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1. Parallel on-chip micropipettes enabling quantitative multiplexed characterization of vesicle mechanics and cell aggregates rheology

Author: Sylvain Landiech, Marianne Elias, Pierre Lapèze, Hajar Ajiyel, Marine Plancke, Blanca González-Bermúdez, Adrian Laborde, Fabien Mesnilgrente, David Bourrier, Debora Berti, Costanza Montis, Laurent Mazenq, Jérémy Baldo, Clément Roux, Morgan Delarue, and Pierre Joseph
Subjects: Biotechnology, TP248.13-248.65, Medical technology, R855-855.5
Abstract: Micropipette aspiration (MPA) is one of the gold standards for quantifying biological samples' mechanical properties, which are crucial from the cell membrane scale to the multicellular tissue. However, relying on the manipulation of individual home-made glass pipettes, MPA suffers from low throughput and no automation. Here, we introduce the sliding insert micropipette aspiration method, which permits parallelization and automation, thanks to the insertion of tubular pipettes, obtained by photolithography, within microfluidic channels. We show its application both at the lipid bilayer level, by probing vesicles to measure membrane bending and stretching moduli, and at the tissue level by quantifying the viscoelasticity of 3D cell aggregates. This approach opens the way to high-throughput, quantitative mechanical testing of many types of biological samples, from vesicles and individual cells to cell aggregates and explants, under dynamic physico-chemical stimuli.
Published: 2024
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2. Multimodal Probe Based on ISFET Electrochemical Microsensors for In-Situ Monitoring of Soil Nutrients in Agriculture

Author: Matthieu Joly, Laurent Mazenq, Maurane Marlet, Pierre Temple-Boyer, Céline Durieu, and Jérôme Launay
Subjects: ISFET sensor, in-situ soil analysis, multisensor probe, ion-selective membrane, nutrients levels determination, agriculture, General Works
Abstract: We report the design of a silicon chip dedicated to the in-situ monitoring of soil nitrogen cycle in wheat crop. Our study shows that ion-sensitive field effect transistor (ISFET) microsensors are suitable for quick on-site or long-term analysis of nutrients measured directly in soil as opposed to soil extracts analysis. Our pH-ISFET recorded soil pH for six months with results in good accordance with standard sampling method and without any loss of sensitivity. The adaptation of pH-ISFET in pNO3 and pNH4-ISFET allowed, for the first time, the in-situ measurements of natural variations of soil nitrogen contents caused by microorganisms’ activity
Published: 2017
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3. Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET

Author: Ahmet Lale, Auriane Grappin, Laurent Mazenq, David Bourrier, Aurélie Lecestre, Jérôme Launay, and Pierre Temple-Boyer
Subjects: ChemFET, finFET, MOSFET, ISFET, silicon nanowire, biosensor, potentiometric sensor, nanosensor, microsensor, pH measurement, microfluidics, gate all-around, General Works
Abstract: We present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N+/P/N+ nanowires as conducting channel, the realization by thermal oxidation and Atomic-Layer Deposition (ALD) of a SiO2/Al2O3 gate insulator all-around the silicon nanowires, and their final integration into covered SU8-based microfluidic channels. The Si-nw-MOSFET/ChemFET fabrication process and electrical/electrochemical characterizations are presented. The fabrication process did not need an expensive and time-consuming e-beam lithography, but only fast and “low cost” standard photolithography protocols. Such microdevice will provide new opportunities for bio-chemical analysis at the micro/nanoscale.
Published: 2017
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4. Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range.

Author: Leopold Mace, Olivier Gauthier-Lafaye, Antoine Monmayrant, Henri Camon, Pascal Dubreuil, Laurent Mazenq, Meihdi Oussalah, Adrien Hervy, Fabien Pradal, and Herve Leplan
Published: 2018
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5. An easy-to-use microfluidic mechano-chemostat for tissues and organisms reveals that confined growth is accompanied with increased macromolecular crowding

Author: Zacchari Ben Meriem, Tiphaine Mateo, Julien Faccini, Céline Denais, Romane Dusfour-Castan, Catherine Guynet, Tatiana Merle, Magali Suzanne, Mickaël Di-Luoffo, Julie Guillermet-Guibert, Baptiste Alric, Sylvain Landiech, Laurent Malaquin, Fabien Mesnilgrente, Adrian Laborde, Laurent Mazenq, Rémi Courson, and Morgan Delarue
Abstract: Conventional culture conditions are oftentimes insufficient to study tissues, organisms, or 3D multicellular assemblies. They lack both dynamic chemical and mechanical control over the microenvironment. While specific microfluidic devices have been developed to address chemical control, they are often hard to use and do not allow the control of compressive forces. Here, we present a set of microfluidic devices which all rely on the use of sliding elements consisting of microfabricated rods that can be inserted inside a microfluidic device. Sliding elements enable the creation of reconfigurable sealed culture chambers for the study of whole organisms or model micro-tissues. By confining the micro-tissues, we studied the biophysical impact of growth-induced pressure and showed that this mechanical stress is associated with an increase in macromolecular crowding, shedding light on this understudied type of mechanical stress. Our mechano-chemostat is an easy-to-use microfluidic device that allows the long-term culture of biological samples and can be used to study both the impact of specific conditions as well as the consequences of mechanical compression.
Published: 2023

6. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding

Author: Dolores Manrique Juarez, Fabrice Mathieu, Guillaume Libaude, David Bourrier, Samuel Charlot, Laurent Mazenq, Véronique Conédéra, Ludovic Salvagnac, Isabelle Dufour, Liviu Nicu, Thierry Leïchlé, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Georgia Tech Lorraine [Metz], Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), IMS-Bordeaux laboratory, and Université de Bordeaux (UB)
Subjects: [SPI]Engineering Sciences [physics]
Abstract: International audience; The present work introduces a simple and rapid process for the fabrication of MEMS resonators with electrostaticactuation and capacitive detection. Gold thermocompression is used to anchor the free-standing structure, provideelectrical connections and seal the chip to protect the structure to be released during wet etching, in a single step. Theadditional advantage of this process is the ability to simply adjust the gap of the parallel-plate capacitor through thethickness of electroplated gold. Squeeze damping is reduced by fabricating devices with increasing gaps.
Published: 2023

7. Ultra-Low-Power Logic with Contactless Capacitive MEMS

Author: Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, Bernard Legrand, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), and ANR-19-CE24-0013,zerOuate,Electronique douce et parahaptique à base de dispositifs électromécaniques en milieu liquide(2019)
Subjects: NEMS, Comb drive, MEMS - Micro Electro Mechanical System, Adiabatic computing, comb-drive actuators, logic states, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Abstract: International audience; We report the simulation, design, fabrication and performance assessment of capacitive MEMS, carrying out contactless electromechanical computing with ultra-low-power consumption. The novel concept is implemented on silicon using on-purpose differential comb-drive actuators. This shift in the paradigm allows near-zero power dissipation by asymptotically suppressing static and dynamic energy losses which are inherently present in current hardware for logic implementation. Furthermore, this novel approach based on capacitive information encoding allows recovery of the invested charges by the power supply asymptotically suppressing dynamic losses and opening the way towards adiabatic operation. At the very least, the contactless operation resolves the reliability issues in existing electromechanical logics based on N/MEMS relays.
Published: 2022

8. Fabrication and characterization of 100-nm wide silicon nanocantilevers using top-down approach.

Author: Samuel Guillon, Daisuke Saya, Laurent Mazenq, Liviu Nicu, Sorin Perisanu, and Pascal Vincent
Published: 2011
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9. H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1

Author: Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-Francois Michaud, Laurent Colin, Daniel Alquier, Dominique Certon, Maria-Dolores Manrique-Juarez, Thierry Leichle, Fabrice Mathieu, Laurent Mazenq, Liviu Nicu, Luan Nguyen, Sebastien Chenot, Marc Portail, and Johan Bertrand
Published: 2022

10. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

Author: Liviu Nicu, Isabelle Dufour, Daniel Alquier, Jean-François Michaud, Maria-Dolores Manrique-Juarez, Thierry Leichle, Luis Iglesias Hernandez, Dominique Certon, Fabrice Mathieu, Laurent Mazenq, Priyadarshini Shanmugam, Laboratoire de l'intégration, du matériau au système (IMS), Université Sciences et Technologies - Bordeaux 1-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS), GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN - UMR 7347), Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Tours (UT)-Centre National de la Recherche Scientifique (CNRS), Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Georgia Tech Lorraine [Metz], Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Sciences et Technologies - Bordeaux 1 (UB)-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS), Université de Tours (UT)-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Tours-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS)
Subjects: Materials science, Hydrogen, resonant frequency, Acoustics, chemistry.chemical_element, quality factor, engineering.material, 01 natural sciences, gas detection, mass density, 010309 optics, Viscosity, Capacitive micromachined ultrasonic transducers, Coating, 0103 physical sciences, Electrical measurements, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Microelectromechanical systems, CMUT, resonant MEMS, Time of flight, chemistry, viscosity, engineering, time of flight, microcantilever, sound velocity I
Abstract: International audience; Principles of gas detection using either resonant microcantilevers or CMUTs without sensitive coating are presented. The different principles which have been tested for hydrogen detection are based on the use of electrical measurements to estimate physical gas properties (mass density, viscosity, sound velocity).
Published: 2020

11. Technological bricks development for the vertical integration of a Modulator onto a VCSEL for high-speed communications

Author: Ludovic Marigo-Lombart, Alexandre Arnoult, Stephane Calvez, Christophe Viallon, Olivier Gauthier-Lafaye, Antoine Monmayrant, Aurélie Lecestre, Laurent Mazenq, Jean Baptiste Doucet, Alexandre Rumeau, Thienpont, H., Panajotov, K., Guilhem Almuneau, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Microondes et Opto-microondes pour Systèmes de Télécommunications (LAAS-MOST), Service Instrumentation Conception Caractérisation (LAAS-I2C), Department of Applied Physics and Photonics [Brussels] (TONA), Vrije Universiteit Brussel (VUB), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract: National audience; The vertical integration of a Modulator onto a mesa-structure VCSEL would allows to go beyond the physical limit of the carrier dynamics for direct modulation. However, this double mesa structure monolithically integrated requires three electrodes and a high frequency injection design optimization. This paper relates the different technological improvements to achieve the static and high frequency operation of such a device.
Published: 2019

12. Electro-Absorption Modulator Vertically Integrated on a VCSEL: Microstrip-Based High-Speed Electrical Injection on Top of a BCB Layer

Author: Aurélie Lecestre, Hugo Thienpont, Christophe Viallon, Ayad Ghannam, Guilhem Almuneau, Ludovic Marigo-Lombart, Alexandre Rumeau, Alexandre Arnoult, Krassimir Panajotov, Laurent Mazenq, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Microondes et Opto-microondes pour Systèmes de Télécommunications (LAAS-MOST), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), 3DiS Technologies, Department of Applied Physics and Photonics [Brussels] (TONA), Vrije Universiteit Brussel (VUB), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Applied Physics and Photonics, and Brussels Photonics Team
Subjects: Materials science, Electro-absorption modulator, 02 engineering and technology, VCSEL, Microstrip, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, chemistry.chemical_compound, 020210 optoelectronics & photonics, Benzocyclobutene, High-speed modulation, high-speed modulation, 0202 electrical engineering, electronic engineering, information engineering, electro-absorption modulator, Output impedance, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, BCB, business.industry, Coplanar waveguide, Atomic and Molecular Physics, and Optics, Electrical contacts, chemistry, Modulation, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, BENZOCYCLOBUTENE, FABRICATION, PASSIVATION, FILMS
Abstract: International audience; Vertical-cavity surface-emitting lasers with vertically integrated electro-absorption modulators (EAM-VCSELs) potentially can reach higher modulation bandwidths than directly current-modulated VCSELs. The aforementioned device modulation capabilities are, however, currently restricted by their electrical contact parasitics. It, thus, becomes critical to optimize their access line to improve performance. In this paper, we numerically and experimentally demonstrate that a microstrip (MS) access line using a planarized benzocyclobutene (BCB) layer exhibits improved high-frequency characteristics compared to the coplanar waveguide (CPW) access line used to-date, since it reduces the losses induced by the doped substrates. We also use this opportunity to introduce an innovative technique for BCB layer planarization, which is not only compatible with the EAM-VCSEL double-mesa structure, but is also independent of the device pitch. The resulting BCB layer dielectric permittivity and losses are measured up to 100 GHz, and a side-by-side comparison of the electrical response of three-electrodes MS and CPW access lines is subsequently carried out. Finally, using the measured pad and access line RF responses and the EAM modulation characteristics, the devices with MS access are shown to be no longer limited by their electrode parasitics, but by the modulator internal impedance.
Published: 2019

13. Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range

Author: Olivier Gauthier-Lafaye, Antoine Monmayrant, Henri Camon, Léopold Macé, Hervé Leplan, Fabien Pradal, Meihdi Oussalah, Laurent Mazenq, Pascal Dubreuil, Adrien Hervy, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), REOSC-safran, Société REOSC-Sagem, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Fabrication, Materials science, business.industry, Bandwidth (signal processing), chemistry.chemical_element, Germanium, 02 engineering and technology, Filter (signal processing), Grating, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, [SPI.ELEC]Engineering Sciences [physics]/Electromagnetism, Semiconductor, Band-pass filter, chemistry, 0103 physical sciences, Broadband, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business
Abstract: International audience; Zero-contrast grating filters (ZCG) car be used to implement efficient bandpass transmission filter with narrow bandwidths of a few nanometers. In a precedent article [1], we have illustrated the validity of the ZCG approach for the mid-IR range using germanium and calcium fluoride, as well as the possibility to increase both the bandwidth and the angular acceptance of such filters by a decade or more using a double corrugation scheme for the grating. However, when it comes to fabricating such devices, conventional semiconductor methods cannot be straightforwardly applied because of the specific requirements of the infrared materials used. Adapting specific methods of the semiconductor industry, we manage to fabricate such devices. A first optical characterization is performed.
Published: 2018

14. Multimodal probe based on ISFET electrochemical microsensors for in-situ monitoring of soil nutrients in agriculture

Author: Pierre Temple-Boyer, Matthieu Joly, Maurane Marlet, Céline Durieu, Laurent Mazenq, Jérôme Launay, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: In situ, nutrients levels determination, Soil nutrients, in-situ soil analysis, Microorganism, lcsh:A, 010501 environmental sciences, Electrochemistry, 01 natural sciences, complex mixtures, Nutrient, Soil pH, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0105 earth and related environmental sciences, agriculture, 2. Zero hunger, 010401 analytical chemistry, ISFET sensor, multisensor probe, ion-selective membrane, 0104 chemical sciences, Environmental chemistry, Silicon chip, Environmental science, lcsh:General Works, ISFET
Abstract: International audience; We report the design of a silicon chip dedicated to the in-situ monitoring of soil nitrogen cycle in wheat crop. Our study shows that ion-sensitive field effect transistor (ISFET) microsensors are suitable for quick on-site or long-term analysis of nutrients measured directly in soil as opposed to soil extracts analysis. Our pH-ISFET recorded soil pH for six months with results in good accordance with standard sampling method and without any loss of sensitivity. The adaptation of pH-ISFET in pNO3 and pNH4-ISFET allowed, for the first time, the in-situ measurements of natural variations of soil nitrogen contents caused by microorganisms' activity
Published: 2017

15. Réalisation d'un filtre étroit dans l'infrarouge thermique en technologie nanophotonique. Rapport final

Author: Ksenia Sharshavina, Philippe Arguel, Pierre-François Calmon, Franck Carcenac, Emmanuelle Daran, Xavier Dollat, Jean-Baptiste Doucet, Pascal Dubreuil, Olivier Gauthier-Lafaye, Aurélie Lecestre, Amandine Lestras, Laurent Mazenq, Antoine Monmayrant, Sylvain Pelloquin, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), CNES, 18 avenue Edouard Belin 31401 Toulouse, Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, ComputingMilieux_MISCELLANEOUS
Abstract: National audience
Published: 2017

16. Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET

Author: Aurélie Lecestre, Pierre Temple-Boyer, Laurent Mazenq, Auriane Grappin, Jérôme Launay, Ahmet Lale, David Bourrier, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: 0209 industrial biotechnology, Materials science, Fabrication, Silicon, potentiometric sensor, microfluidics, Nanowire, chemistry.chemical_element, lcsh:A, Nanotechnology, 02 engineering and technology, biosensor, 01 natural sciences, law.invention, MOSFET, 020901 industrial engineering & automation, microsensor, Nanosensor, law, silicon nanowire, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Thermal oxidation, pH measurement, 010401 analytical chemistry, 0104 chemical sciences, ChemFET, gate all-around, finFET, chemistry, Field-effect transistor, nanosensor, ISFET, lcsh:General Works, Photolithography
Abstract: International audience; We present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N + /P/N + nanowires as conducting channel, the realization by thermal oxidation and Atomic-Layer Deposition (ALD) of a SiO2/Al2O3 gate insulator all-around the silicon nanowires, and their final integration into covered SU8-based microfluidic channels. The Si-nw-MOSFET/ChemFET fabrication process and electrical/electrochemical characterizations are presented. The fabrication process did not need an expensive and time-consuming e-beam lithography, but only fast and " low cost " standard photolithography protocols. Such microdevice will provide new opportunities for biochemical analysis at the micro/nanoscale.
Published: 2017

17. High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration

Author: Fabrice Mathieu, Laurent Mazenq, Adrian Laborde, Cecile Fuinel, Christian Bergaud, Bernard Legrand, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Cantilever, Materials science, business.industry, Electrical engineering, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, Atomic layer deposition, chemistry.chemical_compound, Transducer, Flexural strength, Silicon nitride, chemistry, Optoelectronics, Thin film, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, High-κ dielectric
Abstract: International audience; We show for the first time that a nanometer-scale dielectric thin film can be used as an efficient electromechanical transducer to simultaneously actuate and detect the flexural vibration of micro/nanoresonators. In this study, the first flexural vibrating mode of 16 μm long, and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon nitride layer, and detected close to resonance, at megahertz frequencies. We also measure optically its displacement, and extract and compare the transducer efficiency to an analytical model. This work would be further strengthened by the use of high-K dielectric materials obtained by atomic layer deposition.
Published: 2017

18. All-solid-state multimodal probe based on ISFET electrochemical microsensors for in-situ soil nutrients monitoring in agriculture

Author: Pierre Temple-Boyer, Maurane Marlet, Jérôme Launay, Laurent Mazenq, Céline Durieu, Matthieu Joly, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Agronutrition, Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: 2. Zero hunger, In situ, Soil nutrients, Microorganism, 010401 analytical chemistry, Agriculture, ISFET sensor, In-situ soil analysis, 010501 environmental sciences, Electrochemistry, Multisensor probe, complex mixtures, 01 natural sciences, 0104 chemical sciences, Nutrient, Soil pH, Environmental chemistry, Nutrients levels determination, All solid state, Ion-selective membrane, Environmental science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ISFET, 0105 earth and related environmental sciences
Abstract: International audience; We report the design of a silicon chip dedicated to the in-situ monitoring of soil nitrogen cycle in wheat crop. Our study shows that ion-sensitive field effect transistor (ISFET) microsensors are suitable for quick on-site or long-term analysis of nutrients measured directly in soil as opposed to soil extracts analysis. Our pH-ISFET recorded soil pH for six months with results in good accordance with standard sampling method and without any loss of sensitivity. The adaptation of pH-ISFET in pNO3 and pNH4-ISFET allowed, for the first time, the in-situ measurements of natural variations of soil nitrogen contents caused by microorganisms' activity.
Published: 2017

19. Design, realization and characterization of all-arround SiO2/Al2O3 gate, suspended silicon nanowire chemical field effect transistors

Author: Auriane Grappin, Pierre Temple-Boyer, Ahmet Lale, Aurélie Lecestre, Jérôme Launay, Laurent Mazenq, David Bourrier, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Fabrication, Materials science, Silicon, potentiometric sensor, microfluidics, Nanowire, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, biosensor, 010402 general chemistry, 01 natural sciences, law.invention, MOSFET, microsensor, Nanosensor, law, silicon nanowire, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Thermal oxidation, pH measurement, 021001 nanoscience & nanotechnology, 0104 chemical sciences, gate all-around, ChemFET, finFET, chemistry, Field-effect transistor, nanosensor, ISFET, Photolithography, 0210 nano-technology
Abstract: International audience; We present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N + /P/N + nanowires as conducting channel, the realization by thermal oxidation and Atomic-Layer Deposition (ALD) of a SiO2/Al2O3 gate insulator all-around the silicon nanowires, and their final integration into covered SU8-based microfluidic channels. The Si-nw-MOSFET/ChemFET fabrication process and electrical/electrochemical characterizations are presented. The fabrication process did not need an expensive and time-consuming e-beam lithography, but only fast and "low cost" standard photolithography protocols. Such microdevice will provide new opportunities for biochemical analysis at the micro/nanoscale.
Published: 2017

20. Spin crossover materials for MEMS actuation: Film integration and characterization

Author: Sylvain Rat, Lionel Salmon, Liviu Nicu, Azzedine Bousseksou, Laurent Mazenq, Isabelle Séguy, Gábor Molnár, Thierry Leichle, Maria Dolores Manrique-Juarez, Fabrice Mathieu, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Laboratoire de chimie de coordination (LCC), Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie de Toulouse (ICT-FR 2599), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), and Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
Subjects: Nanoelectromechanical systems, Materials science, Silicon, business.industry, Analytical chemistry, Spin transition, chemistry.chemical_element, Young's modulus, 02 engineering and technology, Structural engineering, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, symbols.namesake, chemistry, Spin crossover, Residual stress, symbols, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Thin film, 0210 nano-technology, business, Elastic modulus
Abstract: International audience; This work describes the integration of molecular spin crossover (SCO) compound [Fe(H2B(pz)2)2(phen)] 1 (H2B(pz)2 = dihydrobis(pyrazolyl)borate, phen = 1,10phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.
Published: 2017

21. Single lithography-step self-aligned fabrication process for Vertical-Cavity Surface-Emitting Lasers

Author: Pascal Dubreuil, Ludovic Marigo-Lombart, Alexandre Arnoult, Guilhem Almuneau, Nicolas Mauran, Hugo Thienpont, Krassimir Panajotov, Laurent Mazenq, Benjamin Reig, Applied Physics and Photonics, Faculty of Engineering, and Brussels Photonics Team
Subjects: Fabrication, Materials science, Passivation, Aperture, Physics::Optics, Photonic devices fabrication, 02 engineering and technology, Photoresist, 01 natural sciences, Vertical-cavity surface-emitting laser, law.invention, Self-aligned processing flow, vcsels, Materials Science(all), law, 0103 physical sciences, Vertical cavity surface emitting lasers, Lift-off process, General Materials Science, Lithography, plasma, 010302 applied physics, business.industry, Mechanical Engineering, 021001 nanoscience & nanotechnology, Laser, Condensed Matter Physics, CHEMICAL-VAPOR-DEPOSITION, Mechanics of Materials, Optoelectronics, Photonics, SILICON-NITRIDE, 0210 nano-technology, business, Low temperature PECVD
Abstract: We demonstrate a self-aligned process to fabricate Vertical-Cavity Surface-Emitting Lasers (VCSEL) which combines, within a single lithographic step the mesa etch, the surface passivation, the opening of the emission window and the top annular metallization. This process flow, based on a double photoresist layer enabling two lift-off steps, offers great advantages such as easy and fast implementation while insuring a perfect alignment between the emitting window, the passivation layer aperture and the metal-ring contact. VCSEL fabrication is drastically simplified and its repeatability improved. Finally, this process can be advantageously applied to other photonic devices such waveguide-ridge lasers, modulators, LED, etc.
Published: 2017

22. Astigmatic multifocus microscopy enables deep 3D super-resolved imaging

Author: Laurent Mazenq, Aline Cerf, Marcelo Nollmann, Pierre-François Calmon, Aurélie Lecestre, Jean-Bernard Fiche, Sara Abrahamsson, Laura Oudjedi, Centre de Biochimie Structurale [Montpellier] (CBS), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Institut National de la Santé et de la Recherche Médicale (INSERM), Rockefeller University [New York], Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Ingénierie pour les sciences du vivant (LAAS-ELIA), Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: 0301 basic medicine, Diffraction, [PHYS]Physics [physics], Materials science, business.industry, Grating, Diffraction efficiency, 01 natural sciences, Atomic and Molecular Physics, and Optics, Article, 010309 optics, 03 medical and health sciences, 030104 developmental biology, Optics, Multifocal plane microscopy, 0103 physical sciences, Microscopy, Depth of field, Adaptive optics, business, Diffraction grating, Biotechnology
Abstract: International audience; We have developed a 3D super-resolution microscopy method that enables deep imaging in cells. This technique relies on the effective combination of multifocus microscopy and astigmatic 3D single-molecule localization microscopy. We describe the optical system and the fabrication process of its key element, the multifocus grating. Then, two strategies for localizing emitters with our imaging method are presented and compared with a previously described deep 3D localization algorithm. Finally, we demonstrate the performance of the method by imaging the nuclear envelope of eukaryotic cells reaching a depth of field of ~4µm.
Published: 2016

23. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS

Author: Olivier Thomas, Bernard Legrand, Adrian Laborde, Cécile Fuinel, Laurent Mazenq, Liviu Nicu, Thierry Leichle, Khadim Daffe, Équipe NanoBioSystèmes (LAAS-NBS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire des Sciences de l'Information et des Systèmes (LSIS), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Arts et Métiers Paristech ENSAM Aix-en-Provence-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), IEEE, Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and Centre National de la Recherche Scientifique (CNRS)-Arts et Métiers Paristech ENSAM Aix-en-Provence-Université de Toulon (UTLN)-Aix Marseille Université (AMU)
Subjects: Nanoelectromechanical systems, Materials science, business.industry, Orders of magnitude (temperature), 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, 7. Clean energy, Atomic layer deposition, chemistry.chemical_compound, Flexural strength, Silicon nitride, chemistry, Electronic engineering, Optoelectronics, Thin film, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, High-κ dielectric
Abstract: International audience; We show that a nanometer-thick high-K material can be used as an electromechanical transducer to actuate the flexural mode of micro/nanoresonators. In this study, a 15 nm silicon nitride layer is employed on top of 320 nm thick silicon beams. The devices, smaller by 2 orders of magnitude than in previous studies, are successfully driven into vibration at resonance frequencies greater than 1 MHz, nanometer amplitudes, and quality factors greater than 2,000 in vacuum. We also deduce the transduction efficiency from a thermomechanical displacement noise calibration. This work paves the way for efficient electromechanical transduction scheme at the nanoscale, which would be further strengthened by the use of high-K dielectric materials obtained by atomic layer deposition.
Published: 2016

24. Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing

Author: Christophe Thibault, Thierry Leichle, Christophe Vieu, A. Bouchier, Denis Dezest, S. Salomon, Laurent Mazenq, S. Guillon, Liviu Nicu, Fabrice Mathieu, Florent Seichepine, Équipe Ingénierie pour les sciences du vivant (LAAS-ELIA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe NanoBioSystèmes (LAAS-NBS), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: 010302 applied physics, Nanoelectromechanical systems, Nanostructure, Cantilever, Materials science, Nanocantilever, Metals and Alloys, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Microcontact printing, 0103 physical sciences, Materials Chemistry, Surface modification, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Electrical and Electronic Engineering, 0210 nano-technology, Instrumentation, Biosensor, Massively parallel
Abstract: International audience; In this paper, we present a back-end method for biofunctionalizing a large-scale array of nanocantilevers. Our method relies on the use of a modified microcontact printing process where molecules are delivered onto the fragile structures from the grooves of the stamp while its base sits on the chip, thus providing mechanical stability. We have used this method to print antibodies onto fabricated chips containing up to 105 nanostructures/cm2and the presence of antibodies was validated by fluorescent microscopy. Furthermore, measurement of the nanocantilever resonant frequency shifts provoked by a mean added mass of ∼140 fg/cantilever demonstrated that the cantilevers retained their mechanical integrity. Hence, the method presented here aims at providing an answer to the biofunctionalization of freestanding nanostructures for their use as biosensors
Published: 2012

25. A multilevel polymer process for direct encapsulation of fluids in microfluidic systems

Author: Anne-Marie Gué, Véronique Conédéra, Jean-Paul Cano, Jérôme Ballet, Laurent Mazenq, Remy Bossuyt, and Henri Camon
Subjects: chemistry.chemical_classification, Materials science, Microfluidics, Nanotechnology, One-Step, Polymer, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Encapsulation (networking), Filling rate, chemistry, Filling ratio, Hardware and Architecture, Electrical and Electronic Engineering, Composite material, Lithography
Abstract: This paper describes a polymer manufacturing technique for the realization of sealed liquid tanks with a high filling ratio. It is based on a lithographic process combined with lamination and can be performed on any type of substrate: Si, glass or polymer films. We demonstrated the encapsulation of solvents or inks in multilevel tanks on large surface area (>118 cm2) without any damage of the stored liquid. This micro-fabrication technology proposes a significant breakthrough for micro-fluidic applications. We propose a one step process for the filling and sealing of tanks which are performed simultaneously. Tanks can be integrated at any level in the micro-fluidic system with a perfect filling rate and an excellent tightness.
Published: 2011

26. PEDOT-modified integrated microelectrodes for the detection of ascorbic acid, dopamine and uric acid

Author: Fadhila Sekli-Belaidi, Pierre Temple-Boyer, Aurélie Civélas, Pierre Gros, Laurent Mazenq, Aliki Tsopela, Jérôme Launay, Valentina Castagnola, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Laboratoire de Génie Chimique (LGC), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Unité de recherche Amélioration, Génétique et Physiologie Forestières (AGPF), Institut National de la Recherche Agronomique (INRA), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse 1 Capitole (UT1), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Équipe NanoBioSystèmes (LAAS-NBS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - INPT (FRANCE), Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Université Toulouse - Jean Jaurès - UT2J (FRANCE), Université Toulouse 1 Capitole - UT1 (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Laboratoire de génie chimique [ancien site de Basso-Cambo] (LGC), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] (LAAS), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UPS), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique [Toulouse] (INP)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UPS), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique [Toulouse] (INP), Institut National Polytechnique [Toulouse] (INP)-Université Toulouse III - Paul Sabatier (UPS), and Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)
Subjects: Working electrode, Dopamine, Inorganic chemistry, chemistry.chemical_element, Electrochemical microcell, chemistry.chemical_compound, [CHIM.GENI]Chemical Sciences/Chemical engineering, PEDOT:PSS, uric acid, [CHIM.ANAL]Chemical Sciences/Analytical chemistry, Materials Chemistry, Génie chimique, [SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, integrated microelectrode, Acetonitrile, Génie des procédés, Instrumentation, PEDOT, Detection limit, Integrated microelectrode, Chemistry, electrochemical microcell, Metals and Alloys, Condensed Matter Physics, Ascorbic acid, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Microelectrode, ascorbic acid, Differential pulse voltammetry, dopamine, Platinum, Uric acid
Abstract: International audience; Integrated (Pt/PEDOT–Pt–Ag/AgCl) and (Au/PEDOT–Pt–Ag/AgCl) electrochemical microcells (ElecCell) were elaborated for the detection of ascorbic acid, dopamine and uric acid by differential pulse voltam-metry. Specific attention was brought to the integration of poly(3,4-ethylenedioxythiophene) (PEDOT) film by electropolymerization. Gold and platinum working microelectrodes were investigated while using ethylenedioxythiophene (EDOT) electrodeposition processes in water or acetonitrile solvents. For the three antioxidant species, best (multi-)detection properties were obtained for acetonitrile-based PEDOT films deposited on gold working electrode. Thus, using integrated (Au/PEDOT–Pt–Ag/AgCl) Elec-Cell microdevices, analytical performances were determined for ascorbic acid, dopamine and uric acid, exhibiting high selectivity (oxidation potential: −40, 150 and 280 mV, respectively), linear concentration range from 0.1 to 300 ␮M, high sensitivities (0.85, 1.65 and 3.06 ␮A/␮M cm 2 , respectively) and low detection limit (0.2 ␮M, 0.1 ␮M and 0.05 ␮M, respectively).
Published: 2015

27. Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays

Author: Pierre Temple-Boyer, Florian Larramendy, Laurent Mazenq, Marie Charline Blatche, Oliver Paul, Adrian Laborde, Department of Microsystems Engineering [Freiburg] (IMTEK), University of Freiburg [Freiburg], Service Instrumentation Conception Caractérisation (LAAS-I2C), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Materials science, Fabrication, Microchannel, Mechanical Engineering, Honeycomb (geometry), Nanotechnology, Electronic, Optical and Magnetic Materials, law.invention, Resist, Mechanics of Materials, law, Etching (microfabrication), Deep reactive-ion etching, Electrical and Electronic Engineering, Photolithography, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Nanopillar
Abstract: International audience; We report on the fabrication, functionalization and testing of SU-8 microstructures for cell culture and positioning over large areas. The microstructure consists of a honeycomb arrangement of cell containers interconnected by microchannels and centered on nanopillar arrays designed for promoting cell positioning. The containers have been dimensioned to trap single cells and, with a height of 50 µm, prevent cells from escaping. The structures are fabricated using a single ultraviolet photolithography exposure with focus depth in the lower part of the SU-8 resist. With optimized process parameters, microchannels of various aspect ratios are thus produced. The cell containers and microchannels serve for the organization of axonal growth between neurons. The roughly 2-µm-high and 500-nm-wide nanopillars are made of silicon oxide structured by deep reactive ion etching. In future work, beyond their cell positioning purpose, the nanopillars could be functionalized as sensors. The proof of concept of the novel microstructure for organized cell culture is given by the successful growth of interconnected PC12 cells. Promoted by the honeycomb geometry, a dense network of interconnections between the cells has formed and the intended intimate contact of cells with the nanopillar arrays was observed by scanning electron microscopy. This proves the potential of these new devices as tools for the controlled cell growth in an interconnected container system with well-defined three-dimensional geometry.
Published: 2015

28. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

Author: Caroline Soyer, Olivier Thomas, Denis Dezest, Liviu Nicu, Laurent Mazenq, Jean-François Deü, Fabrice Mathieu, Jean Costecalde, Denis Remiens, Équipe NanoBioSystèmes (LAAS-NBS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Laboratoire de Mécanique des Structures et des Systèmes Couplés (LMSSC), Conservatoire National des Arts et Métiers [CNAM] (CNAM), HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM), Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques (LSIS- INSM), Université de la Méditerranée - Aix-Marseille 2-Université Paul Cézanne - Aix-Marseille 3-Université de Provence - Aix-Marseille 1-Institut National des Sciences de l'Informatique et ses Interactions-Centre National de la Recherche Scientifique (CNRS), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), ANR/PNANO 2008, project NEMSPIEZO, Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences de l'Informatique et ses Interactions-Université de Provence - Aix-Marseille 1-Université Paul Cézanne - Aix-Marseille 3-Université de la Méditerranée - Aix-Marseille 2
Subjects: matière Condensée: Science des matériaux [Physique], Cantilever, Materials science, Large-scale integration, PZT, Nanotechnology, [SPI.MECA.MSMECA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Materials and structures in mechanics [physics.class-ph], Lead zirconate titanate, [SPI.MAT]Engineering Sciences [physics]/Materials, Mécanique: Vibrations [Sciences de l'ingénieur], NEMS, Resonator, chemistry.chemical_compound, Stack (abstract data type), Wafer, Electrical and Electronic Engineering, Mécanique: Mécanique des structures [Sciences de l'ingénieur], [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Nanoelectromechanical systems, business.industry, Mécanique [Sciences de l'ingénieur], Micro et nanotechnologies/Microélectronique [Sciences de l'ingénieur], Mechanical Engineering, Mécanique: Matériaux et structures en mécanique [Sciences de l'ingénieur], [SPI.MECA.VIBR]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Vibrations [physics.class-ph], Acoustique [Sciences de l'ingénieur], [SPI.MECA]Engineering Sciences [physics]/Mechanics [physics.med-ph], Piezoelectricity, Electronic, Optical and Magnetic Materials, chemistry, Mechanics of Materials, [SPI.MECA.STRU]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Structural mechanics [physics.class-ph], PMUT, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, business
Abstract: In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection. ANR/PNANO 2008, project NEMSPIEZO
Published: 2015

29. Geometry optimization of uncoated silicon microcantilever-based gas density sensors

Author: Isabelle Dufour, Johan Bertrand, Fabrice Mathieu, Thierry Leichle, Laurent Mazenq, Mohand-Tayeb Boudjiet, Liviu Nicu, Stephen M. Heinrich, Claude Pellet, Laboratoire de l'intégration, du matériau au système (IMS), Université Sciences et Technologies - Bordeaux 1 (UB)-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS), Agence Nationale pour la Gestion des Déchets Radioactifs (ANDRA), Service Instrumentation Conception Caractérisation (LAAS-I2C), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Équipe NanoBioSystèmes (LAAS-NBS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Department of Civil, Construction and Environmental Engineering [Milwaukee], Marquette University [Milwaukee], Université Sciences et Technologies - Bordeaux 1-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Materials science, Cantilever, Hydrogen, Silicon, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, Hydrogen sensor, Noise (electronics), sensitivity optimization, Density sensor, Resonator, Phase (matter), Materials Chemistry, Electrical and Electronic Engineering, Composite material, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, hydrogen sensor, 010401 analytical chemistry, Metals and Alloys, Natural frequency, hydrodynamic function, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Euler-Bernoulli beam theory, geometry optimization, 0210 nano-technology, microcantilever
Abstract: International audience; In the absence of coating, the only way to improve the sensitivity of silicon microcantilever-based density sensors is to optimize the device geometry. Based on this idea, several microcantilevers with different shapes (rectangular-, U-and T-shaped microstructures) and dimensions have been fabricated and tested in the presence of hydrogen/ nitrogen mixtures (H 2 /N 2) of various concentrations ranging from 0.2% to 2%. In fact, it is demonstrated that wide and short rectangular cantilevers are more sensitive to gas density changes than U-and T-shaped devices of the same overall dimensions, and that the thickness doesn't affect the sensitivity despite the fact that it affects the resonant frequency. Moreover, because of the phase linearization method used for the natural frequency estimation, detection of a gas mass density change of 2 mg/l has been achieved with all three microstructures. In addition, noise measurements have been used to estimate a limit of detection of 0.11 mg/l for the gas mass density variation (corresponding to a concentration of 100 ppm of H 2 in N 2), which is much smaller than the current state of the art for uncoated mechanical resonators.
Published: 2015

30. Failure predictive model of capacitive RF-MEMS

Author: D. De Conto, J.L. Muraro, J.L. Cazaux, C. Bordas, David Dubuc, Robert Plana, Laurent Bary, S. Melle, B. Poussard, Katia Grenier, Olivier Vendier, and Laurent Mazenq
Subjects: Microelectromechanical systems, Engineering, business.industry, Capacitive sensing, Electrical engineering, Dielectric, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Stress (mechanics), Acceleration, Reliability (semiconductor), Electronic engineering, Figure of merit, Electrical and Electronic Engineering, Safety, Risk, Reliability and Quality, business, Voltage
Abstract: This paper reports on the investigation of the failure mechanism in capacitive RF-MEMS through an efficient analysis methodology. We demonstrate that the physical origin of the dielectric charging is the leakage current through the RF-MEMS dielectric. To monitor the kinetic of this failure phenomenon, we introduce a useful parameter, which corresponds to the shift rate of the actuation voltages (SRAV) and an appropriate reliability-driven electrical stress parameter, which takes the contact quality between the bridge and the dielectric into account. We finally propose a figure of merit, derived from a predictive model, which quantifies the capacitive RF MEMS reliability and open the door to the prediction of lifetime as well as its optimization and/or acceleration for testing.
Published: 2005

31. Micromachined inverted F antenna for integration on low resistivity silicon substrates

Author: F. Bouchriha, Laurent Mazenq, Robert Plana, Erik Öjefors, Katia Grenier, and Anders Rydberg
Subjects: Parabolic antenna, Materials science, Silicon, business.industry, chemistry.chemical_element, Substrate (electronics), Condensed Matter Physics, Surface micromachining, Inverted-F antenna, chemistry, Electrical resistivity and conductivity, Radiator (engine cooling), Electronic engineering, Optoelectronics, Electrical and Electronic Engineering, Antenna (radio), business
Abstract: This letter addresses the integration of a 24-GHz inverted-F antenna on a low resistivity silicon substrate, using micromachining post-processing techniques compatible with commercial Si/SiGe active device processes. By suspending the radiator on a 2.4mm/sup 2/ large polymer membrane an on-chip antenna with -0.7 dBi gain has been realized.
Published: 2005

