1. Deposition of TiO2/Al2O3 bilayer on hydrogenated diamond for electronic devices: Capacitors, field-effect transistors, and logic inverters.
- Author
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J. W. Liu, M. Y. Liao, Imura, M., Banal, R. G., and Koide, Y.
- Subjects
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DIAMOND thin films , *SPUTTER deposition , *METAL oxide semiconductor design & construction , *METAL oxide semiconductor field-effect transistors , *ATOMIC layer deposition ,DESIGN & construction - Abstract
The wide bandgap semiconductor diamond has been studied to develop high-power and highfrequency electronic devices. Here, high dielectric constant (high-k) TiO2/Al2O3 bilayers are deposited on hydrogenated diamond (H-diamond) channel layers using sputter deposition (SD) and atomic layer deposition (ALD) techniques. Thin ALD-Al2O3 films are employed as buffer layers for the SD-TiO2 and ALD-TiO2 on H-diamond to suppress plasma discharge effect and to decrease leakage current density (J), respectively. The electrical properties of the resulting TiO2/ALD-Al2O3/Hdiamond metal-oxide-semiconductor (MOS) capacitors, MOS field-effect transistors (MOSFETs), and MOSFET logic inverters are investigated. With the same thickness (4.0 nm) for ALD-Al2O3 buffer layer, the ALD-TiO2/ALD-Al2O3/H-diamond MOS capacitor shows a lower J and better capacitance-voltage characteristics than the SD-TiO2/ALD-Al2O3/H-diamond capacitor. The maximum capacitance of the ALD-TiO2/ALD-Al2O3/H-diamond capacitor and the k value of the ALDTiO2/ALD-Al2O3 bilayer are 0.83 μF cm-2 and 27.2, respectively. Valence band offset between ALD-TiO2 and H-diamond is calculated to be 2.3±0.2 eV based on the element binding energies measured using an X-ray photoelectron spectroscopy technique. Both the SD-TiO2/ALD-Al2O3 H-diamond and ALD-TiO2/ALD-Al2O3-diamond MOSFETs show p-type, pinch-off, and enhancement mode characteristics with on/off current ratios around 109. The subthreshold swings of them are 115 and as low as 79mV dec-1, respectively. The ALD-TiO2/ALD-Al2O3/H-diamond MOSFET logic inverters, when coupled with load resistors, show distinct inversion characteristics with gains of 6.2–12.7. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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