1. A Three-Dimensional Stacked Fin-CMOS. Technology for High-Density ULSI Circuits.
- Author
-
Xusheng Wu, Chan, Philip C. H., Shengdong Zhang, Chuguang Feng, and Mansun Chan
- Subjects
- *
COMPLEMENTARY metal oxide semiconductors , *DIGITAL electronics , *LOGIC circuits , *SILICON , *NONMETALS , *OXYGEN - Abstract
In this paper, a three-dimensional CMOS technology is proposed and implemented using stacked Fin-CMOS (SF-CMOS) architecture. The technology is based on a double layer silicon-on-insulator wafer formed by two oxygen implants to create two single-crystal silicon films with an oxide isolation layer in between. The proposed approach achieves a 50% area reduction and significant shortening of the wiring distance between active devices through vertical connection when compared with conventional planar CMOS technology. The SF-CMOS technology also inherits the scalability and two-dimensional processing compatibility of the FinFET structure. SF-CMOS devices and simple circuits were fabricated and characterized. [ABSTRACT FROM AUTHOR]
- Published
- 2005
- Full Text
- View/download PDF