32. Development of pH-based ElecFET biosensors for lactate ion detection

Author: Jérôme Launay, Pierre Temple-Boyer, Abdou Karim Diallo, William Sant, Laurent Mazenq, Lyas Djeghlaf, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Assane SECK de Ziguinchor (UASZ), HEMODIA SA, Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Conductometry, Transistors, Electronic, Potentiometric titration, Inorganic chemistry, Biomedical Engineering, Biophysics, Analytical chemistry, electrochemical sensor, hydrogen peroxide, Biosensing Techniques, 02 engineering and technology, Electrochemistry, Sensitivity and Specificity, 01 natural sciences, Chemical field-effect transistor, [CHIM.ANAL]Chemical Sciences/Analytical chemistry, Lactic Acid, glucose, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Ions, lactate, Chemistry, 010401 analytical chemistry, Reproducibility of Results, Equipment Design, General Medicine, Hydrogen-Ion Concentration, 021001 nanoscience & nanotechnology, Amperometry, 0104 chemical sciences, Electrochemical gas sensor, microelectrode, Equipment Failure Analysis, Microelectrode, ChemFET, potentiometric detection, Field-effect transistor, 0210 nano-technology, Biosensor, Biotechnology
Abstract: International audience; In this work, we report on ElecFET (Electrochemical Field Effect Transistor) devices potentially of interest for the detection of different molecules in solution. ElecFET are electrochemical microsensors in liquid phase, based on two elements: (i) a pH-sensitive chemical field effect transistor (pH-ChemFET) and (ii) a metallic microelectrode deposited around the sensitive gate. The coexistence of these two elements combines (i) potentiometric and (ii) amperometric detection effects at the microscale. Design, fabrication and experimental validation of ElecFETs based on silicon and polymer micro-technologies, are reported. We first demonstrate the detection of hydrogen peroxide (H2O2) in solution, showing a sensitivity of 5 mV/mM in the [10-100mM] concentration range. The ElecFET concept is then extended to the detection of glucose and lactate in the [1 – 30 mM] and [1 – 6 mM] concentration range respectively. The sensitivities are between 2-6 mV/mM and 8-20 mV/mM respectively.
Published: 2013

33. Optical label free biodetection based on the diffraction of light by nanoscale protein gratings

Author: Christophe Vieu, Emmanuelle Trévisiol, Laurent Mazenq, Vincent Paveau, Amandine M. C. Egea, Équipe NanoBioSystèmes ( LAAS-NBS ), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] ( LAAS ), Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ) -Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ), Service Techniques et Équipements Appliqués à la Microélectronique ( LAAS-TEAM ), Laboratoire d'Ingénierie des Systèmes Biologiques et des Procédés ( LISBP ), Institut National de la Recherche Agronomique ( INRA ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Centre National de la Recherche Scientifique ( CNRS ), Innopsys, Équipe NanoBioSystèmes (LAAS-NBS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'Ingénierie des Systèmes Biologiques et des Procédés (LISBP), Institut National de la Recherche Agronomique (INRA)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Innopsys [Carbonne], Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National de la Recherche Agronomique (INRA), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Centre National de la Recherche Scientifique ( CNRS ) -Université Toulouse III - Paul Sabatier ( UPS ), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Institut National Polytechnique [Toulouse] ( INP ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Toulouse III - Paul Sabatier ( UPS ), and Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Institut National Polytechnique [Toulouse] ( INP )
Subjects: Diffraction, Analyte, Materials science, ADSORPTION, genetic structures, Microcontact printing, [SDV]Life Sciences [q-bio], 02 engineering and technology, Substrate (electronics), Biodetection, Grating, 010402 general chemistry, Diffraction efficiency, 01 natural sciences, IMMUNOASSAY, [SPI]Engineering Sciences [physics], Optics, ASSAY, Electrical and Electronic Engineering, Nanoscopic scale, [ SDV ] Life Sciences [q-bio], business.industry, REAL-TIME, Protein, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Patterning, 0210 nano-technology, business, Refractive index, Label free
Abstract: In this work, we use a label free biosensing technique based on the diffraction of light by molecular gratings. Molecular gratings are employed as diffractive probe arrays for protein interaction analysis. Indeed, the diffraction efficiency changes in response to analyte binding, due to a shift in line thickness and/or refractive index of the grating. In this perspective, we have developed a scanning instrument, capable of collecting at high speed the diffracted intensity emitted by molecular gratings. Nanogratings composed of anti-GST antibodies lines (500 nm width at a pitch of 1 mu m) were immobilized through Microcontact printing on a PLL-g-dextran coated substrate. By monitoring the diffracted intensity of the anti-GST antibodies gratings, we have detected GST molecules at a concentration of 0.1 mu M. This biodetection technique appears sensitive to low molecular weight molecules, such as GST (glutathione S-transferase, 26 kDa), which is an interesting result in comparison to other label free detection methods. (C) 2013 Elsevier B.V. All rights reserved.
Published: 2013

34. Single-step, high-throughput biofunctionalization of nanoelectromechanical systems by means of nanocontact printing method

Author: S. Guillon, Denis Dezest, Fabrice Mathieu, Christophe Thibault, Laurent Mazenq, Liviu Nicu, Florent Seichepine, A. Bouchier, Thierry Leichle, Christophe Vieu, and Sven Salomon
Subjects: chemistry.chemical_classification, Nanoelectromechanical systems, Materials science, Cantilever, Nanostructure, Nanocantilever, Nanotechnology, Polymer, Lab-on-a-chip, Chip, law.invention, chemistry, law, Nanobiotechnology
Abstract: This report presents an unprecedented back-end method for biofunctionalizing a large-scale array of nanocantilevers. The method presented here relies on the use of a modified nanocontact printing (nCP) process where antibodies are delivered onto a chip containing up to 106 nanostructures/cm2 from the high-parts (grooves) of a polymer stamp while its base sits on the nanocantilevers' chip, thus providing mechanical stability. The presence of antibodies is validated by fluorescent microscopy and measurement of the nanocantilever resonance frequency shifts provoked by the added biological mass demonstrates that the cantilevers retain their mechanical integrity.
Published: 2012

35. Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications

Author: Laurent Mazenq, Daisuke Saya, Samuel Guillon, Caroline Soyer, Jean Costecalde, Liviu Nicu, Denis Remiens, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
Subjects: 010302 applied physics, Nanoelectromechanical systems, Materials science, Acoustics and Ultrasonics, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, Lead zirconate titanate, 01 natural sciences, law.invention, chemistry.chemical_compound, Nanolithography, chemistry, Resist, law, 0103 physical sciences, Wafer, Electrical and Electronic Engineering, Photolithography, 0210 nano-technology, Instrumentation, Lithography, Next-generation lithography
Abstract: The advantage of using lead zirconate titanate (PbZr(0.54)Ti(0.46)O(3)) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we develop a specific patterning method based on optical lithography coupled with a dual-layer resist process. The main objective is to obtain sub-micrometer features by lifting off a 100-nm-thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.
Published: 2012

36. Efficient prototyping of large-scale pdms and silicon nanofluidic devices using pdms-based phase-shift lithography

Author: Qihao He, Yannick Viero, Aurélien Bancaud, Hubert Ranchon, Jean-Yves Fourniols, Laurent Mazenq, Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Materials science, Fabrication, Silicon, [PHYS.PHYS.PHYS-BIO-PH]Physics [physics]/Physics [physics]/Biological Physics [physics.bio-ph], PDMS stamp, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, 0104 chemical sciences, Electronic, Optical and Magnetic Materials, law.invention, chemistry, law, Materials Chemistry, Photolithography, 0210 nano-technology, Lithography
Abstract: International audience; In this study, we explore the potential of poly-dimethylsiloxane (PDMS)-based phase-shift lithography (PPSL) for the fabrication of nanofluidic devices. We establish that this technology, which was already shown to allow for the generation of 100 nm linear or punctual features over squared centimeter surfaces with conventional photolithography systems, is readily adequate to produce some of the most popular nanofluidic systems, namely nanochannels and nanoposts arrays. We also demonstrate that PPSL technology enables to generate PDMS and silicon nanofluidic systems. This technological achievement allows us to perform single DNA molecule manipulation experiments in PDMS and silicon nano-channels, and we observe an unexpectedly slow migration of DNA in PDMS devices, which is independent on salt or pH conditions. Our data in fact hint to the existence of an anomalous response of DNA in PDMS nanofluidic devices, which is likely associated to transient nonspecific interactions of DNA with PDMS walls. Overall, our work demonstrates the efficiency and the performances of PPSL for prototyping nanofluidic systems.
Published: 2012

37. Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect

Author: Liviu Nicu, Pierre Temple-Boyer, Florian Larramendy, Laurent Mazenq, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe NanoBioSystèmes (LAAS-NBS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: 010302 applied physics, Materials science, Fabrication, Microfluidics, Biomedical Engineering, Process (computing), Bioengineering, Nanotechnology, 02 engineering and technology, General Chemistry, 021001 nanoscience & nanotechnology, Fluid transport, 01 natural sciences, Biochemistry, Microsystem, 0103 physical sciences, Stepper, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Projection (set theory), Lithography
Abstract: International audience; Microfluidic devices are currently being used in many types of biochemical microsystems for the liquid phase analysis in the frame of medical applications. This paper presents a new technique for the realization of microfluidic channels using SU-8, a commonly used epoxy-based negative photo-resist. These microchannels were fabricated owing to a single stepper UV-photolithography process. By changing the process parameters, e.g. the optical focus depth and the UV exposure dose, well-defined, covered microchannels with various dimensions and aspect ratios were realized and proven to be effective for the fluid transport by capillarity. This technique can easily be used for the fabrication of microfluidic devices in microanalysis and lab-on-chip applications realm.
Published: 2011

38. Lead-zirconate titanate (PZT) nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical systems applications

Author: D. Saya, Laurent Mazenq, Caroline Soyer, Denis Remiens, S. Guillon, Jean Costecalde, Liviu Nicu, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
Subjects: 010302 applied physics, Nanoelectromechanical systems, Materials science, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, Lead zirconate titanate, 01 natural sciences, Piezoelectricity, law.invention, chemistry.chemical_compound, Nanolithography, Resist, chemistry, law, 0103 physical sciences, Wafer, Photolithography, 0210 nano-technology, Lithography
Abstract: The advantage of using lead zirconate-titanate (PbZr 0.54 Ti 0.46 O 3 ) ceramics as an active material in nano-electromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we are developed a specific patterning method based on optical lithography coupled with a dual layer resist process. The main objective is to obtain sub-micron features by lifting off a 100 nm thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.
Published: 2011

39. Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers

Author: Daisuke Saya, Samuel Guillon, Arnaud Lazarus, Liviu Nicu, P. Vincent, Olivier Thomas, Sorin Perisanu, Laurent Mazenq, Équipe NanoBioSystèmes (LAAS-NBS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire de Physique de la Matière Condensée et Nanostructures (LPMCN), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Mécanique des Structures et des Systèmes Couplés (LMSSC), Conservatoire National des Arts et Métiers [CNAM] (CNAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)
Subjects: Silicon, Cantilever, Materials science, Silicon on insulator, chemistry.chemical_element, Bioengineering, 02 engineering and technology, Curvature, 01 natural sciences, Vibration, [SPI]Engineering Sciences [physics], Optics, 0103 physical sciences, General Materials Science, Wafer, Electrical and Electronic Engineering, Stepper, Lithography, 010302 applied physics, business.industry, Mechanical Engineering, [SPI.MECA.VIBR]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Vibrations [physics.class-ph], General Chemistry, 021001 nanoscience & nanotechnology, Nanocantilevers, Clamping, chemistry, Mechanics of Materials, 0210 nano-technology, business
Abstract: International audience; In this paper, we investigate the effects of non-ideal clamping shapes on the dynamic behavior of silicon nanocantilevers. We fabricated silicon nanocantilevers using silicon on insulator (SOI) wafers by employing stepper ultraviolet (UV) lithography, which permits a resolution of under 100 nm. The nanocantilevers were driven by electrostatic force inside a scanning electron microscope (SEM). Both lateral and out-of-plane resonance frequencies were visually detected with the SEM. Next, we discuss overhanging of the cantilever support and curvature at the clamping point in the silicon nanocantilevers, which generally arises in the fabrication process. We found that the fundamental out-of-plane frequency of a realistically clamped cantilever is always lower than that for a perfectly clamped cantilever, and depends on the cantilever width and the geometry of the clamping point structure. Using simulation with the finite-elements method, we demonstrate that this discrepancy is attributed to the particular geometry of the clamping point (non-zero joining curvatures and a flexible overhanging) that is obtained in the fabrication process. The influence of the material orthotropy is also investigated and is shown to be negligible.
Published: 2011

40. Fabrication and characterization of 100-nm wide silicon nanocantilevers using top-down approach

Author: Liviu Nicu, Samuel Guillon, Pascal Vincent, Daisuke Saya, Sorin Perisanu, and Laurent Mazenq
Subjects: Materials science, Fabrication, Silicon, Nanocantilever, chemistry.chemical_element, Silicon on insulator, Nanotechnology, law.invention, Nanolithography, chemistry, law, Wafer, Stepper, Photolithography
Abstract: We present fabrication and characterization of silicon nanocantilevers as nano electromechanical systems (NEMS). We fabricated silicon nanocantilever using silicon on insulator (SOI) wafer by employing stepper UV lithography, which permits resolution of 100 nm. The nanocantilevers were driven by electrostatic force with approaching tungsten tip inside a scanning electron microscope (SEM). Both lateral and vertical resonance frequencies were visually detected with the SEM and compared with analytical results.
Published: 2011

41. Monitoring impulsional pH variations in microvolumes: A new approach for the electrochemical detection

Author: Pierre Temple-Boyer, Lyes Djeghlaf, Jérôme Launay, A.K. Diallo, W. Sant, and Laurent Mazenq
Subjects: Electrolysis, Microelectrode, Materials science, law, Potentiometric titration, Analytical chemistry, Field-effect transistor, Polarization (electrochemistry), Electrochemistry, Amperometry, law.invention, Electrochemical gas sensor
Abstract: This paper presents a new electrochemical sensor, named ElecFET (electrochemical field effect transistor), combining amperometric and potentiometric detection principles thanks to the functional integration of an electrochemical microelectrode with a pH-ChemFET microdevice. Thus, by triggering water-based electrolysis phenomena thanks to the integrated microelectrode, impulsional pH variations in microvolumes were evidenced by pH-ChemFET-metry and studied according to the main polarization parameters, i.e. voltage and duration. The ElecFET detection principles were finally extended to the detection of hydrogen peroxide H 2 O 2 in solution, evidencing a 1.25 mV/mM sensitivity in the [10 – 100 mM] concentration range.
Published: 2011

42. Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

Author: Pierre Temple-Boyer, Jérôme Launay, B. Torbiero, Jean-Baptiste Doucet, Laurent Mazenq, Véronique Conédéra, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
Subjects: Materials science, 02 engineering and technology, SU-8 resin 2, 010402 general chemistry, 01 natural sciences, spin coating, Deposition (phase transition), [SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering, Electrical and Electronic Engineering, Thin film, Composite material, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Maxwellian liquids, chemistry.chemical_classification, Spin coating, Condensed matter physics, Polymer, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, BCB resin, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, polysiloxane, Scientific method, 0210 nano-technology
Abstract: International audience; This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.
Published: 2010

43. Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media

Author: Laurent Mazenq, Caroline Soyer, Fabrice Mathieu, Denis Remiens, Thomas Alava, Liviu Nicu, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
Subjects: Engineering, business.industry, Oscillation, Mechanical Engineering, 010401 analytical chemistry, Thin layer, Electrical engineering, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Piezoelectricity, Piezoresistive effect, 0104 chemical sciences, Electronic, Optical and Magnetic Materials, Silicon based, Vibration, Quality (physics), Mechanics of Materials, Optoelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business
Abstract: In this paper, the authors report for the first time the physical cointegration of piezoelectric actuation and piezoresistive detection on resonating micromembranes dedicated to microgravimetric biosensing applications. The micromembranes are oscillated by a reverse piezoelectric phenomenon provided by a PbZrxTi1−xO3 46/54 thin layer. The oscillation amplitudes are read-out by measuring the resistance change of piezoresistors precisely located on the clamped edges of each micromembrane. The detection of the micromembranes' resonant frequencies is reported in air and deionized water. A dedicated electronic set-up operating the micromembranes in a closed-loop configuration is described. The set-up enables multiplexed tracking of four micromembranes' resonant frequencies in liquid media while enhancing the corresponding quality factors' values. Increases up to 11-fold of the micromembranes' quality factors in liquid is reported for the (0,1) vibration mode. A quality factor of up to 417 is reported in fluid.
Published: 2010

