1. Quantitative Chemical Mapping of InGaN Quantum Wells from Calibrated High-Angle Annular Dark Field Micrographs
- Author
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Andrés Redondo-Cubero, Christian Wetzel, Kevin P. O'Donnell, Rafael García, Katharina Lorenz, Francisco M. Morales, Paul R. Edwards, Teresa Ben, Daniel R. Carvalho, and Eduardo Alves
- Subjects
Physics ,Chemical imaging ,Nanostructure ,business.industry ,Energy-dispersive X-ray spectroscopy ,Dark field microscopy ,Optics ,Scanning transmission electron microscopy ,Calibration ,Spectroscopy ,business ,Instrumentation ,QC ,Quantum well - Abstract
We present a simple and robust method to acquire quantitative maps of compositional fluctuations in nanostructures from low magnification high-angle annular dark field (HAADF) micrographs calibrated by energy-dispersive X-ray (EDX) spectroscopy in scanning transmission electron microscopy (STEM) mode. We show that a nonuniform background in HAADF-STEM micrographs can be eliminated, to a first approximation, by use of a suitable analytic function. The uncertainty in probe position when collecting an EDX spectrum renders the calibration of HAADF-STEM micrographs indirect, and a statistical approach has been developed to determine the position with confidence. Our analysis procedure, presented in a flowchart to facilitate the successful implementation of the method by users, was applied to discontinuous InGaN/GaN quantum wells in order to obtain quantitative determinations of compositional fluctuations on the nanoscale.
- Published
- 2015
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