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4. Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiNx Films Using Trichlorodisilane for Etch-Resistant Coatings

6. High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor

7. Photochemical study of metal infiltrated e-beam resist using vapor-phase infiltration for EUV applications

9. Vapor-phase Surface Cleaning of Electroplated Cu Films Using Anhydrous N2H4

10. Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiNx) Thin Films Using Pentachlorodisilane (PCDS)

11. A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films

12. A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf

14. Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper

15. Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane

17. Investigation on etching characteristics of Pd thin films using CH 3 COOH/Ar gas

18. Anisotropic etching of CoFeB magnetic thin films in C 2 H 5 OH/Ar plasma

19. Dry etching of palladium thin films in high density plasmas of CH3OH/Ar, C2H5OH/Ar, CH4/Ar, and CH4/O2/Ar gas mixtures

20. A Novel Combinatorial Approach to the Ferroelectric Properties in Hf x Zr 1− x O 2 Deposited by Atomic Layer Deposition

21. Highly anisotropic etching of Ta thin films using high density plasmas of halogen based gases

22. Etch characteristics of Ru thin films using O2/Ar, CH4/Ar, and O2/CH4/Ar plasmas

23. Cleaning and Passivation of Copper Surface Using N2H4, and Self-Assembled Monolayers for Area-Selective Atomic Layer Deposition (AS-ALD) Applications

24. Ozone based high-temperature atomic layer deposition of SiO2thin films

25. Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixture

26. Inductive couple plasma reactive ion etching characteristics of TiO2 thin films

27. High density plasma reactive ion etching of Ru thin films using non-corrosive gas mixture

28. Dry etching of Co 2 MnSi magnetic thin films using a CH 3 OH/Ar based inductively coupled plasma

29. Etch characteristics of CoFeB thin films and magnetic tunnel junction stacks in a H2O/CH3OH plasma

31. Variation of Fractionated Protein Content by Solubility in Korean Local Sorghum Seed

32. Etch characteristics of MgO thin films in Cl2/Ar, CH3OH/Ar and CH4/Ar plasmas

33. Effect of hydrogen derived from oxygen source on low-temperature ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors

34. Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiNx) Thin Films Using Pentachlorodisilane (PCDS)

36. Photochemical Response Analysis on Drought Stress for Red Pepper (Capsiumannuum L.)

37. A REMARK ON IFP RINGS

38. Low Temperature Thermal ALD of Silicon Nitride Utilizing a Novel High Purity Hydrazine Source

39. Influence of oxygen on characteristics of Zn(O,S) thin films deposited by RF magnetron sputtering

40. Effect of O2 on etch characteristics of Co2MnSi thin films in CH4/O2/Ar gas mixture

41. Influence of oxygen on characteristics of Zn(O,S) thin films deposited by RF magnetron sputtering.

42. Effect of O2 on etch characteristics of Co2MnSi thin films in CH4/O2/Ar gas mixture.

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