44. Design of bandpass filter in W-band on a silicon membrane

Author: T. M. Vu, Robert Plana, Laurent Bary, Alexandre Rumeau, Gaetan Prigent, and Laurent Mazenq
Subjects: Materials science, Electric power transmission, Narrowband, W band, Band-pass filter, Bandwidth (signal processing), Broadband, Electronic engineering, Prototype filter, Integrated circuit design
Abstract: The choice of membrane technology for filters in W-band was made considering the low dielectric losses observed in previous studies. Within this frequency range, the constraints related to losses and technological feasibility limit heavily the range of achievable impedances. Thus, this limits achievable bandwidth for broadband filters. Moreover for narrowband coupled-lines filters, we were faced with transmission lines shape-factor problems (wider than long). Therefore, we have chosen a narrowband pseudo-elliptic filter topology which has shown its efficiency and promising performances.
Published: 2008

45. pH-CHEMFET-BASED ANALYSIS DEVICES FOR THE BACTERIAL ACTIVITY MONITORING

Author: Pierre Temple-Boyer, Laurent Mazenq, Jérôme Launay, Marie Laure Pourciel-Gouzy, Sandrine Assié-Souleille, Équipe MICrosystèmes d'Analyse ( LAAS-MICA ), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] ( LAAS ), Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ) -Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ), Service Instrumentation Conception Caractérisation ( LAAS-I2C ), Service Techniques et Équipements Appliqués à la Microélectronique ( LAAS-TEAM ), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées
Subjects: Materials science, Silicon, bacterial activity detection, packaging, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 01 natural sciences, Chemical field-effect transistor, pH-ChemFET, PDMS flow-cell microdevice, Materials Chemistry, Bacterial activity, Fluidics, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, Lactobacillus crispatus, biology, 010401 analytical chemistry, Metals and Alloys, Response time, 021001 nanoscience & nanotechnology, Condensed Matter Physics, biology.organism_classification, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Electrode, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology
Abstract: International audience; Silicon and polymer microtechnologies have been developed in order to integrate pH-metry techniques in the frame of medical diagnosis. Thus, a fluidic analysis device has been designed and realised in order to monitor pH-related bacterial activities. It includes a SiO2/Si3N4 pH-sensitive chemical field effect transistor (pH-ChemFET), its titanium/gold pseudo-reference gate electrode and a poly-dimethylsiloxane (PDMS) integrated flow-cell (total volume: ≤ 2 mm 3). The whole analysis device has been used to detect the biological activities of the Lactobacillus Crispatus bacteria and to estimate its sensitivity to antibiotics. Results demonstrate the detection of pH-related bacterial metabolisms in microvolumes, enabling to reduce significantly the analysis response time with regards to standard procedures and to think to the development of pH-ChemFET-metry for medical analysis.
Published: 2008

46. High compactness / high isolation 3D-broadside couplers design methodology

Author: Laurent Mazenq, David Dubuc, M.N. Do, Katia Grenier, Robert Plana, and Laurent Bary
Subjects: Engineering, Compact space, business.industry, Electronic engineering, Power dividers and directional couplers, Hybrid coupler, Isolation (database systems), Network synthesis filters, Design methods, business, Broadside, Compensation (engineering)
Abstract: This paper presents an analytical design methodology for 3D broadside couplers using new concept of compensation by coupled lines at both ends of a main coupler section. This compensation technique introduces a degree of freedom in the design which can enhance the compactness or the isolation of the coupler. Simulations have been performed and good agreement with the analytical analysis is observed. Two demonstrators have been then optimized and demonstrate a size reduction of 50% or a 10 dB isolation improvement depending on the compensation scheme followed.
Published: 2006

47. 3D-BCB Based Branchline Coupler for K-band Integrated Microsystem

Author: Laurent Bary, M.N. Do, David Dubuc, Laurent Mazenq, Robert Plana, and Katia Grenier
Subjects: Electric power transmission, Computer science, K band, Microsystem, Emphasis (telecommunications), Return loss, Electronic engineering, Hybrid coupler, Electronic circuit, Active networking
Abstract: This paper presents the design of a high performance and compactness coupler integrated with a 3D technology using BCB (Benzo-Cyclo-Butene) polymer. The main interests of the proposed technology are first the possibility to design multilayer passive devices to achieve high compactness and secondly to be able to monolithically integrate both passive and active circuits as the technological process is fully compatible with ICs. This technology was used to design coupler for which high compactness is reached by applying size reduction to the transmission lines. Electromagnetic simulations have been performed and show excellent performances in terms of amplitude and phase imbalance, isolation and return loss. Several versions of the coupler have been compared to emphasis such performances versus the reduction factor.
Published: 2006

48. Efficient topology and design methodology for RF MEMS switches

Author: B. Ducarouge, Laurent Bary, Laurent Mazenq, David Dubuc, Robert Plana, Katia Grenier, and S. Melle
Subjects: Microelectromechanical systems, Hardware_GENERAL, Computer science, Hardware_INTEGRATEDCIRCUITS, Topology (electrical circuits), Topology, Design methods, Voltage
Abstract: We present an original RF-MEMS switch topology associated with an efficient design methodology. The proposed switch has been optimized thank to a scalable electrical model, fabricated and measured and exhibits isolations better than -23 dB and losses less than 0.25 dB at 24 GHz for a pull down voltage of 22V. The proposed topology and design methodology can then be efficiently used to optimize more complex RF-MEMS with enhanced microwave performances.
Published: 2005

49. MEMS above IC technology applied to a compact RF module (Keynote Paper)

Author: Katia Grenier, E. Sonmez, David Dubuc, Laurent Mazenq, Robert Plana, P. Abele, Peter Lindberg, Hermann Schumacher, Anders Rydberg, J. Berntgen, Erik Öjefors, and W.J. Rabe
Subjects: Microelectromechanical systems, Materials science, business.industry, Electrical engineering, Hardware_PERFORMANCEANDRELIABILITY, RF module, Integrated circuit, law.invention, Surface micromachining, law, visual_art, Electronic component, Hardware_INTEGRATEDCIRCUITS, visual_art.visual_art_medium, Electronic engineering, Microelectronics, business, Monolithic microwave integrated circuit, Electronic circuit
Abstract: Miniaturization, low cost and excellent performances at microwave and millimeterwave applications represent the main leitmotivs of the future mass market communication systems. Consequently, a novel "MEMS above IC" technology has developed in order to allow the elaboration of post-processed micro-machined passive components on top of SiGe circuits to realize a complete short-range communication receiver centered at 24 GHz. The developed technology is based on the use of : -a thick organic layer (BCB), which is employed as a dielectric membrane, -metallizations to realize the passive metal layer and also the vias to interconnect the active circuits with the post-processed passive components, -and a bulk silicon micromachining. This 'above IC' technology presents many advantages, as it uses conventional equipments of microelectronics and is in adequation with high frequency applications. A specific attention has been carried out in order to assure the compatibility of the post-process steps and the IC’s. This has been performed through the choice of the adequate technological steps, which had to present a low temperature budget. The compatibility of each step has been evaluated with a specific test protocol on SiGe transistors. It implies static and dynamic characterisation of these transistors as well as low frequency noise measurements. Each step has been validated, even the bulk silicon micromachining. Design rules have thus been defined in order to localize the silicon etching without any damage on the ICs.
Published: 2005

50. Polymer based technologies for microwave and millimeterwave applications

Author: A. Rennane, David Dubuc, Katia Grenier, B. Ducarouge, Robert Plana, J.P. Busquere, Pascal Ancey, Patrick Pons, Laurent Mazenq, Victor Manuel Lubecke, and F. Bouchriha
Subjects: Microelectromechanical systems, chemistry.chemical_classification, chemistry, Computer science, business.industry, Electronic engineering, Electrical engineering, Reconfigurability, Polymer, Communications system, business, Microwave, Electronic circuit
Abstract: Thanks to very interesting electrical, mechanical and thermal characteristics, polymers are getting particularly attractive in microwave and millimeterwave applications. This paper gives an overview of different possible polymer implementation in high frequency circuits, from the minimization of circuits' losses up to 3D integration of the future communication systems. Allied to MEMS technologies, intelligent modules with high compactness and reconfigurability become possible.
Published: 2005

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