Ga1−x )2 O3 when Al composition ranged between 27% and 40%, whereas a single γ-phase was observed for the films with Al composition x > 40%. The transition from the β to γ phase in AlGaO alloys was observed from x-ray diffraction spectra. The growth of γ-phase AlGaO with higher Al content was further confirmed via atomic resolution scanning transmission electron microscopy imaging and nanodiffraction. Compositional and statistical analyses performed on data acquired from atom probe tomography provided insight on the local compositional homogeneity in AlGaO films with different Al compositions. For AlGaO with pure β or γ phases, the Al composition distribution showed homogeneity with similar Al composition values as extracted from the x-ray diffraction peak positions. For AlGaO films with mixed β and γ phases, inhomogeneity in the Al composition distribution became more obvious in the nm scale. A mechanism was proposed for the observed phase transformation between β and γ phases in MOCVD growth of AlGaO films. [ABSTRACT FROM AUTHOR]- Published
- 2020
- Full Text
- View/download PDF
29. Full bandgap defect state characterization of β-Ga2O3 grown by metal organic chemical vapor deposition.
- Author
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Ghadi, Hemant, McGlone, Joe F., Jackson, Christine M., Farzana, Esmat, Feng, Zixuan, Bhuiyan, A. F. M. Anhar Uddin, Zhao, Hongping, Arehart, Aaron R., and Ringel, Steven A.
- Subjects
METAL organic chemical vapor deposition ,MOLECULAR beam epitaxy ,CHEMICAL vapor deposition ,EPITAXIAL layers ,OPTICAL spectroscopy - Abstract
The results of a detailed investigation of electrically active defects in metal-organic chemical vapor deposition (MOCVD)-grown β-Ga
2 O3 (010) epitaxial layers are described. A combination of deep level optical spectroscopy (DLOS), deep level transient (thermal) spectroscopy (DLTS), and admittance spectroscopy (AS) is used to quantitatively map the energy levels, cross sections, and concentrations of traps across the entire ∼4.8 eV bandgap. States are observed at EC -0.12 eV by AS; at EC -0.4 eV by DLTS; and at EC -1.2 eV, EC -2.0 eV, and EC -4.4 eV by DLOS. While each of these states have been reported for β-Ga2 O3 grown by molecular-beam epitaxy (MBE) and edge-defined film fed grown (EFG), with the exception of the EC -0.4 eV trap, there is both a significantly different distribution in the concentration of these states and an overall ∼10× reduction in the total trap concentration. This reduction is consistent with the high mobility and low background compensating acceptor concentrations that have been reported for MOCVD-grown (010) β-Ga2 O3 . Here, it is observed that the EC -0.12 eV state dominates the overall trap concentration, in marked contrast with prior studies of EFG and MBE material where the state at EC -4.4 eV has dominated the trap spectrum. This sheds light on possible physical sources for this ubiquitous DLOS feature in β-Ga2 O3 . The substantial reduction in trap concentration for MOCVD material implies great promise for future high performance MOCVD-grown β-Ga2 O3 devices. [ABSTRACT FROM AUTHOR]- Published
- 2020
- Full Text
- View/download PDF
30. Scaled β-Ga2O3 thin channel MOSFET with 5.4 MV/cm average breakdown field and near 50 GHz fMAX.
- Author
-
Saha, Chinmoy Nath, Vaidya, Abhishek, Bhuiyan, A. F. M. Anhar Uddin, Meng, Lingyu, Sharma, Shivam, Zhao, Hongping, and Singisetti, Uttam
- Subjects
- *
METAL organic chemical vapor deposition , *METAL oxide semiconductor field-effect transistors , *BREAKDOWN voltage , *SILICON nitride , *INDIUM gallium zinc oxide , *LENGTH measurement - Abstract
This Letter reports a high performance β -Ga2O3 thin channel MOSFET with T gate and degenerately doped (n++) source/drain contacts regrown by metal organic chemical vapor deposition. Highly scaled T-gate with a gate length of 160–200 nm was fabricated to achieve enhanced RF performance and passivated with 200 nm silicon nitride. Peak drain current (ID,MAX) of 285 mA/mm and peak transconductance (gm) of 52 mS/mm were measured at 10 V drain bias with 23.5 Ω mm on resistance (RON). Metal/n++ contact resistance of 0.078 Ω mm was extracted from transfer length measurements. RON is possibly dominated by interface resistance between channel and highly doped n++ regrown layer. A gate-to-drain breakdown voltage of 192 V is measured for LGD = 355 nm resulting in average breakdown field (EAVG) of 5.4 MV/cm. This EAVG is the highest reported among all sub-micron gate length lateral FETs. Current gain cut off frequency (fT) of 11 GHz and record power gain cut off frequency (fMAX) of approximately 48 GHz were extracted from small signal measurements. fT is limited by DC-RF dispersion due to interface traps which needs further investigation. The fT·VBR product is 2.112 THz V for 192 V breakdown voltage. Device surpasses the switching figure of merit of Silicon and competitive with mature wide bandgap devices. [ABSTRACT FROM AUTHOR]
- Published
- 2023
- Full Text
- View/download PDF
31. Response to "Comment on 'Phase transformation in MOCVD growth of (AlxGa1−x)2O3 thin films'" [APL Mater. 8, 089101 (2020)].
- Author
-
Bhuiyan, A F M Anhar Uddin, Feng, Zixuan, Johnson, Jared M., Huang, Hsien-Lien, Sarker, Jith, Zhu, Menglin, Karim, Md Rezaul, Mazumder, Baishakhi, Hwang, Jinwoo, and Zhao, Hongping
- Subjects
THIN films - Published
- 2020
- Full Text
- View/download PDF
32. A combined approach of atom probe tomography and unsupervised machine learning to understand phase transformation in (AlxGa1-x)2O3.
- Author
-
Sarker, Jith, Broderick, Scott, Bhuiyan, A. F. M. Anhar Uddin, Zixuan Feng, Hongping Zhao, and Mazumder, Baishakhi
- Subjects
- *
ATOM-probe tomography , *PHASE transitions , *GALLIUM alloys , *THIN films , *MACHINE learning , *METAL organic chemical vapor deposition - Abstract
In this paper, we investigated the evolution of microstructural chemistry of metal organic chemical vapor deposition grown (010) (AlxGa1x)2O3 films with varying Al contents, x 0.10-1.0, using atom probe tomography (APT). At a low Al content (x 0.25), the films are homogeneous, where layer inhomogeneity appears at a high Al content (x>0.25). Further increasing the Al content up to x 0.60 results in a homogeneous (AlxGa1x)2O3 layer. This change in microstructural features was linked to the phase transformation of (AlxGa1x)2O3 using a manifold learning approach to capture the governing features hidden in the data dimensionality. Combining APT to unsupervised machine learning enables APT to be an independent material characterization tool to investigate the microstructure, chemical composition, and phase related information. [ABSTRACT FROM AUTHOR]
- Published
- 2020
- Full Text
- View/download PDF
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