201. Reversible Degradation of Ohmic Contacts on p-GaN for Application in High-Brightness LEDs.
- Author
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Meneghini, Matteo, Trevisanello, Lorenzo-Roberto, Zehnder, Ulrich, Meneghesso, Gaudenzio, and Zanoni, Enrico
- Subjects
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HIGH temperatures , *ELECTRIC lines , *VOLTAGE regulators , *INTEGRATED circuit passivation , *METAL semiconductor field-effect transistors , *FIELD-effect transistors , *OHMIC contacts , *CHEMICAL vapor deposition , *SEMICONDUCTORS - Abstract
This paper analyzes the high-temperature long-term stability of ohmic contacts on p-type gallium nitride (p-GaN). The contributions of the ohmic contacts and semiconductor material degradation are separated by adopting the transmission line method (TLM). Before stress, the current-voltage (I-V) curves measured at the pads of the TLMs showed a linear shape, indicating a good ohmic behavior of the contacts. Thermal treatment at 250 °C was found to induce the worsening of the electrical characteristics of the contacts: identified degradation modes consist of a shift of the I-V curves toward higher voltages and strong nonlinearity of the characteristics around zero. This paper shows that the high-temperature instabilities of ohmic contacts on p-GaN are related to the interaction between the device surface and the plasma-enhanced chemical vapor deposition SiN passivation layer. Hydrogen contained in the passivation layer is supposed to play an important role in the degradation process: the interaction with the acceptor dopant at the metal/semiconductor interface induces the decrease of the effective acceptor concentration. As a consequence, both the ohmic contact characteristics and the semiconductor sheet resistance are worsened. [ABSTRACT FROM AUTHOR]
- Published
- 2007
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